TW420724B - Improved diamond-like nanocomposite compositions - Google Patents
Improved diamond-like nanocomposite compositions Download PDFInfo
- Publication number
- TW420724B TW420724B TW086105584A TW86105584A TW420724B TW 420724 B TW420724 B TW 420724B TW 086105584 A TW086105584 A TW 086105584A TW 86105584 A TW86105584 A TW 86105584A TW 420724 B TW420724 B TW 420724B
- Authority
- TW
- Taiwan
- Prior art keywords
- item
- patent application
- composition
- scope
- atomic percent
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/503—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using DC or AC discharges
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2206/00—Materials with ceramics, cermets, hard carbon or similar non-metallic hard materials as main constituents
- F16C2206/02—Carbon based material
- F16C2206/04—Diamond like carbon [DLC]
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2240/00—Specified values or numerical ranges of parameters; Relations between them
- F16C2240/40—Linear dimensions, e.g. length, radius, thickness, gap
- F16C2240/60—Thickness, e.g. thickness of coatings
- F16C2240/64—Thickness, e.g. thickness of coatings in the nanometer range
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
- Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
- Y10T428/264—Up to 3 mils
- Y10T428/265—1 mil or less
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Inorganic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Carbon And Carbon Compounds (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP96201070 | 1996-04-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW420724B true TW420724B (en) | 2001-02-01 |
Family
ID=8223897
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW086105584A TW420724B (en) | 1996-04-22 | 1997-04-26 | Improved diamond-like nanocomposite compositions |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US6200675B1 (enExample) |
| EP (1) | EP0896640B1 (enExample) |
| JP (1) | JP4439594B2 (enExample) |
| AU (1) | AU2697797A (enExample) |
| DE (1) | DE69710324T2 (enExample) |
| TW (1) | TW420724B (enExample) |
| WO (1) | WO1997040207A1 (enExample) |
Families Citing this family (57)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA2277977C (en) | 1997-02-04 | 2006-10-31 | N.V. Bekaert S.A. | A coating comprising layers of diamond like carbon and diamond like nanocomposite compositions |
| EP0885983A1 (en) | 1997-06-19 | 1998-12-23 | N.V. Bekaert S.A. | Method for coating a substrate with a diamond like nanocomposite composition |
| US6572651B1 (en) | 1998-06-03 | 2003-06-03 | N.V. Bekaert S.A. | Stents with a diamond like coating |
| EP1123991A3 (en) | 2000-02-08 | 2002-11-13 | Asm Japan K.K. | Low dielectric constant materials and processes |
| US6696157B1 (en) | 2000-03-05 | 2004-02-24 | 3M Innovative Properties Company | Diamond-like glass thin films |
| US6795636B1 (en) | 2000-03-05 | 2004-09-21 | 3M Innovative Properties Company | Radiation-transmissive films on glass articles |
| US6749813B1 (en) | 2000-03-05 | 2004-06-15 | 3M Innovative Properties Company | Fluid handling devices with diamond-like films |
| US6669996B2 (en) * | 2000-07-06 | 2003-12-30 | University Of Louisville | Method of synthesizing metal doped diamond-like carbon films |
| JP2004504888A (ja) * | 2000-07-28 | 2004-02-19 | ブルー・メディカル・デバイシーズ・ベスローテン・フェンノートシャップ | 拡張性皮膜を有する血管内ステント |
| US6905981B1 (en) | 2000-11-24 | 2005-06-14 | Asm Japan K.K. | Low-k dielectric materials and processes |
| US7106939B2 (en) | 2001-09-19 | 2006-09-12 | 3M Innovative Properties Company | Optical and optoelectronic articles |
| US6895855B2 (en) | 2001-10-01 | 2005-05-24 | The Timken Company | Hydraulic motors and pumps with engineered surfaces |
| WO2004090361A2 (en) * | 2003-04-03 | 2004-10-21 | The Timken Company | Corrosion tolerant rolling element bearing |
| US8206035B2 (en) * | 2003-08-06 | 2012-06-26 | Nissan Motor Co., Ltd. | Low-friction sliding mechanism, low-friction agent composition and method of friction reduction |
| AU2003298338A1 (en) * | 2003-12-02 | 2005-06-24 | N.V. Bekaert S.A. | A layered structure |
| US7824498B2 (en) * | 2004-02-24 | 2010-11-02 | Applied Materials, Inc. | Coating for reducing contamination of substrates during processing |
| JP2005314454A (ja) * | 2004-04-27 | 2005-11-10 | Toyota Central Res & Dev Lab Inc | 低摩擦摺動部材 |
| US7296965B2 (en) * | 2004-08-23 | 2007-11-20 | United Technologies Corporation | Cryogenic bearings |
| JP2006138404A (ja) * | 2004-11-12 | 2006-06-01 | Kobe Steel Ltd | 水系環境下での耐摩耗性に優れた摺動部材 |
| EP1726682A1 (en) * | 2005-05-26 | 2006-11-29 | NV Bekaert SA | Coating comprising layered structures of diamond like nanocomposite layers and diamond like carbon layers. |
| WO2006134066A1 (en) * | 2005-06-13 | 2006-12-21 | Nv Bekaert Sa | Coated spinning ring |
| US20070020451A1 (en) * | 2005-07-20 | 2007-01-25 | 3M Innovative Properties Company | Moisture barrier coatings |
| CA2885593C (en) * | 2006-05-17 | 2018-03-06 | G & H Technologies Llc | Wear resistant coating |
| US20080006819A1 (en) * | 2006-06-19 | 2008-01-10 | 3M Innovative Properties Company | Moisture barrier coatings for organic light emitting diode devices |
| EP2088123A1 (en) * | 2006-11-10 | 2009-08-12 | Sumitomo Electric Industries, Ltd. | Si-O CONTAINING HYDROGENATED CARBON FILM, OPTICAL DEVICE INCLUDING THE SAME, AND METHOD FOR MANUFACTURING THE Si-O CONTAINING HYDROGENATED FILM AND THE OPTICAL DEVICE |
| CN101983116B (zh) * | 2007-08-23 | 2012-10-24 | 圣戈班磨料磨具有限公司 | 用于下一代氧化物/金属cmp的优化的cmp修整器设计 |
| JP5090389B2 (ja) * | 2009-02-26 | 2012-12-05 | オーエスジー株式会社 | Dlcコーティングルアー |
| JP5502987B2 (ja) | 2009-03-24 | 2014-05-28 | サンーゴバン アブレイシブズ,インコーポレイティド | 化学機械平坦化パッドコンディショナとして使用するための研磨工具 |
| CN102459693B (zh) * | 2009-05-13 | 2015-11-25 | Sio2医药产品公司 | 使用有机硅前体的pecvd涂层 |
| WO2010132591A2 (en) * | 2009-05-13 | 2010-11-18 | Cv Holdings, Llc | Pecvd coating using an organosilicon precursor |
| US7985188B2 (en) | 2009-05-13 | 2011-07-26 | Cv Holdings Llc | Vessel, coating, inspection and processing apparatus |
| DK2251454T3 (da) | 2009-05-13 | 2014-10-13 | Sio2 Medical Products Inc | Coating og inspektion af beholder |
| MY155563A (en) * | 2009-06-02 | 2015-10-30 | Saint Gobain Abrasives Inc | Corrosion-resistant cmp conditioning tools and methods for making and using same |
| US9458536B2 (en) | 2009-07-02 | 2016-10-04 | Sio2 Medical Products, Inc. | PECVD coating methods for capped syringes, cartridges and other articles |
| EP2474025A2 (en) | 2009-09-01 | 2012-07-11 | Saint-Gobain Abrasives, Inc. | Chemical mechanical polishing conditioner |
| WO2011108625A1 (ja) | 2010-03-03 | 2011-09-09 | 太陽化学工業株式会社 | 非晶質炭素膜からなる層への固定化方法及び積層体 |
| US11624115B2 (en) | 2010-05-12 | 2023-04-11 | Sio2 Medical Products, Inc. | Syringe with PECVD lubrication |
| US9878101B2 (en) | 2010-11-12 | 2018-01-30 | Sio2 Medical Products, Inc. | Cyclic olefin polymer vessels and vessel coating methods |
| US9272095B2 (en) | 2011-04-01 | 2016-03-01 | Sio2 Medical Products, Inc. | Vessels, contact surfaces, and coating and inspection apparatus and methods |
