EP0233083A3 - Ionenstrahlvorrichtung - Google Patents

Ionenstrahlvorrichtung

Info

Publication number
EP0233083A3
EP0233083A3 EP87301202A EP87301202A EP0233083A3 EP 0233083 A3 EP0233083 A3 EP 0233083A3 EP 87301202 A EP87301202 A EP 87301202A EP 87301202 A EP87301202 A EP 87301202A EP 0233083 A3 EP0233083 A3 EP 0233083A3
Authority
EP
European Patent Office
Prior art keywords
ion
ions
bunches
ion beam
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP87301202A
Other languages
English (en)
French (fr)
Other versions
EP0233083A2 (de
Inventor
Neil John Barret
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BAE Systems Electronics Ltd
Original Assignee
Marconi Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Marconi Co Ltd filed Critical Marconi Co Ltd
Publication of EP0233083A2 publication Critical patent/EP0233083A2/de
Publication of EP0233083A3 publication Critical patent/EP0233083A3/de
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H9/00—Linear accelerators

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Particle Accelerators (AREA)
  • Electron Sources, Ion Sources (AREA)
EP87301202A 1986-02-13 1987-02-12 Ionenstrahlvorrichtung Withdrawn EP0233083A3 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB08603585A GB2186736A (en) 1986-02-13 1986-02-13 Ion beam arrangement
GB8603585 1986-02-13

Publications (2)

Publication Number Publication Date
EP0233083A2 EP0233083A2 (de) 1987-08-19
EP0233083A3 true EP0233083A3 (de) 1988-06-22

Family

ID=10593013

Family Applications (1)

Application Number Title Priority Date Filing Date
EP87301202A Withdrawn EP0233083A3 (de) 1986-02-13 1987-02-12 Ionenstrahlvorrichtung

Country Status (3)

Country Link
EP (1) EP0233083A3 (de)
JP (1) JPS62295400A (de)
GB (1) GB2186736A (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2209242A (en) * 1987-08-28 1989-05-04 Gen Electric Co Plc Ion beam arrangement
ATE537550T1 (de) * 2005-07-08 2011-12-15 Nexgen Semi Holding Inc Vorrichtung und verfahren zur kontrollierten fertigung von halbleitern mittels teilchenstrahlen
JP2008286742A (ja) * 2007-05-21 2008-11-27 Kyoto Univ イオンビーム制御装置および該方法
JP2014102990A (ja) * 2012-11-20 2014-06-05 Sumitomo Heavy Ind Ltd サイクロトロン
JP6121186B2 (ja) * 2013-02-13 2017-04-26 住友重機械工業株式会社 バンチャー及び加速器

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2813996A (en) * 1954-12-16 1957-11-19 Univ Leland Stanford Junior Bunching means for particle accelerators
US2860279A (en) * 1955-04-18 1958-11-11 Ross E Hester High current linear ion accelerator
FR1231910A (fr) * 1958-06-25 1960-10-04 Varian Associates Perfectionnements aux accélérateurs linéaires
GB1046531A (en) * 1963-01-18 1966-10-26 Hitachi Ltd Charged particle phase bunching apparatus

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE472625A (de) * 1941-12-11
US2940001A (en) * 1955-02-08 1960-06-07 Applied Radiation Corp Electron accelerator
US3133227A (en) * 1958-06-25 1964-05-12 Varian Associates Linear particle accelerator apparatus for high energy particle beams provided with pulsing means for the control electrode
US3333142A (en) * 1962-03-22 1967-07-25 Hitachi Ltd Charged particles accelerator
GB1506949A (en) * 1975-12-13 1978-04-12 English Electric Valve Co Ltd Velocity modulation tubes
FR2374815A1 (fr) * 1976-12-14 1978-07-13 Cgr Mev Perfectionnement aux accelerateurs lineaires de particules chargees

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2813996A (en) * 1954-12-16 1957-11-19 Univ Leland Stanford Junior Bunching means for particle accelerators
US2860279A (en) * 1955-04-18 1958-11-11 Ross E Hester High current linear ion accelerator
FR1231910A (fr) * 1958-06-25 1960-10-04 Varian Associates Perfectionnements aux accélérateurs linéaires
GB1046531A (en) * 1963-01-18 1966-10-26 Hitachi Ltd Charged particle phase bunching apparatus

Also Published As

Publication number Publication date
GB8603585D0 (en) 1986-03-19
JPS62295400A (ja) 1987-12-22
EP0233083A2 (de) 1987-08-19
GB2186736A (en) 1987-08-19

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Effective date: 19890404

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Inventor name: BARRET NEIL JOHN