DE69710324T2 - Diamantaehnliche nanokomposit-zusammensetzungen - Google Patents
Diamantaehnliche nanokomposit-zusammensetzungenInfo
- Publication number
- DE69710324T2 DE69710324T2 DE69710324T DE69710324T DE69710324T2 DE 69710324 T2 DE69710324 T2 DE 69710324T2 DE 69710324 T DE69710324 T DE 69710324T DE 69710324 T DE69710324 T DE 69710324T DE 69710324 T2 DE69710324 T2 DE 69710324T2
- Authority
- DE
- Germany
- Prior art keywords
- composition
- precursor
- substrate
- layer
- bias
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000203 mixture Substances 0.000 title claims description 37
- 239000002114 nanocomposite Substances 0.000 title claims description 14
- 239000000758 substrate Substances 0.000 claims description 25
- 238000000034 method Methods 0.000 claims description 18
- 238000000151 deposition Methods 0.000 claims description 16
- 230000008021 deposition Effects 0.000 claims description 13
- 239000002243 precursor Substances 0.000 claims description 13
- 229910052739 hydrogen Inorganic materials 0.000 claims description 9
- 239000011261 inert gas Substances 0.000 claims description 9
- 230000008569 process Effects 0.000 claims description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 9
- 229910052799 carbon Inorganic materials 0.000 claims description 8
- 238000005137 deposition process Methods 0.000 claims description 8
- 229910052710 silicon Inorganic materials 0.000 claims description 8
- 229910052786 argon Inorganic materials 0.000 claims description 7
- 229910052760 oxygen Inorganic materials 0.000 claims description 7
- 229910000831 Steel Inorganic materials 0.000 claims description 6
- 150000002500 ions Chemical class 0.000 claims description 6
- 239000010959 steel Substances 0.000 claims description 6
- 229910052723 transition metal Inorganic materials 0.000 claims description 6
- 150000003624 transition metals Chemical class 0.000 claims description 6
- 238000007373 indentation Methods 0.000 claims description 5
- 150000001875 compounds Chemical class 0.000 claims description 4
- 238000010849 ion bombardment Methods 0.000 claims description 4
- 229910052726 zirconium Inorganic materials 0.000 claims description 4
- ZMKZAIYIHPJZHV-UHFFFAOYSA-N [dimethyl(trimethylsilyloxy)silyl]oxy-[dimethyl(triphenylsilyloxy)silyl]oxy-dimethylsilane Chemical compound C=1C=CC=CC=1[Si](C=1C=CC=CC=1)(O[Si](C)(C)O[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C)C1=CC=CC=C1 ZMKZAIYIHPJZHV-UHFFFAOYSA-N 0.000 claims description 3
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 3
- 238000004544 sputter deposition Methods 0.000 claims description 3
- 229910052721 tungsten Inorganic materials 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims description 2
- -1 polyphenylmethylsiloxane Polymers 0.000 claims description 2
- 238000002207 thermal evaporation Methods 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- 238000012360 testing method Methods 0.000 description 16
- 239000010410 layer Substances 0.000 description 9
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 239000011521 glass Substances 0.000 description 4
- 238000010348 incorporation Methods 0.000 description 4
- 238000005001 rutherford backscattering spectroscopy Methods 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000001678 elastic recoil detection analysis Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000003595 mist Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910018540 Si C Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000000839 emulsion Substances 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000011540 hip replacement Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000013150 knee replacement Methods 0.000 description 1
