DE69526557T2 - Verfahren zur Herstellung einer Mikrostruktur - Google Patents

Verfahren zur Herstellung einer Mikrostruktur

Info

Publication number
DE69526557T2
DE69526557T2 DE69526557T DE69526557T DE69526557T2 DE 69526557 T2 DE69526557 T2 DE 69526557T2 DE 69526557 T DE69526557 T DE 69526557T DE 69526557 T DE69526557 T DE 69526557T DE 69526557 T2 DE69526557 T2 DE 69526557T2
Authority
DE
Germany
Prior art keywords
microstructure
production
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69526557T
Other languages
English (en)
Other versions
DE69526557D1 (de
Inventor
Takayuki Yagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE69526557D1 publication Critical patent/DE69526557D1/de
Application granted granted Critical
Publication of DE69526557T2 publication Critical patent/DE69526557T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/873—Tip holder
DE69526557T 1994-11-07 1995-11-06 Verfahren zur Herstellung einer Mikrostruktur Expired - Lifetime DE69526557T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27210994A JP3182301B2 (ja) 1994-11-07 1994-11-07 マイクロ構造体及びその形成法

Publications (2)

Publication Number Publication Date
DE69526557D1 DE69526557D1 (de) 2002-06-06
DE69526557T2 true DE69526557T2 (de) 2002-10-31

Family

ID=17509213

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69526557T Expired - Lifetime DE69526557T2 (de) 1994-11-07 1995-11-06 Verfahren zur Herstellung einer Mikrostruktur

Country Status (4)

Country Link
US (1) US5994750A (de)
EP (1) EP0711029B1 (de)
JP (1) JP3182301B2 (de)
DE (1) DE69526557T2 (de)

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Also Published As

Publication number Publication date
EP0711029B1 (de) 2002-05-02
EP0711029A3 (de) 1996-10-02
DE69526557D1 (de) 2002-06-06
EP0711029A2 (de) 1996-05-08
JP3182301B2 (ja) 2001-07-03
US5994750A (en) 1999-11-30
JPH08140368A (ja) 1996-05-31

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