JP4439594B2 - ダイアモンド類似ナノ複合材組成物 - Google Patents

ダイアモンド類似ナノ複合材組成物 Download PDF

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Publication number
JP4439594B2
JP4439594B2 JP53768997A JP53768997A JP4439594B2 JP 4439594 B2 JP4439594 B2 JP 4439594B2 JP 53768997 A JP53768997 A JP 53768997A JP 53768997 A JP53768997 A JP 53768997A JP 4439594 B2 JP4439594 B2 JP 4439594B2
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Prior art keywords
atomic
composition
friction
film
diamond
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Expired - Fee Related
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JP53768997A
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English (en)
Japanese (ja)
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JP2000508713A (ja
JP2000508713A5 (enExample
Inventor
ニーリンク，ドミニク
ゴエル，アービンド
Original Assignee
ナムローゼ フェンノートシャップ ベッカルト エス．エー．
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/503—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using DC or AC discharges
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2206/00—Materials with ceramics, cermets, hard carbon or similar non-metallic hard materials as main constituents
    • F16C2206/02—Carbon based material
    • F16C2206/04—Diamond like carbon [DLC]
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2240/00—Specified values or numerical ranges of parameters; Relations between them
    • F16C2240/40—Linear dimensions, e.g. length, radius, thickness, gap
    • F16C2240/60—Thickness, e.g. thickness of coatings
    • F16C2240/64—Thickness, e.g. thickness of coatings in the nanometer range
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Carbon And Carbon Compounds (AREA)
JP53768997A 1996-04-22 1997-04-11 ダイアモンド類似ナノ複合材組成物 Expired - Fee Related JP4439594B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP96201070.8 1996-04-22
EP96201070 1996-04-22
PCT/EP1997/001878 WO1997040207A1 (en) 1996-04-22 1997-04-11 Diamond-like nanocomposite compositions

Publications (3)

Publication Number Publication Date
JP2000508713A JP2000508713A (ja) 2000-07-11
JP2000508713A5 JP2000508713A5 (enExample) 2004-12-02
JP4439594B2 true JP4439594B2 (ja) 2010-03-24

Family

ID=8223897

Family Applications (1)

Application Number Title Priority Date Filing Date
JP53768997A Expired - Fee Related JP4439594B2 (ja) 1996-04-22 1997-04-11 ダイアモンド類似ナノ複合材組成物

Country Status (7)

Country Link
US (1) US6200675B1 (enExample)
EP (1) EP0896640B1 (enExample)
JP (1) JP4439594B2 (enExample)
AU (1) AU2697797A (enExample)
DE (1) DE69710324T2 (enExample)
TW (1) TW420724B (enExample)
WO (1) WO1997040207A1 (enExample)

