DE69610288T3 - Positioniervorrichtung mit kraftantriebssystem für kompensation von schwerpunktsverschiebungen - Google Patents

Positioniervorrichtung mit kraftantriebssystem für kompensation von schwerpunktsverschiebungen Download PDF

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Publication number
DE69610288T3
DE69610288T3 DE69610288T DE69610288T DE69610288T3 DE 69610288 T3 DE69610288 T3 DE 69610288T3 DE 69610288 T DE69610288 T DE 69610288T DE 69610288 T DE69610288 T DE 69610288T DE 69610288 T3 DE69610288 T3 DE 69610288T3
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DE
Germany
Prior art keywords
positioning device
force
mask
frame
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69610288T
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German (de)
English (en)
Other versions
DE69610288T2 (de
DE69610288D1 (de
Inventor
Mathijs Johannes VAN KIMMENADE
Adrianus Van Der Pal
Jan Van Eijk
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ASML Netherlands BV
Original Assignee
ASML Netherlands BV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Application filed by ASML Netherlands BV filed Critical ASML Netherlands BV
Publication of DE69610288D1 publication Critical patent/DE69610288D1/de
Publication of DE69610288T2 publication Critical patent/DE69610288T2/de
Application granted granted Critical
Publication of DE69610288T3 publication Critical patent/DE69610288T3/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/707—Chucks, e.g. chucking or un-chucking operations or structural details
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70833—Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • G03F7/709—Vibration, e.g. vibration detection, compensation, suppression or isolation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Atmospheric Sciences (AREA)
  • Toxicology (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
DE69610288T 1995-05-30 1996-05-17 Positioniervorrichtung mit kraftantriebssystem für kompensation von schwerpunktsverschiebungen Expired - Lifetime DE69610288T3 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP95201410 1995-05-30
EP95201410 1995-05-30
PCT/IB1996/000469 WO1996038766A1 (en) 1995-05-30 1996-05-17 Positioning device with a force actuator system for compensating centre-of-gravity displacements

Publications (3)

Publication Number Publication Date
DE69610288D1 DE69610288D1 (de) 2000-10-19
DE69610288T2 DE69610288T2 (de) 2001-01-18
DE69610288T3 true DE69610288T3 (de) 2005-03-24

Family

ID=8220335

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69610288T Expired - Lifetime DE69610288T3 (de) 1995-05-30 1996-05-17 Positioniervorrichtung mit kraftantriebssystem für kompensation von schwerpunktsverschiebungen

Country Status (6)

Country Link
US (1) US5844664A (en:Method)
EP (1) EP0799439B2 (en:Method)
JP (1) JP3640971B2 (en:Method)
DE (1) DE69610288T3 (en:Method)
TW (1) TW316874B (en:Method)
WO (1) WO1996038766A1 (en:Method)