- 239000012705 liquid precursor Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 238000001314 profilometry Methods 0.000 description 1
- 239000011253 protective coating Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/503—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using DC or AC discharges
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2206/00—Materials with ceramics, cermets, hard carbon or similar non-metallic hard materials as main constituents
- F16C2206/02—Carbon based material
- F16C2206/04—Diamond like carbon [DLC]
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2240/00—Specified values or numerical ranges of parameters; Relations between them
- F16C2240/40—Linear dimensions, e.g. length, radius, thickness, gap
- F16C2240/60—Thickness, e.g. thickness of coatings
- F16C2240/64—Thickness, e.g. thickness of coatings in the nanometer range
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
- Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
- Y10T428/264—Up to 3 mils
- Y10T428/265—1 mil or less
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Inorganic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Carbon And Carbon Compounds (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP96201070 | 1996-04-22 | ||
| PCT/EP1997/001878 WO1997040207A1 (en) | 1996-04-22 | 1997-04-11 | Diamond-like nanocomposite compositions |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69710324D1 DE69710324D1 (de) | 2002-03-21 |
| DE69710324T2 true DE69710324T2 (de) | 2002-08-29 |
Family
ID=8223897
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69710324T Expired - Lifetime DE69710324T2 (de) | 1996-04-22 | 1997-04-11 | Diamantaehnliche nanokomposit-zusammensetzungen |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US6200675B1 (enExample) |
| EP (1) | EP0896640B1 (enExample) |
| JP (1) | JP4439594B2 (enExample) |
| AU (1) | AU2697797A (enExample) |
| DE (1) | DE69710324T2 (enExample) |
| TW (1) | TW420724B (enExample) |
| WO (1) | WO1997040207A1 (enExample) |
Families Citing this family (57)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ATE211510T1 (de) | 1997-02-04 | 2002-01-15 | Bekaert Sa Nv | Beschichtung enthaltend filme aus diamantartigem kohlenstoff und diamantartigem nanokomposit |
| EP0885983A1 (en) | 1997-06-19 | 1998-12-23 | N.V. Bekaert S.A. | Method for coating a substrate with a diamond like nanocomposite composition |
| JP4439734B2 (ja) | 1998-06-03 | 2010-03-24 | ブルー・メディカル・デバイシーズ・ベスローテン・フェンノートシャップ | ダイヤモンド様コーティングを有するステント |
| EP1123991A3 (en) | 2000-02-08 | 2002-11-13 | Asm Japan K.K. | Low dielectric constant materials and processes |
| US6749813B1 (en) * | 2000-03-05 | 2004-06-15 | 3M Innovative Properties Company | Fluid handling devices with diamond-like films |
| US6696157B1 (en) * | 2000-03-05 | 2004-02-24 | 3M Innovative Properties Company | Diamond-like glass thin films |
| US6795636B1 (en) | 2000-03-05 | 2004-09-21 | 3M Innovative Properties Company | Radiation-transmissive films on glass articles |
| US6669996B2 (en) * | 2000-07-06 | 2003-12-30 | University Of Louisville | Method of synthesizing metal doped diamond-like carbon films |
| WO2002009791A1 (en) * | 2000-07-28 | 2002-02-07 | Blue Medical Devices B.V. | Intravascular stent with expandable coating |
| US6905981B1 (en) | 2000-11-24 | 2005-06-14 | Asm Japan K.K. | Low-k dielectric materials and processes |
| US7106939B2 (en) | 2001-09-19 | 2006-09-12 | 3M Innovative Properties Company | Optical and optoelectronic articles |
| US6895855B2 (en) | 2001-10-01 | 2005-05-24 | The Timken Company | Hydraulic motors and pumps with engineered surfaces |
| WO2004090361A2 (en) * | 2003-04-03 | 2004-10-21 | The Timken Company | Corrosion tolerant rolling element bearing |
| KR101003865B1 (ko) * | 2003-08-06 | 2010-12-30 | 닛산 지도우샤 가부시키가이샤 | 저마찰 접동 기구, 저마찰제 조성물 및 마찰 감소 방법 |
| AU2003298338A1 (en) * | 2003-12-02 | 2005-06-24 | N.V. Bekaert S.A. | A layered structure |
| US7824498B2 (en) * | 2004-02-24 | 2010-11-02 | Applied Materials, Inc. | Coating for reducing contamination of substrates during processing |
| JP2005314454A (ja) * | 2004-04-27 | 2005-11-10 | Toyota Central Res & Dev Lab Inc | 低摩擦摺動部材 |
| US7296965B2 (en) * | 2004-08-23 | 2007-11-20 | United Technologies Corporation | Cryogenic bearings |
| JP2006138404A (ja) * | 2004-11-12 | 2006-06-01 | Kobe Steel Ltd | 水系環境下での耐摩耗性に優れた摺動部材 |
| EP1726682A1 (en) * | 2005-05-26 | 2006-11-29 | NV Bekaert SA | Coating comprising layered structures of diamond like nanocomposite layers and diamond like carbon layers. |
| WO2006134066A1 (en) * | 2005-06-13 | 2006-12-21 | Nv Bekaert Sa | Coated spinning ring |
| US20070020451A1 (en) * | 2005-07-20 | 2007-01-25 | 3M Innovative Properties Company | Moisture barrier coatings |
| WO2007136777A2 (en) * | 2006-05-17 | 2007-11-29 | G & H Technologies Llc | Wear resistant coating |
| US20080006819A1 (en) * | 2006-06-19 | 2008-01-10 | 3M Innovative Properties Company | Moisture barrier coatings for organic light emitting diode devices |
| US8047653B2 (en) | 2006-11-10 | 2011-11-01 | Sumitomo Electric Industries, Ltd. | Si-O containing hydrogenated carbon film, optical device including the same, and method for manufacturing the Si-O containing hydrogenated carbon film and the optical device |
| BRPI0814936A2 (pt) * | 2007-08-23 | 2015-02-03 | Saint Gobain Abrasives Inc | Concepção otimizada de condidionador de cmp para cmp óxido/metal da próxima geração |
| JP5090389B2 (ja) * | 2009-02-26 | 2012-12-05 | オーエスジー株式会社 | Ｄｌｃコーティングルアー |
| CN102341215B (zh) * | 2009-03-24 | 2014-06-18 | 圣戈班磨料磨具有限公司 | 用作化学机械平坦化垫修整器的研磨工具 |
| WO2010132581A2 (en) * | 2009-05-13 | 2010-11-18 | Cv Holdings, Llc | Vessel coating and inspection |
| US9545360B2 (en) | 2009-05-13 | 2017-01-17 | Sio2 Medical Products, Inc. | Saccharide protective coating for pharmaceutical package |
| CN102459693B (zh) * | 2009-05-13 | 2015-11-25 | Sio2医药产品公司 | 使用有机硅前体的pecvd涂层 |
| MX345403B (es) | 2009-05-13 | 2017-01-30 | Sio2 Medical Products Inc | Revestimiento por pecvd utilizando un precursor organosilícico. |
| US7985188B2 (en) | 2009-05-13 | 2011-07-26 | Cv Holdings Llc | Vessel, coating, inspection and processing apparatus |
| CA2764358A1 (en) * | 2009-06-02 | 2010-12-09 | Saint-Gobain Abrasives, Inc. | Corrosion-resistant cmp conditioning tools and methods for making and using same |
| US9458536B2 (en) | 2009-07-02 | 2016-10-04 | Sio2 Medical Products, Inc. | PECVD coating methods for capped syringes, cartridges and other articles |
| EP2474025A2 (en) | 2009-09-01 | 2012-07-11 | Saint-Gobain Abrasives, Inc. | Chemical mechanical polishing conditioner |
| EP2543633A4 (en) * | 2010-03-03 | 2016-07-06 | Taiyo Yuden Chemical Technology Co Ltd | METHOD OF FIXING ON A LAYER COMPRISING AMORPHOUS CARBON FILM, AND LAMINATE |
| US11624115B2 (en) | 2010-05-12 | 2023-04-11 | Sio2 Medical Products, Inc. | Syringe with PECVD lubrication |
| US9878101B2 (en) | 2010-11-12 | 2018-01-30 | Sio2 Medical Products, Inc. | Cyclic olefin polymer vessels and vessel coating methods |
