DE69841108D1 - Verfahren zur herstellung von siliziumkarbideinkristallen - Google Patents

Verfahren zur herstellung von siliziumkarbideinkristallen

Info

Publication number
DE69841108D1
DE69841108D1 DE69841108T DE69841108T DE69841108D1 DE 69841108 D1 DE69841108 D1 DE 69841108D1 DE 69841108 T DE69841108 T DE 69841108T DE 69841108 T DE69841108 T DE 69841108T DE 69841108 D1 DE69841108 D1 DE 69841108D1
Authority
DE
Germany
Prior art keywords
carbidein
crystals
producing silicon
silicon
producing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69841108T
Other languages
English (en)
Inventor
Nobuyuki Nagato
Kunio Komaki
Isamu Yamamoto
Naoki Oyanagi
Shigehiro Nishino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Holdings Corp
Original Assignee
Showa Denko KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Denko KK filed Critical Showa Denko KK
Application granted granted Critical
Publication of DE69841108D1 publication Critical patent/DE69841108D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/36—Carbides
DE69841108T 1997-09-12 1998-09-11 Verfahren zur herstellung von siliziumkarbideinkristallen Expired - Lifetime DE69841108D1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP24891697 1997-09-12
US8660598P 1998-05-22 1998-05-22
PCT/JP1998/004128 WO1999014405A1 (fr) 1997-09-12 1998-09-11 Procede et appareil permettant de produire un cristal unique de carbure de silicium

Publications (1)

Publication Number Publication Date
DE69841108D1 true DE69841108D1 (de) 2009-10-08

Family

ID=26538998

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69841108T Expired - Lifetime DE69841108D1 (de) 1997-09-12 1998-09-11 Verfahren zur herstellung von siliziumkarbideinkristallen

Country Status (5)

Country Link
EP (1) EP1026290B1 (de)
JP (1) JP4199921B2 (de)
AU (1) AU9003498A (de)
DE (1) DE69841108D1 (de)
WO (1) WO1999014405A1 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6045613A (en) * 1998-10-09 2000-04-04 Cree, Inc. Production of bulk single crystals of silicon carbide
KR100848810B1 (ko) 2007-08-03 2008-07-28 한국전기연구원 단결정 성장 방법 및 그 장치
JP5087489B2 (ja) * 2008-07-23 2012-12-05 株式会社ブリヂストン 炭化珪素単結晶の製造装置及び炭化珪素単結晶の製造方法
DE102009009614A1 (de) 2008-12-24 2010-07-01 Sicrystal Ag Herstellungsverfahren für einen SiC-Volumeneinkristall und SiC-Substrat mit wenigen Kohlenstoffeinschlüssen
WO2010111473A1 (en) * 2009-03-26 2010-09-30 Ii-Vi Incorporated Sic single crystal sublimation growth method and apparatus
DE102009016131B4 (de) * 2009-04-03 2012-12-20 Sicrystal Ag Herstellungsverfahren für einen SiC-Volumeneinkristall mittels einer Gasbarriere und versetzungsarmes einkristallines SiC-Substrat
JP2011178590A (ja) * 2010-02-26 2011-09-15 Showa Denko Kk 成分調整部材及びそれを備えた単結晶成長装置
JP5666150B2 (ja) * 2010-02-26 2015-02-12 昭和電工株式会社 遮蔽部材及びそれを備えた単結晶成長装置
KR101854727B1 (ko) * 2011-06-24 2018-05-04 엘지이노텍 주식회사 잉곳 제조 장치
KR101897024B1 (ko) * 2011-10-28 2018-09-12 엘지이노텍 주식회사 실리콘 카바이드의 제조방법
KR101882321B1 (ko) * 2011-12-26 2018-07-27 엘지이노텍 주식회사 잉곳 제조 장치
JP6376027B2 (ja) * 2015-04-08 2018-08-22 住友電気工業株式会社 炭化珪素単結晶の製造装置
CN109072478B (zh) * 2016-04-28 2021-12-03 学校法人关西学院 气相外延生长方法及带有外延层的基板的制备方法
JP7113658B2 (ja) 2018-05-11 2022-08-05 昭和電工株式会社 遮蔽部材及びそれを備えた単結晶成長装置
JP7242978B2 (ja) 2018-11-26 2023-03-22 株式会社レゾナック ＳｉＣ単結晶インゴットの製造方法
DE102020104226A1 (de) 2020-02-18 2021-08-19 Friedrich-Alexander-Universität Erlangen-Nürnberg Verfahren zur Herstellung eines Einkristalls in einem Wachstumstiegel
CN111705362A (zh) * 2020-06-17 2020-09-25 内蒙古中科启辰新材料科技有限公司 一种用于制备光子晶体的方法
CN112899782B (zh) * 2021-01-18 2022-03-11 河南城建学院 一种晶体制备装置
CN113122916A (zh) * 2021-04-25 2021-07-16 哈尔滨科友半导体产业装备与技术研究院有限公司 一种pvt法单晶批量制备装置及方法
CN113957534A (zh) * 2021-09-22 2022-01-21 广州爱思威科技股份有限公司 一种8英寸碳化硅单晶的制备方法
CN116497438B (zh) * 2023-06-27 2023-09-26 北京青禾晶元半导体科技有限责任公司 一种碳化硅单晶生长装置及生长方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL246971A (de) * 1959-01-02 1900-01-01
GB943832A (en) 1962-07-05 1963-12-04 Gerrit Jan Noltes Improvements in or relating to machines for emptying eggs
GB1031783A (en) 1963-04-29 1966-06-02 Gen Electric Co Ltd Improvements in or relating to methods of growing layers of silicon carbide on silicon carbide substrates
JPS518400B1 (de) 1971-05-12 1976-03-16
US4866005A (en) * 1987-10-26 1989-09-12 North Carolina State University Sublimation of silicon carbide to produce large, device quality single crystals of silicon carbide
DE4310745C2 (de) * 1993-04-01 1999-07-08 Siemens Ag Verfahren zum Herstellen von SiC-Einkristallen und Vorrichtung zur Durchführung des Verfahrens
JP3491402B2 (ja) * 1995-08-07 2004-01-26 株式会社デンソー 単結晶製造方法及びその単結晶製造装置
JP3384242B2 (ja) * 1996-03-29 2003-03-10 株式会社豊田中央研究所 炭化珪素単結晶の製造方法

Also Published As

Publication number Publication date
EP1026290A4 (de) 2004-03-24
EP1026290A1 (de) 2000-08-09
AU9003498A (en) 1999-04-05
WO1999014405A1 (fr) 1999-03-25
EP1026290B1 (de) 2009-08-26
JP4199921B2 (ja) 2008-12-24

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