DE69524347T2 - Vorrichtung und Verfahren zum Wegmessung - Google Patents

Vorrichtung und Verfahren zum Wegmessung

Info

Publication number
DE69524347T2
DE69524347T2 DE69524347T DE69524347T DE69524347T2 DE 69524347 T2 DE69524347 T2 DE 69524347T2 DE 69524347 T DE69524347 T DE 69524347T DE 69524347 T DE69524347 T DE 69524347T DE 69524347 T2 DE69524347 T2 DE 69524347T2
Authority
DE
Germany
Prior art keywords
distance measurement
measurement
distance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Revoked
Application number
DE69524347T
Other languages
English (en)
Other versions
DE69524347D1 (de
Inventor
Naoki Kawamata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=26527837&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69524347(T2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE69524347D1 publication Critical patent/DE69524347D1/de
Publication of DE69524347T2 publication Critical patent/DE69524347T2/de
Anticipated expiration legal-status Critical
Revoked legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24471Error correction
    • G01D5/24476Signal processing
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D18/00Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00
    • G01D18/001Calibrating encoders
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24471Error correction
    • G01D5/2448Correction of gain, threshold, offset or phase control
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24471Error correction
    • G01D5/2449Error correction using hard-stored calibration data
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/245Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
    • G01D5/2451Incremental encoders
DE69524347T 1994-09-22 1995-09-21 Vorrichtung und Verfahren zum Wegmessung Revoked DE69524347T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP22773294 1994-09-22
JP7234109A JPH08145719A (ja) 1994-09-22 1995-09-12 位置または角度の検出方法

Publications (2)

Publication Number Publication Date
DE69524347D1 DE69524347D1 (de) 2002-01-17
DE69524347T2 true DE69524347T2 (de) 2002-08-14

Family

ID=26527837

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69524347T Revoked DE69524347T2 (de) 1994-09-22 1995-09-21 Vorrichtung und Verfahren zum Wegmessung

Country Status (5)

Country Link
US (1) US5719789A (de)
EP (1) EP0704678B1 (de)
JP (1) JPH08145719A (de)
KR (1) KR100204454B1 (de)
DE (1) DE69524347T2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009022084A1 (de) * 2009-05-20 2010-11-25 Sew-Eurodrive Gmbh & Co. Kg Verfahren und Vorrichtung zur Bestimmung der Winkelstellung eines drehbaren Teils

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EP0814317A4 (de) * 1995-03-10 1998-12-02 Seft Dev Lab Co Ltd Positionsmesseinrichtung
DE69727368T2 (de) * 1996-11-11 2004-07-01 Fanuc Ltd. Interpolationsschaltung für kodiervorrichtung
WO1999027324A2 (en) * 1997-11-25 1999-06-03 Microe, Inc. Multi-track absolute encoder
JP4447794B2 (ja) * 1999-03-30 2010-04-07 ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング 増分位置測定システムの周期信号を補正する方法と回路装置
US6934641B2 (en) * 1999-11-24 2005-08-23 Renishaw Plc Motion detection and analysis
DE10049502A1 (de) * 2000-10-06 2002-04-11 Heidenhain Gmbh Dr Johannes Verfahren und Vorrichtung zur absoluten Positionsbestimmung
JP2002350133A (ja) * 2001-05-25 2002-12-04 Nikon Geotecs Co Ltd 測量機
JP5022545B2 (ja) * 2001-08-10 2012-09-12 日置電機株式会社 位相差算出方法
JP4789802B2 (ja) 2003-04-25 2011-10-12 アップル インコーポレイテッド メディアアイテムをブラウズ、サーチおよび提示するグラフィカルユーザインタフェース
US20040215534A1 (en) 2003-04-25 2004-10-28 Apple Computer, Inc. Method and system for network-based allowance control
WO2005053146A2 (en) * 2003-11-20 2005-06-09 University Of Virginia Patent Foundation Method and system for enhanced resolution, automatically- calibrated position sensor
US7959666B2 (en) * 2003-12-23 2011-06-14 Sadra Medical, Inc. Methods and apparatus for endovascularly replacing a heart valve
GB0401748D0 (en) 2004-01-27 2004-03-03 Copley Motion Systems Llc Linear motor and transducer arrangement therefor
JP2006003307A (ja) * 2004-06-21 2006-01-05 Mitsutoyo Corp エンコーダ、及び、その信号調整方法
US20080052033A1 (en) * 2004-08-12 2008-02-28 University Of Virginia Patent Foundation Method, Apparatus and Computer Program Product of Aliasing Discriminator for Encoder Interfaces
DE102004062118B3 (de) 2004-12-23 2006-01-12 Aradex Ag Verfahren zur Verbesserung der Signalqualität von sinusförmigen Spursignalen
US7774708B2 (en) * 2006-01-04 2010-08-10 Apple Inc. Graphical user interface with improved media presentation
JP4858837B2 (ja) * 2006-10-26 2012-01-18 株式会社デンソー 回転角度検出装置
JP5111031B2 (ja) 2007-09-14 2012-12-26 キヤノン株式会社 変位検出方法及びモータ制御装置
WO2009066545A1 (ja) * 2007-11-19 2009-05-28 Alps Electric Co., Ltd. 角度検知装置
DE102008050540B4 (de) * 2008-10-06 2015-08-06 Institut für Mikroelektronik- und Mechatronik-Systeme gGmbH Anordnung zum Verarbeiten eines analogen Sensorausgangssignals mindestens eines optischen Sensors
KR101031770B1 (ko) 2009-07-16 2011-04-29 주식회사 져스텍 엔코더 보정장치 및 엔코더 보정방법
US8712722B2 (en) * 2011-03-01 2014-04-29 Honeywell International, Inc. 360-degree angle decoder
JP6106839B2 (ja) * 2012-02-10 2017-04-05 パナソニックIpマネジメント株式会社 エンコーダ
JP6230254B2 (ja) * 2013-04-04 2017-11-15 キヤノン株式会社 制御装置及びその搬送制御方法
JP6624446B2 (ja) * 2016-02-26 2019-12-25 株式会社東京精密 内挿方法及び内挿装置
CN113302455B (zh) * 2019-01-22 2024-02-13 三菱电机株式会社 旋转角度检测装置以及包含该旋转角度检测装置的电动助力转向装置
EP3705902B1 (de) * 2019-03-08 2021-10-27 EM Microelectronic-Marin SA Verfahren zur bestimmung eines absolutwinkels eines magnetfeldes
US11467225B2 (en) 2019-03-08 2022-10-11 Em Microelectronic-Marin Sa Method of determining an absolute angle of a magnetic field

