DE69636426D1 - Verfahren zur Reinigung von halbleitenden Wafern - Google Patents

Verfahren zur Reinigung von halbleitenden Wafern

Info

Publication number
DE69636426D1
DE69636426D1 DE69636426T DE69636426T DE69636426D1 DE 69636426 D1 DE69636426 D1 DE 69636426D1 DE 69636426 T DE69636426 T DE 69636426T DE 69636426 T DE69636426 T DE 69636426T DE 69636426 D1 DE69636426 D1 DE 69636426D1
Authority
DE
Germany
Prior art keywords
cleaning
semiconducting wafers
semiconducting
wafers
cleaning semiconducting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69636426T
Other languages
English (en)
Other versions
DE69636426T2 (de
Inventor
Shigeyoshi Netsu
Shouichi Miura
Yasuyuki Harada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pre Tech Co Ltd
Original Assignee
Pre Tech Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pre Tech Co Ltd filed Critical Pre Tech Co Ltd
Publication of DE69636426D1 publication Critical patent/DE69636426D1/de
Application granted granted Critical
Publication of DE69636426T2 publication Critical patent/DE69636426T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02041—Cleaning
    • H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
    • H01L21/02052—Wet cleaning only
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/46—Treatment of water, waste water, or sewage by electrochemical methods
    • C02F1/461—Treatment of water, waste water, or sewage by electrochemical methods by electrolysis
    • C02F1/46104—Devices therefor; Their operating or servicing
    • C02F1/4618—Devices therefor; Their operating or servicing for producing "ionised" acidic or basic water
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H01L21/67057—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/34—Treatment of water, waste water, or sewage with mechanical oscillations
    • C02F1/36—Treatment of water, waste water, or sewage with mechanical oscillations ultrasonic vibrations
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/46—Treatment of water, waste water, or sewage by electrochemical methods
    • C02F1/461—Treatment of water, waste water, or sewage by electrochemical methods by electrolysis
    • C02F1/46104—Devices therefor; Their operating or servicing
    • C02F1/4618—Devices therefor; Their operating or servicing for producing "ionised" acidic or basic water
    • C02F2001/46185—Devices therefor; Their operating or servicing for producing "ionised" acidic or basic water only anodic or acidic water, e.g. for oxidizing or sterilizing
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2201/00—Apparatus for treatment of water, waste water or sewage
    • C02F2201/46—Apparatus for electrochemical processes
    • C02F2201/461—Electrolysis apparatus
    • C02F2201/46105—Details relating to the electrolytic devices
    • C02F2201/4611—Fluid flow
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2201/00—Apparatus for treatment of water, waste water or sewage
    • C02F2201/46—Apparatus for electrochemical processes
    • C02F2201/461—Electrolysis apparatus
    • C02F2201/46105—Details relating to the electrolytic devices
    • C02F2201/46115—Electrolytic cell with membranes or diaphragms
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2201/00—Apparatus for treatment of water, waste water or sewage
    • C02F2201/46—Apparatus for electrochemical processes
    • C02F2201/461—Electrolysis apparatus
    • C02F2201/46105—Details relating to the electrolytic devices
    • C02F2201/46195—Cells containing solid electrolyte
DE69636426T 1995-05-31 1996-05-28 Verfahren zur Reinigung von halbleitenden Wafern Expired - Lifetime DE69636426T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP13357095 1995-05-31
JP13357095 1995-05-31
JP29525695 1995-11-14
JP7295256A JP2832173B2 (ja) 1995-05-31 1995-11-14 半導体基板の洗浄装置および洗浄方法

Publications (2)

Publication Number Publication Date
DE69636426D1 true DE69636426D1 (de) 2006-09-21
DE69636426T2 DE69636426T2 (de) 2007-05-03

Family

ID=26467894

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69636426T Expired - Lifetime DE69636426T2 (de) 1995-05-31 1996-05-28 Verfahren zur Reinigung von halbleitenden Wafern

Country Status (7)

Country Link
US (1) US5733434A (de)
EP (1) EP0750334B1 (de)
JP (1) JP2832173B2 (de)
KR (1) KR100441803B1 (de)
DE (1) DE69636426T2 (de)
MY (1) MY120500A (de)
TW (1) TW305053B (de)

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CN1107970C (zh) * 1997-12-10 2003-05-07 Cfmt公司 电子元件制造用的湿法处理方法
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JP4752117B2 (ja) * 2001-02-08 2011-08-17 日本テキサス・インスツルメンツ株式会社 半導体ウェハ上の粒子を除去する方法
TW552836B (en) * 2001-07-13 2003-09-11 Jipukomu Kabushiki Kaisha Method for treating surface of copper articles
TW592859B (en) * 2001-09-11 2004-06-21 Ebara Corp Electrolytic processing apparatus and method
TWI224531B (en) 2001-09-11 2004-12-01 Ebara Corp Substrate processing apparatus and method
JP4310085B2 (ja) * 2002-07-31 2009-08-05 株式会社荏原製作所 電解加工方法及び装置
JP2004002910A (ja) * 2002-05-30 2004-01-08 Ebara Corp 電解加工方法及び装置
US7108784B1 (en) * 2001-09-26 2006-09-19 Wrt International Llc Apparatus for removal and destruction of ammonia from an aqueous medium
US7476311B2 (en) * 2001-09-26 2009-01-13 Wrt International Llc Arsenic removal from aqueous media using chemically treated zeolite materials
US9908788B1 (en) 2001-09-26 2018-03-06 Wrt International Llc Radium removal from aqueous media using zeolite materials
US6846380B2 (en) 2002-06-13 2005-01-25 The Boc Group, Inc. Substrate processing apparatus and related systems and methods
US7105087B2 (en) * 2002-09-17 2006-09-12 Wrt International Llc Hexa-valent chromium removal from aqueous media using ferrous-form zeolite materials
US7390414B2 (en) * 2002-09-25 2008-06-24 Wrt International Llc Regeneration of chemically treated zeolite
US7326347B2 (en) * 2003-10-29 2008-02-05 Wrt International Llc Dynamic up-flow zeolite system and method
US6998054B2 (en) * 2003-12-31 2006-02-14 The Boc Group, Inc. Selective fluoride and ammonia removal by chromatographic separation of wastewater
US7527723B2 (en) 2004-01-16 2009-05-05 Ebara Corporation Electrolytic processing apparatus and electrolytic processing method
US20070215552A1 (en) * 2005-09-16 2007-09-20 Wrt International Llc. Systems and methods for removal of contaminates from an aqueous media in the absence of modified nitrate levels
US7520987B1 (en) 2005-11-15 2009-04-21 Wrt International Llc System and apparatus for purging absorptive materials used in the removal of contaminates from an aqueous medium
US8156608B2 (en) * 2006-02-10 2012-04-17 Tennant Company Cleaning apparatus having a functional generator for producing electrochemically activated cleaning liquid
US8007654B2 (en) * 2006-02-10 2011-08-30 Tennant Company Electrochemically activated anolyte and catholyte liquid
US8016996B2 (en) * 2006-02-10 2011-09-13 Tennant Company Method of producing a sparged cleaning liquid onboard a mobile surface cleaner
US8012340B2 (en) * 2006-02-10 2011-09-06 Tennant Company Method for generating electrochemically activated cleaning liquid
US8025786B2 (en) * 2006-02-10 2011-09-27 Tennant Company Method of generating sparged, electrochemically activated liquid
US8046867B2 (en) 2006-02-10 2011-11-01 Tennant Company Mobile surface cleaner having a sparging device
US7891046B2 (en) * 2006-02-10 2011-02-22 Tennant Company Apparatus for generating sparged, electrochemically activated liquid
US8025787B2 (en) * 2006-02-10 2011-09-27 Tennant Company Method and apparatus for generating, applying and neutralizing an electrochemically activated liquid
US8663479B2 (en) * 2006-11-20 2014-03-04 Wrt International Llc Method for removing cationic contaminants from water using natural zeolite underloaded with transition metal ions to limit leakage of intrinsic arsenic therefrom
BRPI0813674A2 (pt) * 2007-06-18 2015-01-06 Tennant Co Sistema de produção, e, processo para produzir um produto de álcool.
EP2207631A2 (de) * 2007-10-04 2010-07-21 Tennant Company Verfahren und vorrichtung zur neutralisation von elektrochemisch aktivierten flüssigkeiten
US8485140B2 (en) * 2008-06-05 2013-07-16 Global Patent Investment Group, LLC Fuel combustion method and system
EP2291246A2 (de) * 2008-06-10 2011-03-09 Tennant Company Elektrolysierte flüssigkeit verwendender dampfreiniger und verfahren dafür
US20090311137A1 (en) * 2008-06-11 2009-12-17 Tennant Company Atomizer using electrolyzed liquid and method therefor
JP5670889B2 (ja) * 2008-06-19 2015-02-18 テナント カンパニー 同心電極を含む管状電解セルおよび対応する方法
MX2010014391A (es) * 2008-06-19 2011-03-29 Tennant Co Metodo para eliminar la formación de sarro mediante electrólisis con generación constante.
US20100089419A1 (en) * 2008-09-02 2010-04-15 Tennant Company Electrochemically-activated liquid for cosmetic removal
JP2009035481A (ja) * 2008-09-24 2009-02-19 Shin Etsu Handotai Co Ltd シリコン単結晶ウエーハ
CN102256629A (zh) * 2008-12-17 2011-11-23 坦南特公司 用于通过液体施加电荷以增强悬浮性能的方法和设备
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JP2830733B2 (ja) * 1994-03-25 1998-12-02 日本電気株式会社 電解水生成方法および電解水生成機構
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Also Published As

Publication number Publication date
EP0750334A3 (de) 1998-03-11
MY120500A (en) 2005-11-30
US5733434A (en) 1998-03-31
JPH0950977A (ja) 1997-02-18
TW305053B (de) 1997-05-11
KR100441803B1 (ko) 2004-10-22
EP0750334B1 (de) 2006-08-09
JP2832173B2 (ja) 1998-12-02
DE69636426T2 (de) 2007-05-03
EP0750334A2 (de) 1996-12-27

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Legal Events

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