| US9272095B2 (en) | 2011-04-01 | 2016-03-01 | Sio2 Medical Products, Inc. | Vessels, contact surfaces, and coating and inspection apparatus and methods |
| US9554968B2 (en) | 2013-03-11 | 2017-01-31 | Sio2 Medical Products, Inc. | Trilayer coated pharmaceutical packaging |
| EP2776603B1 (en) | 2011-11-11 | 2019-03-06 | SiO2 Medical Products, Inc. | PASSIVATION, pH PROTECTIVE OR LUBRICITY COATING FOR PHARMACEUTICAL PACKAGE, COATING PROCESS AND APPARATUS |
| US11116695B2 (en) | 2011-11-11 | 2021-09-14 | Sio2 Medical Products, Inc. | Blood sample collection tube |
| US20150297800A1 (en) | 2012-07-03 | 2015-10-22 | Sio2 Medical Products, Inc. | SiOx BARRIER FOR PHARMACEUTICAL PACKAGE AND COATING PROCESS |
| KR101439131B1 (ko) * | 2012-09-21 | 2014-09-11 | 현대자동차주식회사 | 흡배기 밸브용 코팅재 및 이의 제조방법 |
| CA2890066C (en) | 2012-11-01 | 2021-11-09 | Sio2 Medical Products, Inc. | Coating inspection method |
| US9903782B2 (en) | 2012-11-16 | 2018-02-27 | Sio2 Medical Products, Inc. | Method and apparatus for detecting rapid barrier coating integrity characteristics |
| US9764093B2 (en) | 2012-11-30 | 2017-09-19 | Sio2 Medical Products, Inc. | Controlling the uniformity of PECVD deposition |
| KR102211950B1 (ko) | 2012-11-30 | 2021-02-04 | 에스아이오2 메디컬 프로덕츠, 인크. | 의료용 주사기 카트리지 등의 pecvd 증착 균일성 제어 |
| US20160015898A1 (en) | 2013-03-01 | 2016-01-21 | Sio2 Medical Products, Inc. | Plasma or cvd pre-treatment for lubricated pharmaceutical package, coating process and apparatus |
| US9937099B2 (en) | 2013-03-11 | 2018-04-10 | Sio2 Medical Products, Inc. | Trilayer coated pharmaceutical packaging with low oxygen transmission rate |
| US9863042B2 (en) | 2013-03-15 | 2018-01-09 | Sio2 Medical Products, Inc. | PECVD lubricity vessel coating, coating process and apparatus providing different power levels in two phases |
| JPWO2014148479A1 (ja) * | 2013-03-19 | 2017-02-16 | 太陽誘電ケミカルテクノロジー株式会社 | 防汚用の非晶質炭素膜を備える構造体及び防汚用の非晶質炭素膜の形成方法 |
| JP6043233B2 (ja) * | 2013-04-15 | 2016-12-14 | 株式会社神戸製鋼所 | 非晶質炭素系皮膜およびその製造方法 |
| US11066745B2 (en) | 2014-03-28 | 2021-07-20 | Sio2 Medical Products, Inc. | Antistatic coatings for plastic vessels |
| CN108138316A (zh) | 2015-08-18 | 2018-06-08 | Sio2医药产品公司 | 具有低氧气传输速率的药物和其他包装 |
| US11639543B2 (en) | 2019-05-22 | 2023-05-02 | Thin Film Service, Inc. | Tetrahedral amorphous hydrogenated carbon and amorphous siloxane diamond-like nanocomposite |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5352493A (en) * | 1991-05-03 | 1994-10-04 | Veniamin Dorfman | Method for forming diamond-like nanocomposite or doped-diamond-like nanocomposite films |
-
1997
- 1997-04-11 US US09/171,614 patent/US6200675B1/en not_active Expired - Lifetime
- 1997-04-11 JP JP53768997A patent/JP4439594B2/ja not_active Expired - Fee Related
- 1997-04-11 WO PCT/EP1997/001878 patent/WO1997040207A1/en not_active Ceased
- 1997-04-11 DE DE69710324T patent/DE69710324T2/de not_active Expired - Lifetime
- 1997-04-11 EP EP97920688A patent/EP0896640B1/en not_active Expired - Lifetime
- 1997-04-11 AU AU26977/97A patent/AU2697797A/en not_active Abandoned
- 1997-04-26 TW TW086105584A patent/TW420724B/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| JP4439594B2 (ja) | 2010-03-24 |
| WO1997040207A1 (en) | 1997-10-30 |
| EP0896640B1 (en) | 2002-02-06 |
| TW420724B (en) | 2001-02-01 |
| EP0896640A1 (en) | 1999-02-17 |
| US6200675B1 (en) | 2001-03-13 |
| AU2697797A (en) | 1997-11-12 |
| JP2000508713A (ja) | 2000-07-11 |
| DE69710324D1 (de) | 2002-03-21 |
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