DE69513474D1 - Verfahren zur Auswertung von Siliziumscheiben - Google Patents

Verfahren zur Auswertung von Siliziumscheiben

Info

Publication number
DE69513474D1
DE69513474D1 DE69513474T DE69513474T DE69513474D1 DE 69513474 D1 DE69513474 D1 DE 69513474D1 DE 69513474 T DE69513474 T DE 69513474T DE 69513474 T DE69513474 T DE 69513474T DE 69513474 D1 DE69513474 D1 DE 69513474D1
Authority
DE
Germany
Prior art keywords
silicon wafers
evaluating silicon
evaluating
wafers
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69513474T
Other languages
English (en)
Inventor
Ken Aihara
Yutaka Kitagawara
Takao Takenaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Handotai Co Ltd
Original Assignee
Shin Etsu Handotai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Handotai Co Ltd filed Critical Shin Etsu Handotai Co Ltd
Application granted granted Critical
Publication of DE69513474D1 publication Critical patent/DE69513474D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/04—Display or data processing devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/34—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring roughness or irregularity of surfaces
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/852—Manufacture, treatment, or detection of nanostructure with scanning probe for detection of specific nanostructure sample or nanostructure-related property
    • Y10S977/854—Semiconductor sample

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
DE69513474T 1994-09-16 1995-09-15 Verfahren zur Auswertung von Siliziumscheiben Expired - Lifetime DE69513474D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6248458A JP3055598B2 (ja) 1994-09-16 1994-09-16 シリコンウエーハの評価方法

Publications (1)

Publication Number Publication Date
DE69513474D1 true DE69513474D1 (de) 1999-12-30

Family

ID=17178442

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69513474T Expired - Lifetime DE69513474D1 (de) 1994-09-16 1995-09-15 Verfahren zur Auswertung von Siliziumscheiben

Country Status (4)

Country Link
US (1) US5533387A (de)
EP (1) EP0702204B1 (de)
JP (1) JP3055598B2 (de)
DE (1) DE69513474D1 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6023338A (en) * 1996-07-12 2000-02-08 Bareket; Noah Overlay alignment measurement of wafers
JP4368454B2 (ja) 1999-05-31 2009-11-18 協和発酵ケミカル株式会社 アルコールの製造法
US6552337B1 (en) * 1999-11-02 2003-04-22 Samsung Electronics Co., Ltd. Methods and systems for measuring microroughness of a substrate combining particle counter and atomic force microscope measurements
US6275293B1 (en) 2000-05-10 2001-08-14 Seh America, Inc. Method for measurement of OSF density
US6798526B2 (en) 2002-09-12 2004-09-28 Seh America, Inc. Methods and apparatus for predicting oxygen-induced stacking fault density in wafers
US20050275850A1 (en) * 2004-05-28 2005-12-15 Timbre Technologies, Inc. Shape roughness measurement in optical metrology
JP2009526240A (ja) 2006-02-09 2009-07-16 ケーエルエー−テンカー テクノロジィース コーポレイション ウエハの特性決定のための方法とシステム
KR101647010B1 (ko) * 2008-06-19 2016-08-10 케이엘에이-텐코어 코오포레이션 웨이퍼의 하나 이상의 특성들을 결정하기 위한 컴퓨터-구현 방법들, 컴퓨터-판독 가능 매체, 및 시스템들
JP5357509B2 (ja) 2008-10-31 2013-12-04 株式会社日立ハイテクノロジーズ 検査装置、検査方法および検査装置の校正システム
CN103630708A (zh) * 2013-11-26 2014-03-12 河北同光晶体有限公司 一种辨别碳化硅晶片硅碳面的方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5476006A (en) * 1992-07-07 1995-12-19 Matsushita Electronics Corporation Crystal evaluation apparatus and crystal evaluation method
JPH0642953A (ja) * 1992-07-24 1994-02-18 Matsushita Electric Ind Co Ltd 原子間力顕微鏡
US5308974B1 (en) * 1992-11-30 1998-01-06 Digital Instr Inc Scanning probe microscope using stored data for vertical probe positioning
JPH06248458A (ja) 1993-02-23 1994-09-06 Hitachi Ltd プラズマ処理装置およびその装置を用いた磁気ディスク製造方法

Also Published As

Publication number Publication date
US5533387A (en) 1996-07-09
JPH0888257A (ja) 1996-04-02
JP3055598B2 (ja) 2000-06-26
EP0702204A3 (de) 1996-07-31
EP0702204B1 (de) 1999-11-24
EP0702204A2 (de) 1996-03-20

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Legal Events

Date Code Title Description
8332 No legal effect for de