DE69512164T2 - Vibrationsangetriebener Motor - Google Patents

Vibrationsangetriebener Motor

Info

Publication number
DE69512164T2
DE69512164T2 DE69512164T DE69512164T DE69512164T2 DE 69512164 T2 DE69512164 T2 DE 69512164T2 DE 69512164 T DE69512164 T DE 69512164T DE 69512164 T DE69512164 T DE 69512164T DE 69512164 T2 DE69512164 T2 DE 69512164T2
Authority
DE
Germany
Prior art keywords
driven motor
vibration driven
vibration
motor
driven
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69512164T
Other languages
English (en)
Other versions
DE69512164D1 (de
Inventor
Yoshiro Tomikawa
Tadao Takagi
Mitsuhiro Okazaki
Takatoshi Ashizawa
Isao Sugaya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of DE69512164D1 publication Critical patent/DE69512164D1/de
Application granted granted Critical
Publication of DE69512164T2 publication Critical patent/DE69512164T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/106—Langevin motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/0045—Driving devices, e.g. vibrators using longitudinal or radial modes combined with torsion or shear modes
DE69512164T 1994-08-01 1995-07-27 Vibrationsangetriebener Motor Expired - Lifetime DE69512164T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP18027994 1994-08-01
JP18279195A JP3823340B2 (ja) 1994-08-01 1995-07-19 振動モータ

Publications (2)

Publication Number Publication Date
DE69512164D1 DE69512164D1 (de) 1999-10-21
DE69512164T2 true DE69512164T2 (de) 2000-03-09

Family

ID=26499861

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69512164T Expired - Lifetime DE69512164T2 (de) 1994-08-01 1995-07-27 Vibrationsangetriebener Motor

Country Status (6)

Country Link
US (1) US5723935A (de)
EP (1) EP0696072B1 (de)
JP (1) JP3823340B2 (de)
KR (1) KR960009344A (de)
CN (1) CN1153339C (de)
DE (1) DE69512164T2 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08242593A (ja) * 1995-01-06 1996-09-17 Nikon Corp 振動アクチュエータ
JPH08336287A (ja) * 1995-06-07 1996-12-17 Nikon Corp 超音波アクチュエータ
JPH09121570A (ja) * 1995-08-22 1997-05-06 Nikon Corp 振動アクチュエータ
EP0764993A1 (de) * 1995-09-19 1997-03-26 Nikon Corporation Vibrationsgetriebener Antrieb
US5763981A (en) * 1995-09-20 1998-06-09 Nikon Corporation Vibration actuator
JPH10191658A (ja) * 1996-01-09 1998-07-21 Nikon Corp 振動アクチュエータ
US5912525A (en) * 1996-03-21 1999-06-15 Nikon Corporation Vibration actuator
JPH09322572A (ja) * 1996-05-30 1997-12-12 Nikon Corp 振動アクチュエータ
EP2568595A3 (de) * 1998-12-21 2013-05-15 Seiko Epson Corporation Piezoelektrischer Aktor, Uhrwerk und tragbares Gerät
KR100891851B1 (ko) * 2007-07-27 2009-04-07 삼성전기주식회사 고정자와 이를 갖는 압전 초음파 모터
JP2011097702A (ja) * 2009-10-28 2011-05-12 Olympus Corp 超音波モータ
JP5586252B2 (ja) * 2010-01-29 2014-09-10 オリンパス株式会社 超音波モータ
JP5586253B2 (ja) * 2010-01-29 2014-09-10 オリンパス株式会社 超音波モータ
JP5412309B2 (ja) * 2010-02-02 2014-02-12 オリンパス株式会社 超音波モータ
JP5412308B2 (ja) * 2010-02-02 2014-02-12 オリンパス株式会社 超音波モータ
JP5545821B2 (ja) * 2010-02-22 2014-07-09 オリンパス株式会社 超音波モータ
JP5545825B2 (ja) * 2010-03-23 2014-07-09 オリンパス株式会社 超音波モータ
JP2012029381A (ja) * 2010-07-20 2012-02-09 Olympus Corp 超音波モータ
JP2012039690A (ja) * 2010-08-04 2012-02-23 Olympus Corp 超音波モータ
KR101731424B1 (ko) * 2010-10-27 2017-05-02 삼성전자주식회사 진동 액추에이터 조립체
CN104347794B (zh) * 2014-09-09 2017-01-18 清华大学 一种基于剪切压电效应的扭振磁电耦合器件

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US28752A (en) * 1860-06-19 Clothes-wringer
DE1541975C3 (de) * 1967-05-12 1975-03-06 Siemens Ag, 1000 Berlin U. 8000 Muenchen Elektromechanisches Bandfilter
JPS4951891A (de) * 1972-09-19 1974-05-20
JPS4969283A (de) * 1972-11-08 1974-07-04
US3931600A (en) * 1973-06-11 1976-01-06 Kokusai Electric Co., Ltd. Mechanical filter
JPS5821857B2 (ja) * 1976-07-05 1983-05-04 富士通株式会社 捩り振動変換子
US4099211A (en) * 1976-09-13 1978-07-04 Ampex Corporation Positionable transducing mounting structure and driving system therefor
JPS54100283A (en) * 1978-01-24 1979-08-07 Nec Corp Manufacture of electricity-machine converter element
GB2027539B (en) * 1978-08-09 1983-09-21 Marconi Co Ltd Measurement of the density of liquids
AT384912B (de) * 1982-04-16 1988-01-25 Ki Polt I Piezoelektrischer motor
JPH0667221B2 (ja) * 1985-11-21 1994-08-24 オリンパス光学工業株式会社 超音波モ−タ
JP2690907B2 (ja) * 1987-09-25 1997-12-17 株式会社日立製作所 複合型圧電モータ
US4965482A (en) * 1988-06-17 1990-10-23 Nec Corporation Ultrasonic motor and method of adjusting the same
JP2729828B2 (ja) * 1989-03-08 1998-03-18 株式会社トーキン 超音波モータ
US5051647A (en) * 1989-07-06 1991-09-24 Nec Corporation Ultrasonic motor
US5105117A (en) * 1989-10-31 1992-04-14 Brother Kogyo Kabushiki Kaisha Ultrasonic motor
JP3118251B2 (ja) * 1990-11-21 2000-12-18 ニスカ株式会社 超音波駆動装置及びその方法
US5233274A (en) * 1990-11-30 1993-08-03 Asmo Co., Ltd. Drive circuit for langevin type ultrasonic bolt-tightening motor
EP0674350B1 (de) * 1994-03-23 2000-05-31 Nikon Corporation Ultraschallmotor
US5589723A (en) * 1994-03-29 1996-12-31 Minolta Co., Ltd. Driving apparatus using transducer
US5559387A (en) * 1994-05-13 1996-09-24 Beurrier; Henry R. Piezoelectric actuators

Also Published As

Publication number Publication date
JP3823340B2 (ja) 2006-09-20
EP0696072B1 (de) 1999-09-15
US5723935A (en) 1998-03-03
DE69512164D1 (de) 1999-10-21
JPH08103089A (ja) 1996-04-16
EP0696072A1 (de) 1996-02-07
CN1153339C (zh) 2004-06-09
CN1118533A (zh) 1996-03-13
KR960009344A (ko) 1996-03-22

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Legal Events

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