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3202339C2 (de) * 1982-01-26 1983-12-15 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Digitale elektrische Längen- oder Winkelmeßeinrichtung
DE3231990A1 (de) * 1982-08-27 1984-03-01 Siemens AG, 1000 Berlin und 8000 München Auswerteeinrichtung fuer einen digitalen inkrementalgeber
DE3737720C2 (de) * 1987-11-06 1995-02-09 Heidenhain Gmbh Dr Johannes Positionsmeßeinrichtung mit Unterteilungsschaltung
JP2501227B2 (ja) * 1988-05-30 1996-05-29 ファナック株式会社 絶対位置エンコ―ダ
JP2649390B2 (ja) * 1988-10-12 1997-09-03 キヤノン株式会社 信号内挿回路
EP0408799B1 (de) * 1989-07-21 1993-04-14 Dr. Johannes Heidenhain GmbH Verfahren zum Interpolieren von Positionsmesssignalen
US5202842A (en) * 1989-11-29 1993-04-13 Kabushiki Kaisha Okuma Tekkosho Rotational position detecting device which compensates for eccentricity of rotating object
JPH04229702A (ja) * 1990-06-20 1992-08-19 Canon Inc 信号処理方法及び装置、並びにこれを用いた変位検出装置等のシステム
US5287166A (en) * 1990-07-20 1994-02-15 Konica Corporation Displacement meter with stared displacement values
JP2575935B2 (ja) * 1990-07-30 1997-01-29 オークマ株式会社 位置検出装置
JP3313750B2 (ja) * 1992-01-21 2002-08-12 キヤノン株式会社 信号処理装置及びこれを用いた装置
JPH06167354A (ja) * 1992-11-27 1994-06-14 Sony Magnescale Inc スケールの内挿処理装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009022084A1 (de) * 2009-05-20 2010-11-25 Sew-Eurodrive Gmbh & Co. Kg Verfahren und Vorrichtung zur Bestimmung der Winkelstellung eines drehbaren Teils
DE102009022084B4 (de) * 2009-05-20 2015-07-09 Sew-Eurodrive Gmbh & Co Kg Verfahren zur Bestimmung der Winkelstellung eines drehbaren Teils

Also Published As

Publication number Publication date
EP0704678A1 (de) 1996-04-03
KR100204454B1 (ko) 1999-06-15
US5719789A (en) 1998-02-17
EP0704678B1 (de) 2001-12-05
DE69524347D1 (de) 2002-01-17
JPH08145719A (ja) 1996-06-07

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8331 Complete revocation