DE69615321D1 - Flaches elektromagnetisches betätigungsorgan - Google Patents

Flaches elektromagnetisches betätigungsorgan

Info

Publication number
DE69615321D1
DE69615321D1 DE69615321T DE69615321T DE69615321D1 DE 69615321 D1 DE69615321 D1 DE 69615321D1 DE 69615321 T DE69615321 T DE 69615321T DE 69615321 T DE69615321 T DE 69615321T DE 69615321 D1 DE69615321 D1 DE 69615321D1
Authority
DE
Germany
Prior art keywords
electromagnetic actuator
flat electromagnetic
flat
actuator
electromagnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69615321T
Other languages
English (en)
Other versions
DE69615321T2 (de
Inventor
Norihiro Asada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Signal Co Ltd
Original Assignee
Nippon Signal Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Signal Co Ltd filed Critical Nippon Signal Co Ltd
Application granted granted Critical
Publication of DE69615321D1 publication Critical patent/DE69615321D1/de
Publication of DE69615321T2 publication Critical patent/DE69615321T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K33/00—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
    • H02K33/18—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system with coil systems moving upon intermittent or reversed energisation thereof by interaction with a fixed field system, e.g. permanent magnets

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Micromachines (AREA)
DE69615321T 1995-05-26 1996-04-26 Flaches elektromagnetisches betätigungsorgan Expired - Lifetime DE69615321T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP7128056A JP2987750B2 (ja) 1995-05-26 1995-05-26 プレーナ型電磁アクチュエータ
PCT/JP1996/001149 WO1996037943A1 (fr) 1995-05-26 1996-04-26 Actionneur electromagnetique plat

Publications (2)

Publication Number Publication Date
DE69615321D1 true DE69615321D1 (de) 2001-10-25
DE69615321T2 DE69615321T2 (de) 2002-07-04

Family

ID=14975400

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69615321T Expired - Lifetime DE69615321T2 (de) 1995-05-26 1996-04-26 Flaches elektromagnetisches betätigungsorgan

Country Status (6)

Country Link
US (1) US5912608A (de)
EP (1) EP0778657B1 (de)
JP (1) JP2987750B2 (de)
KR (1) KR100402264B1 (de)
DE (1) DE69615321T2 (de)
WO (1) WO1996037943A1 (de)

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US6014257A (en) * 1998-10-14 2000-01-11 Eastman Kodak Company Light modulator
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US6585383B2 (en) 2000-05-18 2003-07-01 Calient Networks, Inc. Micromachined apparatus for improved reflection of light
US6560384B1 (en) 2000-06-01 2003-05-06 Calient Networks, Inc. Optical switch having mirrors arranged to accommodate freedom of movement
US6728016B1 (en) 2000-06-05 2004-04-27 Calient Networks, Inc. Safe procedure for moving mirrors in an optical cross-connect switch
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US6989921B2 (en) * 2000-08-27 2006-01-24 Corning Incorporated Magnetically actuated micro-electro-mechanical apparatus and method of manufacture
US6388789B1 (en) * 2000-09-19 2002-05-14 The Charles Stark Draper Laboratory, Inc. Multi-axis magnetically actuated device
US6825967B1 (en) 2000-09-29 2004-11-30 Calient Networks, Inc. Shaped electrodes for micro-electro-mechanical-system (MEMS) devices to improve actuator performance and methods for fabricating the same
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US6984917B2 (en) * 2002-06-06 2006-01-10 Lucent Technologies Inc. Optical element having two axes of rotation for use in tightly spaced mirror arrays
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US6714337B1 (en) 2002-06-28 2004-03-30 Silicon Light Machines Method and device for modulating a light beam and having an improved gamma response
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JP2018060168A (ja) 2016-09-30 2018-04-12 セイコーエプソン株式会社 光スキャナー、光スキャナーの製造方法、画像表示装置、ヘッドマウントディスプレイ及びヘッドアップディスプレイ
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Also Published As

Publication number Publication date
EP0778657A4 (de) 1998-02-04
KR100402264B1 (ko) 2004-02-05
JPH08322227A (ja) 1996-12-03
WO1996037943A1 (fr) 1996-11-28
US5912608A (en) 1999-06-15
EP0778657B1 (de) 2001-09-19
EP0778657A1 (de) 1997-06-11
JP2987750B2 (ja) 1999-12-06
DE69615321T2 (de) 2002-07-04
KR970705220A (ko) 1997-09-06

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