DE69525193D1 - Verfahren zur Herstellung eines Quarzglastiegels und Vorrichtung zur Durchführung dieses Verfahrens - Google Patents
Verfahren zur Herstellung eines Quarzglastiegels und Vorrichtung zur Durchführung dieses VerfahrensInfo
- Publication number
- DE69525193D1 DE69525193D1 DE69525193T DE69525193T DE69525193D1 DE 69525193 D1 DE69525193 D1 DE 69525193D1 DE 69525193 T DE69525193 T DE 69525193T DE 69525193 T DE69525193 T DE 69525193T DE 69525193 D1 DE69525193 D1 DE 69525193D1
- Authority
- DE
- Germany
- Prior art keywords
- producing
- carrying
- quartz glass
- glass crucible
- crucible
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
- C30B35/002—Crucibles or containers
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/09—Other methods of shaping glass by fusing powdered glass in a shaping mould
- C03B19/095—Other methods of shaping glass by fusing powdered glass in a shaping mould by centrifuging, e.g. arc discharge in rotating mould
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/10—Crucibles or containers for supporting the melt
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/02—Pure silica glass, e.g. pure fused quartz
- C03B2201/03—Impurity concentration specified
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S65/00—Glass manufacturing
- Y10S65/08—Quartz
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Metallurgy (AREA)
- Manufacturing & Machinery (AREA)
- Glass Melting And Manufacturing (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6187905A JP2830987B2 (ja) | 1994-07-19 | 1994-07-19 | 石英ガラスルツボ及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69525193D1 true DE69525193D1 (de) | 2002-03-14 |
DE69525193T2 DE69525193T2 (de) | 2002-08-29 |
Family
ID=16214260
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69525193T Expired - Fee Related DE69525193T2 (de) | 1994-07-19 | 1995-07-18 | Verfahren zur Herstellung eines Quarzglastiegels und Vorrichtung zur Durchführung dieses Verfahrens |
Country Status (4)
Country | Link |
---|---|
US (1) | US5762672A (de) |
EP (1) | EP0693461B1 (de) |
JP (1) | JP2830987B2 (de) |
DE (1) | DE69525193T2 (de) |
Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3979666B2 (ja) * | 1995-09-12 | 2007-09-19 | コーニング インコーポレイテッド | 溶融シリカガラスの製造に於ける、炉、その使用方法及び炉によって製造された光学製品 |
US6182237B1 (en) | 1998-08-31 | 2001-01-30 | International Business Machines Corporation | System and method for detecting phase errors in asics with multiple clock frequencies |
EP1094039B1 (de) * | 1999-04-06 | 2015-04-29 | Wacom Manufacturing Co., Ltd. | Verfahren zur herstellung eines quartzglastiegels |
JP2001342026A (ja) * | 2000-05-30 | 2001-12-11 | Tosoh Quartz Corp | 石英ガラスの製造方法及び製造装置 |
AUPR054000A0 (en) * | 2000-10-04 | 2000-10-26 | Austai Motors Designing Pty Ltd | A planetary gear apparatus |
US6502422B1 (en) * | 2000-10-27 | 2003-01-07 | General Electric Company | Method for quartz crucible fabrication |
US6546754B1 (en) | 2000-10-27 | 2003-04-15 | General Electric Company | Apparatus for silica crucible manufacture |
US20040118156A1 (en) * | 2001-03-08 | 2004-06-24 | Gabriele Korus | Method of producing a quartz glass crucible |
US6755049B2 (en) * | 2001-03-08 | 2004-06-29 | Heraeus Quarzglas Gmbh & Co. Kg | Method of producing a quartz glass crucible |
US6510707B2 (en) * | 2001-03-15 | 2003-01-28 | Heraeus Shin-Etsu America, Inc. | Methods for making silica crucibles |
JP4841764B2 (ja) * | 2001-07-23 | 2011-12-21 | 信越石英株式会社 | シリコン単結晶引上げ用石英ガラスるつぼの製造方法及び装置 |
US20050120945A1 (en) * | 2003-12-03 | 2005-06-09 | General Electric Company | Quartz crucibles having reduced bubble content and method of making thereof |
KR101229067B1 (ko) * | 2004-02-02 | 2013-02-04 | 신에쯔 한도타이 가부시키가이샤 | 실리콘 단결정, 실리콘 웨이퍼, 그 제조장치 및 제조방법 |
US7837955B2 (en) * | 2006-03-08 | 2010-11-23 | Unimin Corporation | Continuous reactor system for anoxic purification |
TWI408259B (zh) * | 2006-09-28 | 2013-09-11 | Shinetsu Quartz Prod | 具有鋇摻雜內壁的矽玻璃坩堝 |