| AU2012318242A1 (en) | 2011-11-11 | 2013-05-30 | Sio2 Medical Products, Inc. | Passivation, pH protective or lubricity coating for pharmaceutical package, coating process and apparatus |
| US11116695B2 (en) | 2011-11-11 | 2021-09-14 | Sio2 Medical Products, Inc. | Blood sample collection tube |
| EP2846755A1 (en) | 2012-05-09 | 2015-03-18 | SiO2 Medical Products, Inc. | Saccharide protective coating for pharmaceutical package |
| US20150297800A1 (en) | 2012-07-03 | 2015-10-22 | Sio2 Medical Products, Inc. | SiOx BARRIER FOR PHARMACEUTICAL PACKAGE AND COATING PROCESS |
| KR101439131B1 (ko) * | 2012-09-21 | 2014-09-11 | 현대자동차주식회사 | 흡배기 밸브용 코팅재 및 이의 제조방법 |
| CA2890066C (en) | 2012-11-01 | 2021-11-09 | Sio2 Medical Products, Inc. | Coating inspection method |
| WO2014078666A1 (en) | 2012-11-16 | 2014-05-22 | Sio2 Medical Products, Inc. | Method and apparatus for detecting rapid barrier coating integrity characteristics |
| US9764093B2 (en) | 2012-11-30 | 2017-09-19 | Sio2 Medical Products, Inc. | Controlling the uniformity of PECVD deposition |
| EP2925903B1 (en) | 2012-11-30 | 2022-04-13 | Si02 Medical Products, Inc. | Controlling the uniformity of pecvd deposition on medical syringes, cartridges, and the like |
| EP2961858B1 (en) | 2013-03-01 | 2022-09-07 | Si02 Medical Products, Inc. | Coated syringe. |
| US9937099B2 (en) | 2013-03-11 | 2018-04-10 | Sio2 Medical Products, Inc. | Trilayer coated pharmaceutical packaging with low oxygen transmission rate |
| CN105392916B (zh) | 2013-03-11 | 2019-03-08 | Sio2医药产品公司 | 涂布包装材料 |
| EP2971227B1 (en) | 2013-03-15 | 2017-11-15 | Si02 Medical Products, Inc. | Coating method. |
| WO2014148479A1 (ja) * | 2013-03-19 | 2014-09-25 | 太陽化学工業株式会社 | 防汚用の非晶質炭素膜を備える構造体及び防汚用の非晶質炭素膜の形成方法 |
| JP6043233B2 (ja) * | 2013-04-15 | 2016-12-14 | 株式会社神戸製鋼所 | 非晶質炭素系皮膜およびその製造方法 |
| EP3693493A1 (en) | 2014-03-28 | 2020-08-12 | SiO2 Medical Products, Inc. | Antistatic coatings for plastic vessels |
| US11077233B2 (en) | 2015-08-18 | 2021-08-03 | Sio2 Medical Products, Inc. | Pharmaceutical and other packaging with low oxygen transmission rate |
| US11639543B2 (en) | 2019-05-22 | 2023-05-02 | Thin Film Service, Inc. | Tetrahedral amorphous hydrogenated carbon and amorphous siloxane diamond-like nanocomposite |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5352493A (en) * | 1991-05-03 | 1994-10-04 | Veniamin Dorfman | Method for forming diamond-like nanocomposite or doped-diamond-like nanocomposite films |
-
1997
- 1997-04-11 US US09/171,614 patent/US6200675B1/en not_active Expired - Lifetime
- 1997-04-11 AU AU26977/97A patent/AU2697797A/en not_active Abandoned
- 1997-04-11 JP JP53768997A patent/JP4439594B2/ja not_active Expired - Fee Related
- 1997-04-11 WO PCT/EP1997/001878 patent/WO1997040207A1/en not_active Ceased
- 1997-04-11 EP EP97920688A patent/EP0896640B1/en not_active Expired - Lifetime
- 1997-04-11 DE DE69710324T patent/DE69710324T2/de not_active Expired - Lifetime
- 1997-04-26 TW TW086105584A patent/TW420724B/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| JP2000508713A (ja) | 2000-07-11 |
| WO1997040207A1 (en) | 1997-10-30 |
| EP0896640B1 (en) | 2002-02-06 |
| US6200675B1 (en) | 2001-03-13 |
| DE69710324T2 (de) | 2002-08-29 |
| AU2697797A (en) | 1997-11-12 |
| JP4439594B2 (ja) | 2010-03-24 |
| DE69710324D1 (de) | 2002-03-21 |
| EP0896640A1 (en) | 1999-02-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GD4A | Issue of patent certificate for granted invention patent | ||
| MM4A | Annulment or lapse of patent due to non-payment of fees |