DE69609358T2 - Ionenquelle zur erzeugung von ionen aus gas oder dampf - Google Patents

Ionenquelle zur erzeugung von ionen aus gas oder dampf

Info

Publication number
DE69609358T2
DE69609358T2 DE69609358T DE69609358T DE69609358T2 DE 69609358 T2 DE69609358 T2 DE 69609358T2 DE 69609358 T DE69609358 T DE 69609358T DE 69609358 T DE69609358 T DE 69609358T DE 69609358 T2 DE69609358 T2 DE 69609358T2
Authority
DE
Germany
Prior art keywords
mirrors
vapor
gas
housing
space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69609358T
Other languages
English (en)
Other versions
DE69609358D1 (de
Inventor
Arpad Barna
Dezso Szigethy
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of DE69609358D1 publication Critical patent/DE69609358D1/de
Application granted granted Critical
Publication of DE69609358T2 publication Critical patent/DE69609358T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/04—Ion sources; Ion guns using reflex discharge, e.g. Penning ion sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/08—Ion sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/31—Processing objects on a macro-scale
    • H01J2237/3114—Machining

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Physical Vapour Deposition (AREA)
  • Electron Tubes For Measurement (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DE69609358T 1996-09-27 1996-09-27 Ionenquelle zur erzeugung von ionen aus gas oder dampf Expired - Lifetime DE69609358T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/HU1996/000054 WO1998013851A1 (en) 1996-09-27 1996-09-27 Ion source for generating ions of a gas or vapour

Publications (2)

Publication Number Publication Date
DE69609358D1 DE69609358D1 (de) 2000-08-17
DE69609358T2 true DE69609358T2 (de) 2000-12-14

Family

ID=10987700

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69609358T Expired - Lifetime DE69609358T2 (de) 1996-09-27 1996-09-27 Ionenquelle zur erzeugung von ionen aus gas oder dampf

Country Status (7)

Country Link
US (1) US6236054B1 (de)
EP (1) EP0928495B1 (de)
JP (1) JP4016402B2 (de)
AT (1) ATE194724T1 (de)
AU (1) AU7092396A (de)
DE (1) DE69609358T2 (de)
WO (1) WO1998013851A1 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070107841A1 (en) * 2000-12-13 2007-05-17 Semequip, Inc. Ion implantation ion source, system and method
JP4820038B2 (ja) * 1999-12-13 2011-11-24 セメクイップ， インコーポレイテッド イオン注入イオン源、システム、および方法
US7838850B2 (en) 1999-12-13 2010-11-23 Semequip, Inc. External cathode ion source
US6525326B1 (en) * 2000-09-01 2003-02-25 Axcelis Technologies, Inc. System and method for removing particles entrained in an ion beam
JP5186347B2 (ja) * 2008-12-04 2013-04-17 ギガフォトン株式会社 差動排気システム
WO2010111552A1 (en) * 2009-03-27 2010-09-30 Dh Technologies Development Pte. Ltd. Heated time of flight source
US9214313B2 (en) 2010-04-09 2015-12-15 E.A. Fischione Instruments, Inc. Ion source with independent power supplies
US9633813B2 (en) * 2012-12-27 2017-04-25 Schlumberger Technology Corporation Ion source using heated cathode and electromagnetic confinement
US9362078B2 (en) 2012-12-27 2016-06-07 Schlumberger Technology Corporation Ion source using field emitter array cathode and electromagnetic confinement
US20140183349A1 (en) * 2012-12-27 2014-07-03 Schlumberger Technology Corporation Ion source using spindt cathode and electromagnetic confinement
EP2787523B1 (de) 2013-04-03 2016-02-10 Fei Company Niedrigenergieionendünnung oder -abscheidung
CN110676148B (zh) * 2019-10-12 2020-07-28 中国科学院地质与地球物理研究所 可控束斑离子发射装置及抛光蚀刻方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4423355A (en) 1980-03-26 1983-12-27 Tokyo Shibaura Denki Kabushiki Kaisha Ion generating apparatus
FR2514946A1 (fr) * 1981-10-21 1983-04-22 Commissariat Energie Atomique Source d'ions comprenant une chambre d'ionisation a gaz avec oscillations d'electrons
HU190855B (en) 1983-10-12 1986-11-28 Mta Mueszaki Fizikai Kutato Intezete,Hu Device for working solid samples by ion beam and ion source to the device

Also Published As

Publication number Publication date
ATE194724T1 (de) 2000-07-15
JP4016402B2 (ja) 2007-12-05
DE69609358D1 (de) 2000-08-17
US6236054B1 (en) 2001-05-22
EP0928495A1 (de) 1999-07-14
JP2001501024A (ja) 2001-01-23
AU7092396A (en) 1998-04-17
EP0928495B1 (de) 2000-07-12
WO1998013851A1 (en) 1998-04-02

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