JPS6438959A - Ion beam neutralization device - Google Patents
Ion beam neutralization deviceInfo
- Publication number
- JPS6438959A JPS6438959A JP62195682A JP19568287A JPS6438959A JP S6438959 A JPS6438959 A JP S6438959A JP 62195682 A JP62195682 A JP 62195682A JP 19568287 A JP19568287 A JP 19568287A JP S6438959 A JPS6438959 A JP S6438959A
- Authority
- JP
- Japan
- Prior art keywords
- split body
- ion beam
- split
- voltage applied
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 title abstract 5
- 238000006386 neutralization reaction Methods 0.000 title 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Abstract
PURPOSE:To make it possible to neutralize ion beams uniformly even if they are asymmetrical and ununiform in shape by dividing electron extracting electrode and electronic energy control electrode into split bodies so as to enable application voltage to each split body to be controlled individually. CONSTITUTION:Electron extracting electrodes 17A-17G and electronic energy control electrodes 18A-18G consist of electrode split bodies which were divided into plural in the circumferential direction surrounding the orbit of an ion beam 10 and they enable voltage applied to each split body to be controlled individually. If voltage applied to a specific split body among each split body of the electron extracting electrodes 17A-17G is set higher than the voltage applied to other split bodies, the density of electron flow extracted and accelerated by the specific split body becomes high. Also, in regard to electronic energy control electrode 18A-18G, a current flow which passes through the specific split body similarly goes to the ion beam 10 holding high energy. Thus, the ion beam can be neutralized uniformly even if the sectional shape is ununiform or asymmetrical.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62195682A JPS6438959A (en) | 1987-08-04 | 1987-08-04 | Ion beam neutralization device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62195682A JPS6438959A (en) | 1987-08-04 | 1987-08-04 | Ion beam neutralization device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6438959A true JPS6438959A (en) | 1989-02-09 |
Family
ID=16345247
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62195682A Pending JPS6438959A (en) | 1987-08-04 | 1987-08-04 | Ion beam neutralization device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6438959A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0444935A2 (en) * | 1990-03-01 | 1991-09-04 | Eaton Corporation | Ion beam control system |
US5460432A (en) * | 1993-03-29 | 1995-10-24 | Kabushiki Kaisha Komotsu Seisakusho | Cutter head for a tunnel excavator |
KR100354992B1 (en) * | 1996-08-02 | 2002-12-26 | 액셀리스 테크놀로지스, 인크. | Method and apparatus for ion beam neutralization |
-
1987
- 1987-08-04 JP JP62195682A patent/JPS6438959A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0444935A2 (en) * | 1990-03-01 | 1991-09-04 | Eaton Corporation | Ion beam control system |
US5460432A (en) * | 1993-03-29 | 1995-10-24 | Kabushiki Kaisha Komotsu Seisakusho | Cutter head for a tunnel excavator |
KR100354992B1 (en) * | 1996-08-02 | 2002-12-26 | 액셀리스 테크놀로지스, 인크. | Method and apparatus for ion beam neutralization |
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