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JP4256938B2 (ja) 1997-02-04 2009-04-22 ナムローゼ・フェンノートシャップ・ベーカート・ソシエテ・アノニム ダイヤモンド状カーボン及びダイヤモンド状ナノコンポジット組成物の層を有するコーティング物
EP0885983A1 (en) 1997-06-19 1998-12-23 N.V. Bekaert S.A. Method for coating a substrate with a diamond like nanocomposite composition
DE69913342T2 (de) * 1998-06-03 2004-10-28 Blue Medical Devices B.V. Stents mit diamantartiger beschichtung
EP1123991A3 (en) 2000-02-08 2002-11-13 Asm Japan K.K. Low dielectric constant materials and processes
US6795636B1 (en) * 2000-03-05 2004-09-21 3M Innovative Properties Company Radiation-transmissive films on glass articles
US6749813B1 (en) 2000-03-05 2004-06-15 3M Innovative Properties Company Fluid handling devices with diamond-like films
US6696157B1 (en) 2000-03-05 2004-02-24 3M Innovative Properties Company Diamond-like glass thin films
US6669996B2 (en) * 2000-07-06 2003-12-30 University Of Louisville Method of synthesizing metal doped diamond-like carbon films
JP2004504888A (ja) 2000-07-28 2004-02-19 ブルー・メディカル・デバイシーズ・ベスローテン・フェンノートシャップ 拡張性皮膜を有する血管内ステント
US6905981B1 (en) 2000-11-24 2005-06-14 Asm Japan K.K. Low-k dielectric materials and processes
US7106939B2 (en) 2001-09-19 2006-09-12 3M Innovative Properties Company Optical and optoelectronic articles
US6895855B2 (en) 2001-10-01 2005-05-24 The Timken Company Hydraulic motors and pumps with engineered surfaces
WO2004090361A2 (en) * 2003-04-03 2004-10-21 The Timken Company Corrosion tolerant rolling element bearing
CN101760286B (zh) * 2003-08-06 2013-03-20 日产自动车株式会社 低摩擦滑动机构、低摩擦剂组合物以及减小摩擦的方法
AU2003298338A1 (en) * 2003-12-02 2005-06-24 N.V. Bekaert S.A. A layered structure
US7824498B2 (en) * 2004-02-24 2010-11-02 Applied Materials, Inc. Coating for reducing contamination of substrates during processing
JP2005314454A (ja) * 2004-04-27 2005-11-10 Toyota Central Res & Dev Lab Inc 低摩擦摺動部材
US7296965B2 (en) 2004-08-23 2007-11-20 United Technologies Corporation Cryogenic bearings
JP2006138404A (ja) * 2004-11-12 2006-06-01 Kobe Steel Ltd 水系環境下での耐摩耗性に優れた摺動部材
EP1726682A1 (en) * 2005-05-26 2006-11-29 NV Bekaert SA Coating comprising layered structures of diamond like nanocomposite layers and diamond like carbon layers.
WO2006134066A1 (en) * 2005-06-13 2006-12-21 Nv Bekaert Sa Coated spinning ring
US20070020451A1 (en) * 2005-07-20 2007-01-25 3M Innovative Properties Company Moisture barrier coatings
WO2007136777A2 (en) * 2006-05-17 2007-11-29 G & H Technologies Llc Wear resistant coating
US20080006819A1 (en) * 2006-06-19 2008-01-10 3M Innovative Properties Company Moisture barrier coatings for organic light emitting diode devices
JP5293186B2 (ja) * 2006-11-10 2013-09-18 住友電気工業株式会社 Ｓｉ−Ｏ含有水素化炭素膜とそれを含む光学デバイスおよびそれらの製造方法
EP2193007B1 (en) * 2007-08-23 2015-01-07 Saint-Gobain Abrasifs Abrasive tool for cmp pad conditioning.
EP2251455B1 (en) 2009-05-13 2017-09-06 SiO2 Medical Products, Inc. PECVD coating using an organosilicon precursor
JP5090389B2 (ja) * 2009-02-26 2012-12-05 オーエスジー株式会社 Ｄｌｃコーティングルアー
JP5502987B2 (ja) * 2009-03-24 2014-05-28 サンーゴバン アブレイシブズ，インコーポレイティド 化学機械平坦化パッドコンディショナとして使用するための研磨工具
CN102459693B (zh) * 2009-05-13 2015-11-25 Sio2医药产品公司 使用有机硅前体的pecvd涂层
US7985188B2 (en) 2009-05-13 2011-07-26 Cv Holdings Llc Vessel, coating, inspection and processing apparatus
SG176008A1 (en) * 2009-05-13 2011-12-29 Cv Holdings Llc Pecvd coating using an organosilicon precursor
MY155563A (en) * 2009-06-02 2015-10-30 Saint Gobain Abrasives Inc Corrosion-resistant cmp conditioning tools and methods for making and using same
US9458536B2 (en) 2009-07-02 2016-10-04 Sio2 Medical Products, Inc. PECVD coating methods for capped syringes, cartridges and other articles
US8951099B2 (en) 2009-09-01 2015-02-10 Saint-Gobain Abrasives, Inc. Chemical mechanical polishing conditioner
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Also Published As

Publication number Publication date
TW420724B (en) 2001-02-01
AU2697797A (en) 1997-11-12
EP0896640B1 (en) 2002-02-06
DE69710324D1 (de) 2002-03-21
WO1997040207A1 (en) 1997-10-30
DE69710324T2 (de) 2002-08-29
JP2000508713A (ja) 2000-07-11
EP0896640A1 (en) 1999-02-17
US6200675B1 (en) 2001-03-13

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