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US5528118A (en) * 1994-04-01 1996-06-18 Nikon Precision, Inc. Guideless stage with isolated reaction stage
US7365513B1 (en) * 1994-04-01 2008-04-29 Nikon Corporation Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device
JPH10209035A (ja) * 1997-01-23 1998-08-07 Nikon Corp 露光装置
DE69817750T2 (de) * 1997-07-22 2004-07-01 Asml Netherlands B.V. Stützvorrichtung mit gaslager
US6144442A (en) * 1997-10-23 2000-11-07 U.S. Philips Corp Pneumatic support device with a controlled gas supply, and lithographic device provided with such a support device
KR20010030903A (ko) * 1997-11-12 2001-04-16 오노 시게오 투영노광장치
US6054784A (en) * 1997-12-29 2000-04-25 Asm Lithography B.V. Positioning device having three coil systems mutually enclosing angles of 120° and lithographic device comprising such a positioning device
US6144118A (en) 1998-09-18 2000-11-07 General Scanning, Inc. High-speed precision positioning apparatus
TW546551B (en) * 1999-12-21 2003-08-11 Asml Netherlands Bv Balanced positioning system for use in lithographic apparatus
US6621556B2 (en) * 2000-02-28 2003-09-16 Nikon Corporation Projection exposure apparatus and manufacturing and adjusting methods thereof
TW509823B (en) 2000-04-17 2002-11-11 Asml Netherlands Bv Lithographic apparatus, device manufacturing method, and device manufactured thereby
KR100585465B1 (ko) * 2001-06-13 2006-06-02 에이에스엠엘 네델란즈 비.브이. 리소그래피 투영장치, 디바이스제조방법, 이것에 의하여제조된 디바이스 및 측정방법
EP1267213B1 (en) * 2001-06-13 2006-09-20 ASML Netherlands B.V. Lithographic projection apparatus
US6983703B2 (en) 2002-11-05 2006-01-10 Asm Technology Singapore Pte Ltd Driving means to position a load
JP2004356222A (ja) * 2003-05-27 2004-12-16 Canon Inc ステージ装置及びその制御方法、露光装置、並びにデバイス製造方法
US7551970B2 (en) * 2003-08-07 2009-06-23 Koninklijke Philips Electronics N.V. Positioning apparatus gravity compensation device and method for compensating gravitational forces
US7168553B2 (en) * 2003-11-13 2007-01-30 Applied Materials, Inc. Dynamically balanced substrate carrier handler
GB0620196D0 (en) * 2006-10-11 2006-11-22 Metryx Ltd Measuring apparatus
CN101709763B (zh) * 2009-12-10 2012-07-04 华中科技大学 一种水平二自由度隔振机构
CN102141733B (zh) * 2010-01-28 2012-11-14 上海微电子装备有限公司 减振装置及应用其的光刻装置
DE102011075393B4 (de) * 2011-05-06 2013-08-14 Carl Zeiss Smt Gmbh Anordnung zur Aktuierung eines Elementes in einer Projektionsbelichtungsanlage
CN102279532B (zh) * 2011-07-27 2013-04-17 中国科学院长春光学精密机械与物理研究所 一种光刻机投影物镜镜头的装调装置
CN102305264B (zh) * 2011-08-24 2013-12-18 华中科技大学 一种超低频精密主动减振器
CN103062283B (zh) * 2012-12-19 2014-10-29 哈尔滨工业大学 气浮球轴承角度解耦的零刚度隔振器与隔振系统
CN103047341B (zh) 2012-12-19 2014-06-11 哈尔滨工业大学 气浮球轴承角度解耦与磁悬浮平面驱动定位的隔振器
CN103047348B (zh) * 2012-12-19 2015-02-11 哈尔滨工业大学 共面气浮正交解耦与滑动关节轴承角度解耦的磁浮隔振器
CN103047346B (zh) 2012-12-19 2014-06-11 哈尔滨工业大学 滚动关节轴承角度解耦的磁浮零刚度隔振器与隔振系统
CN103047344B (zh) * 2012-12-19 2015-07-08 哈尔滨工业大学 双层气浮正交解耦与滚动关节轴承角度解耦的磁浮隔振器
CN103062303B (zh) * 2012-12-19 2015-07-29 哈尔滨工业大学 气浮球轴承角度解耦的磁浮零刚度隔振器与隔振系统
CN103047350B (zh) * 2012-12-19 2015-03-25 哈尔滨工业大学 双层气浮正交解耦与柔性膜角度解耦的磁浮零刚度隔振器
CN103047353B (zh) * 2012-12-19 2015-02-11 哈尔滨工业大学 滚动关节轴承角度解耦的电涡流阻尼零刚度隔振器
CN103062309B (zh) * 2012-12-19 2015-07-29 哈尔滨工业大学 共面气浮正交解耦与滚动关节轴承角度解耦的电涡流阻尼隔振器
CN103062294B (zh) * 2012-12-19 2015-04-22 哈尔滨工业大学 双层气浮正交解耦与二维柔性铰链角度解耦的磁浮隔振器
CN103062287B (zh) * 2012-12-19 2015-02-11 哈尔滨工业大学 共面气浮正交解耦与二维柔性铰链角度解耦的电磁阻尼隔振器
CN103047340B (zh) * 2012-12-19 2015-03-25 哈尔滨工业大学 滑动关节轴承角度解耦与磁悬浮平面驱动定位的隔振器
CN103062304B (zh) * 2012-12-19 2015-04-22 哈尔滨工业大学 柔性膜角度解耦的磁浮零刚度隔振器与隔振系统
CN103047339B (zh) * 2012-12-19 2015-02-11 哈尔滨工业大学 共面气浮正交解耦与滑动关节轴承角度解耦的电磁阻尼隔振器
CN103062308B (zh) * 2012-12-19 2015-07-29 哈尔滨工业大学 双层气浮正交解耦与滚动关节轴承角度解耦的电涡流阻尼隔振器
CN103047343B (zh) * 2012-12-19 2015-06-17 哈尔滨工业大学 滑动关节轴承角度解耦的电磁阻尼零刚度隔振器
CN103047356B (zh) * 2012-12-19 2015-02-11 哈尔滨工业大学 柔性膜角度解耦的电磁阻尼零刚度隔振器
CN103062313B (zh) * 2012-12-19 2015-03-25 哈尔滨工业大学 气浮球轴承角度解耦的电涡流阻尼零刚度隔振器
CN103062301B (zh) * 2012-12-19 2014-04-02 哈尔滨工业大学 双层气浮正交解耦与气浮球轴承角度解耦的磁浮隔振器
CN103062315B (zh) * 2012-12-19 2015-03-25 哈尔滨工业大学 共面气浮正交解耦与柔性膜角度解耦的电涡流阻尼隔振器
US9898000B2 (en) * 2013-01-30 2018-02-20 Akribis Systems Pte Ltd Planar positioning system and method of using the same
CN103775550B (zh) 2014-02-14 2015-09-23 华中科技大学 单自由度磁力隔振装置
CN105094165B (zh) * 2015-08-24 2017-06-16 华中科技大学 一种基于Stewart主动平台的振动抑制方法
WO2018119730A1 (zh) * 2016-12-28 2018-07-05 中国科学院长春光学精密机械与物理研究所 光学集成检测平台

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JP3196798B2 (ja) † 1993-10-12 2001-08-06 キヤノン株式会社 自重支持装置

Also Published As

Publication number Publication date
WO1996038766A1 (en) 1996-12-05
DE69610288T2 (de) 2001-01-18
EP0799439B1 (en) 2000-09-13
JP3640971B2 (ja) 2005-04-20
TW316874B (en:Method) 1997-10-01
JPH10503889A (ja) 1998-04-07
EP0799439B2 (en) 2003-11-12
US5844664A (en) 1998-12-01
EP0799439A1 (en) 1997-10-08
DE69610288D1 (de) 2000-10-19

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8363 Opposition against the patent
8366 Restricted maintained after opposition proceedings