JP5398074B2 (ja) * | 2007-07-28 | 2014-01-29 | 株式会社Sumco | 石英ガラスルツボの製造方法および製造装置 |
DE102008026890B3 (de) * | 2008-06-05 | 2009-06-04 | Heraeus Quarzglas Gmbh & Co. Kg | Verfahren und Vorrichtung zur Herstellung eines Tiegels aus Quarzglas |
US8272234B2 (en) * | 2008-12-19 | 2012-09-25 | Heraeus Shin-Etsu America, Inc. | Silica crucible with pure and bubble free inner crucible layer and method of making the same |
US9003832B2 (en) * | 2009-11-20 | 2015-04-14 | Heraeus Shin-Etsu America, Inc. | Method of making a silica crucible in a controlled atmosphere |
TW201202454A (en) * | 2010-07-07 | 2012-01-16 | Hon Hai Prec Ind Co Ltd | Processing apparatus for smoothing film material and evaporation deposition device with same |
CN102384646A (zh) * | 2010-09-02 | 2012-03-21 | 方强 | 实现内加热的坩埚、炉体及坩埚电阻炉 |
US20120267280A1 (en) * | 2011-04-25 | 2012-10-25 | Glen Bennett Cook | Vessel for molten semiconducting materials and methods of making the same |
US8281620B1 (en) * | 2011-04-27 | 2012-10-09 | Japan Super Quartz Corporation | Apparatus for manufacturing vitreous silica crucible |
EP2616575A4 (de) * | 2011-05-25 | 2015-05-20 | Saint Gobain Res Shanghai Co Ltd | Silicatiegel und herstellungsverfahren dafür |
US8857214B2 (en) * | 2011-11-18 | 2014-10-14 | Sunedison Semiconductor Limited | Methods for producing crucibles with a reduced amount of bubbles |
US8524319B2 (en) | 2011-11-18 | 2013-09-03 | Memc Electronic Materials, Inc. | Methods for producing crucibles with a reduced amount of bubbles |
KR101659340B1 (ko) * | 2015-03-30 | 2016-09-26 | (주) 디에스테크노 | 고 순도 실린더형 석영 유리의 제조 장치 |
KR102129454B1 (ko) * | 2018-01-18 | 2020-07-02 | 이석연 | 잉곳 도가니의 열처리장치 |
JP7023130B2 (ja) | 2018-02-06 | 2022-02-21 | 信越石英株式会社 | カーボン電極及び石英ガラスるつぼの製造方法 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2928089C3 (de) * | 1979-07-12 | 1982-03-04 | Heraeus Quarzschmelze Gmbh, 6450 Hanau | Verbundtiegel für halbleitertechnologische Zwecke und Verfahren zur Herstellung |
DE3014311C2 (de) * | 1980-04-15 | 1982-06-16 | Heraeus Quarzschmelze Gmbh, 6450 Hanau | Verfahren zur Herstellung von Quarzglastiegeln und Vorrichtung zur Durchführung dieses Verfahrens |
JPS59164645A (ja) * | 1983-03-11 | 1984-09-17 | Denki Kagaku Kogyo Kk | 溶融珪酸の製造方法 |
GB8427915D0 (en) * | 1984-11-05 | 1984-12-12 | Tsl Thermal Syndicate Plc | Vitreous silica products |
US4632686A (en) * | 1986-02-24 | 1986-12-30 | Gte Products Corporation | Method of manufacturing quartz glass crucibles with low bubble content |
US4713104A (en) * | 1986-03-31 | 1987-12-15 | Gte Products Corporation | Quartz glass crucibles |
US4963178A (en) * | 1986-03-31 | 1990-10-16 | Gte Products Corporation | Apparatus for making quartz glass crucibles |
US4911896A (en) * | 1986-07-24 | 1990-03-27 | General Electric Company | Fused quartz member for use in semiconductor manufacture |
US4935046A (en) * | 1987-12-03 | 1990-06-19 | Shin-Etsu Handotai Company, Limited | Manufacture of a quartz glass vessel for the growth of single crystal semiconductor |
JPH01148718A (ja) * | 1987-12-03 | 1989-06-12 | Shin Etsu Handotai Co Ltd | 石英るつぼの製造方法 |
JP2559604B2 (ja) * | 1987-12-15 | 1996-12-04 | 東芝セラミックス株式会社 | 石英ガラスルツボの製造方法 |
JP2615292B2 (ja) * | 1987-12-17 | 1997-05-28 | 東芝セラミックス株式会社 | 石英ガラスルツボの製造方法 |
JP2933404B2 (ja) * | 1990-06-25 | 1999-08-16 | 信越石英 株式会社 | シリコン単結晶引き上げ用石英ガラスルツボとその製造方法 |
-
1994
- 1994-07-19 JP JP6187905A patent/JP2830987B2/ja not_active Expired - Lifetime
-
1995
- 1995-07-11 US US08/500,541 patent/US5762672A/en not_active Expired - Lifetime
- 1995-07-18 DE DE69525193T patent/DE69525193T2/de not_active Expired - Fee Related
- 1995-07-18 EP EP95111239A patent/EP0693461B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0693461A1 (de) | 1996-01-24 |
JPH0826759A (ja) | 1996-01-30 |
DE69525193T2 (de) | 2002-08-29 |
EP0693461B1 (de) | 2002-01-30 |
JP2830987B2 (ja) | 1998-12-02 |
US5762672A (en) | 1998-06-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |