DE69614609D1 - Verfahren zur Herstellung eines Einkristalles - Google Patents
Verfahren zur Herstellung eines EinkristallesInfo
- Publication number
- DE69614609D1 DE69614609D1 DE69614609T DE69614609T DE69614609D1 DE 69614609 D1 DE69614609 D1 DE 69614609D1 DE 69614609 T DE69614609 T DE 69614609T DE 69614609 T DE69614609 T DE 69614609T DE 69614609 D1 DE69614609 D1 DE 69614609D1
- Authority
- DE
- Germany
- Prior art keywords
- production
- single crystal
- crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
- C30B15/305—Stirring of the melt
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10S117/917—Magnetic
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
- Y10T117/1068—Seed pulling including heating or cooling details [e.g., shield configuration]
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7158454A JP2940437B2 (ja) | 1995-06-01 | 1995-06-01 | 単結晶の製造方法及び装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69614609D1 true DE69614609D1 (de) | 2001-09-27 |
DE69614609T2 DE69614609T2 (de) | 2002-07-04 |
Family
ID=15672109
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69614609T Expired - Lifetime DE69614609T2 (de) | 1995-06-01 | 1996-06-03 | Verfahren zur Herstellung eines Einkristalles |
Country Status (5)
Country | Link |
---|---|
US (2) | US5792255A (de) |
EP (1) | EP0745706B1 (de) |
JP (1) | JP2940437B2 (de) |
KR (1) | KR100239864B1 (de) |
DE (1) | DE69614609T2 (de) |
Families Citing this family (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2940437B2 (ja) * | 1995-06-01 | 1999-08-25 | 信越半導体株式会社 | 単結晶の製造方法及び装置 |
JP3520883B2 (ja) * | 1995-12-29 | 2004-04-19 | 信越半導体株式会社 | 単結晶の製造方法 |
JPH10297994A (ja) * | 1997-04-25 | 1998-11-10 | Sumitomo Sitix Corp | シリコン単結晶育成方法 |
JP2992988B2 (ja) * | 1997-11-06 | 1999-12-20 | 日本電気株式会社 | シリコン単結晶育成方法 |
DE19753477A1 (de) * | 1997-12-02 | 1999-06-10 | Wacker Siltronic Halbleitermat | Verfahren und Heizvorrichtung zum Aufschmelzen von Halbleitermaterial |
JP2000247788A (ja) * | 1999-02-26 | 2000-09-12 | Shin Etsu Handotai Co Ltd | シリコン単結晶の製造方法 |
KR100818677B1 (ko) * | 1999-03-17 | 2008-04-01 | 신에쯔 한도타이 가부시키가이샤 | 실리콘 단결정의 제조방법 및 그 제조장치, 그리고 그방법으로 제조된 실리콘 단결정 및 웨이퍼 |
JP4358380B2 (ja) * | 1999-09-28 | 2009-11-04 | 住友重機械工業株式会社 | 磁界中熱処理装置 |
JP4193558B2 (ja) * | 2003-04-16 | 2008-12-10 | 信越半導体株式会社 | 単結晶の製造方法 |
JP4432458B2 (ja) * | 2003-10-30 | 2010-03-17 | 信越半導体株式会社 | 単結晶の製造方法 |
JP4501507B2 (ja) * | 2004-04-06 | 2010-07-14 | 株式会社Sumco | シリコン単結晶育成方法 |
EP1930484B1 (de) * | 2005-07-13 | 2014-07-23 | Shin-Etsu Handotai Co., Ltd. | Verfahren zur herstellung eines silizium-einkristall |
KR100840751B1 (ko) * | 2005-07-26 | 2008-06-24 | 주식회사 실트론 | 고품질 실리콘 단결정 잉곳 제조 방법, 성장 장치 및그로부터 제조된 잉곳 , 웨이퍼 |
KR100793950B1 (ko) * | 2005-07-27 | 2008-01-16 | 주식회사 실트론 | 실리콘 단결정 잉곳 및 그 성장방법 |
KR100831044B1 (ko) * | 2005-09-21 | 2008-05-21 | 주식회사 실트론 | 고품질 실리콘 단결정 잉곳의 성장장치, 그 장치를 이용한성장방법 |
JP2007210865A (ja) * | 2006-02-13 | 2007-08-23 | Sumco Corp | シリコン単結晶引上装置 |
US8152921B2 (en) * | 2006-09-01 | 2012-04-10 | Okmetic Oyj | Crystal manufacturing |
JP4919343B2 (ja) * | 2007-02-06 | 2012-04-18 | コバレントマテリアル株式会社 | 単結晶引上装置 |
JP5240191B2 (ja) | 2007-05-30 | 2013-07-17 | 株式会社Sumco | シリコン単結晶引上装置 |
JP4829176B2 (ja) | 2007-06-08 | 2011-12-07 | シルトロニック・ジャパン株式会社 | 単結晶の製造方法 |
KR100906284B1 (ko) | 2007-11-02 | 2009-07-06 | 주식회사 실트론 | 산소농도 특성이 개선된 반도체 단결정의 제조방법 |
KR100954291B1 (ko) | 2008-01-21 | 2010-04-26 | 주식회사 실트론 | 고품질의 반도체 단결정 잉곳 제조장치 및 방법 |
JP5304206B2 (ja) | 2008-12-04 | 2013-10-02 | 信越半導体株式会社 | 単結晶の製造方法および単結晶の製造装置 |
JP5131170B2 (ja) * | 2008-12-05 | 2013-01-30 | 信越半導体株式会社 | 単結晶製造用上部ヒーターおよび単結晶製造装置ならびに単結晶製造方法 |
ATE539182T1 (de) | 2009-05-13 | 2012-01-15 | Siltronic Ag | Verfahren und vorrichtung zur züchtung eines siliciumeinzelkristalls durch schmelzung |
KR101729515B1 (ko) | 2015-04-14 | 2017-04-24 | 주식회사 엘지실트론 | 실리콘 단결정 잉곳의 성장 방법 |
WO2017077701A1 (ja) | 2015-11-02 | 2017-05-11 | 株式会社Sumco | 単結晶シリコンの製造方法および単結晶シリコン |
CN110129883A (zh) * | 2018-03-30 | 2019-08-16 | 杭州慧翔电液技术开发有限公司 | 一种用于磁控直拉单晶的磁体结构及磁控直拉单晶的方法 |
JP6610816B1 (ja) | 2019-02-18 | 2019-11-27 | 信越半導体株式会社 | シリコン単結晶引上装置 |
CN116926656B (zh) * | 2023-08-02 | 2023-12-26 | 鸿新新能源科技(云南)有限公司 | 一种内置磁场装置的光伏半导体单晶炉 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3245051C2 (de) * | 1982-12-06 | 1986-09-25 | Alkem Gmbh, 6450 Hanau | Verfahren zum Herstellen von PuO↓2↓-haltigen Kristallen |
JPS6027682A (ja) * | 1983-07-26 | 1985-02-12 | Toshiba Corp | 単結晶引上装置 |
US4565671A (en) | 1983-08-05 | 1986-01-21 | Kabushiki Kaisha Toshiba | Single crystal manufacturing apparatus |
JPS6144797A (ja) * | 1984-08-10 | 1986-03-04 | Toshiba Corp | 単結晶育成装置およびその制御方法 |
DE3579080D1 (de) * | 1984-09-04 | 1990-09-13 | Forschungszentrum Juelich Gmbh | Verfahren zur herstellung eines kristallinen koerpers aus der schmelze. |
JPS61222984A (ja) * | 1985-03-28 | 1986-10-03 | Toshiba Corp | 単結晶の製造装置 |
GB8805478D0 (en) * | 1988-03-08 | 1988-04-07 | Secr Defence | Method & apparatus for growing semi-conductor crystalline materials |
JP2940437B2 (ja) * | 1995-06-01 | 1999-08-25 | 信越半導体株式会社 | 単結晶の製造方法及び装置 |
JP2716023B2 (ja) * | 1995-11-22 | 1998-02-18 | 日本電気株式会社 | シリコン単結晶育成装置 |
-
1995
- 1995-06-01 JP JP7158454A patent/JP2940437B2/ja not_active Expired - Lifetime
-
1996
- 1996-05-30 US US08/655,201 patent/US5792255A/en not_active Expired - Lifetime
- 1996-06-01 KR KR1019960019464A patent/KR100239864B1/ko not_active IP Right Cessation
- 1996-06-03 DE DE69614609T patent/DE69614609T2/de not_active Expired - Lifetime
- 1996-06-03 EP EP96303988A patent/EP0745706B1/de not_active Expired - Lifetime
-
1998
- 1998-05-20 US US09/081,665 patent/US5980630A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0745706A1 (de) | 1996-12-04 |
KR100239864B1 (ko) | 2000-01-15 |
EP0745706B1 (de) | 2001-08-22 |
JPH08333191A (ja) | 1996-12-17 |
US5792255A (en) | 1998-08-11 |
KR970001604A (ko) | 1997-01-24 |
US5980630A (en) | 1999-11-09 |
JP2940437B2 (ja) | 1999-08-25 |
DE69614609T2 (de) | 2002-07-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |