ATE194724T1 - Ionenquelle zur erzeugung von ionen aus gas oder dampf - Google Patents

Ionenquelle zur erzeugung von ionen aus gas oder dampf

Info

Publication number
ATE194724T1
ATE194724T1 AT96931925T AT96931925T ATE194724T1 AT E194724 T1 ATE194724 T1 AT E194724T1 AT 96931925 T AT96931925 T AT 96931925T AT 96931925 T AT96931925 T AT 96931925T AT E194724 T1 ATE194724 T1 AT E194724T1
Authority
AT
Austria
Prior art keywords
mirrors
gas
housing
space
anode
Prior art date
Application number
AT96931925T
Other languages
English (en)
Inventor
Arpad Barna
Dezso Szigethy
Original Assignee
Arpad Barna
Dezso Szigethy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Arpad Barna, Dezso Szigethy filed Critical Arpad Barna
Application granted granted Critical
Publication of ATE194724T1 publication Critical patent/ATE194724T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/04—Ion sources; Ion guns using reflex discharge, e.g. Penning ion sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/08—Ion sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/31—Processing objects on a macro-scale
    • H01J2237/3114—Machining

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Physical Vapour Deposition (AREA)
  • Electron Tubes For Measurement (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
AT96931925T 1996-09-27 1996-09-27 Ionenquelle zur erzeugung von ionen aus gas oder dampf ATE194724T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/HU1996/000054 WO1998013851A1 (en) 1996-09-27 1996-09-27 Ion source for generating ions of a gas or vapour

Publications (1)

Publication Number Publication Date
ATE194724T1 true ATE194724T1 (de) 2000-07-15

Family

ID=10987700

Family Applications (1)

Application Number Title Priority Date Filing Date
AT96931925T ATE194724T1 (de) 1996-09-27 1996-09-27 Ionenquelle zur erzeugung von ionen aus gas oder dampf

Country Status (7)

Country Link
US (1) US6236054B1 (de)
EP (1) EP0928495B1 (de)
JP (1) JP4016402B2 (de)
AT (1) ATE194724T1 (de)
AU (1) AU7092396A (de)
DE (1) DE69609358T2 (de)
WO (1) WO1998013851A1 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070107841A1 (en) * 2000-12-13 2007-05-17 Semequip, Inc. Ion implantation ion source, system and method
WO2001043157A1 (en) * 1999-12-13 2001-06-14 Semequip, Inc. Ion implantation ion source, system and method
US7838850B2 (en) 1999-12-13 2010-11-23 Semequip, Inc. External cathode ion source
US6525326B1 (en) * 2000-09-01 2003-02-25 Axcelis Technologies, Inc. System and method for removing particles entrained in an ion beam
JP5186347B2 (ja) * 2008-12-04 2013-04-17 ギガフォトン株式会社 差動排気システム
EP2411798A4 (de) * 2009-03-27 2017-06-07 DH Technologies Development Pte. Ltd. Erwärmte tof-quelle
EP2561540A4 (de) 2010-04-09 2014-06-11 E A Fischione Instr Inc Verbesserte ionenquelle
US9362078B2 (en) 2012-12-27 2016-06-07 Schlumberger Technology Corporation Ion source using field emitter array cathode and electromagnetic confinement
US20140183349A1 (en) * 2012-12-27 2014-07-03 Schlumberger Technology Corporation Ion source using spindt cathode and electromagnetic confinement
US9633813B2 (en) * 2012-12-27 2017-04-25 Schlumberger Technology Corporation Ion source using heated cathode and electromagnetic confinement
EP2787523B1 (de) 2013-04-03 2016-02-10 Fei Company Niedrigenergieionendünnung oder -abscheidung
CN110676148B (zh) * 2019-10-12 2020-07-28 中国科学院地质与地球物理研究所 可控束斑离子发射装置及抛光蚀刻方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4423355A (en) 1980-03-26 1983-12-27 Tokyo Shibaura Denki Kabushiki Kaisha Ion generating apparatus
FR2514946A1 (fr) * 1981-10-21 1983-04-22 Commissariat Energie Atomique Source d'ions comprenant une chambre d'ionisation a gaz avec oscillations d'electrons
HU190855B (en) 1983-10-12 1986-11-28 Mta Mueszaki Fizikai Kutato Intezete,Hu Device for working solid samples by ion beam and ion source to the device

Also Published As

Publication number Publication date
EP0928495A1 (de) 1999-07-14
JP2001501024A (ja) 2001-01-23
WO1998013851A1 (en) 1998-04-02
DE69609358D1 (de) 2000-08-17
DE69609358T2 (de) 2000-12-14
AU7092396A (en) 1998-04-17
JP4016402B2 (ja) 2007-12-05
US6236054B1 (en) 2001-05-22
EP0928495B1 (de) 2000-07-12

Similar Documents

Publication Publication Date Title
ATE194724T1 (de) Ionenquelle zur erzeugung von ionen aus gas oder dampf
TW428204B (en) Acceleration and analysis architecture for ion implanter
DE69941927D1 (de) Vorrichtung zur entfernung unerwünschteter ionen aus einem ionenleiter und aus einem massenspektrometer
CA2317663A1 (en) Method of ion fragmentation in a quadrupole ion trap
WO2001026133A3 (en) High transmission, low energy beamline apparatus for ion implanter
DK0858096T3 (da) Ionisator til brug i et cykloidalt massespekrometer
KR900013563A (ko) 전자비임 여기(勵起) 이온 원(源)
JPH05121194A (ja) 高速原子線源
KR910014998A (ko) 이온 발생장치
GB1190451A (en) Ion Source for a Mass Spectrometer
US4468564A (en) Ion source
IT1252811B (it) Generatore di ioni con camera di ionizzazione costruita o rivestita con materiale ad alto coefficiente di emissione secondaria
GB1222577A (en) Improvements in and relating to ion cyclotron resonance mass spectrometers
GB1287291A (en) Improvements in or relating to ion sources
JPH06124680A (ja) ２次中性粒子質量分析装置
Ehlers et al. Increasing the efficiency of a multicusp ion source
WO1994027312B1 (en) Gas discharge lamp
US4965491A (en) Plasma generator
EP0233083A3 (de) Ionenstrahlvorrichtung
JPS60243957A (ja) マイクロ波イオン源
GB928168A (en) Improvements in or relating to mass filters including an electron impact source of ions
JP2503606Y2 (ja) 静電型タンデム加速器
SE7901877L (sv) Forfarande for separering av olika isotoper i foreningar medelst laserstralning
KR920001657A (ko) 이온 주입장치
JPS617542A (ja) マイクロ波イオン源

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties