DE69505842T2 - Verfahren zur Beschichtung eines passivierbaren Subtrates aus einem Metall oder einer Legierung mit einer Oxidschicht - Google Patents

Verfahren zur Beschichtung eines passivierbaren Subtrates aus einem Metall oder einer Legierung mit einer Oxidschicht

Info

Publication number
DE69505842T2
DE69505842T2 DE69505842T DE69505842T DE69505842T2 DE 69505842 T2 DE69505842 T2 DE 69505842T2 DE 69505842 T DE69505842 T DE 69505842T DE 69505842 T DE69505842 T DE 69505842T DE 69505842 T2 DE69505842 T2 DE 69505842T2
Authority
DE
Germany
Prior art keywords
substrate
zirconium
gas
metal
oxidation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69505842T
Other languages
German (de)
English (en)
Other versions
DE69505842D1 (de
Inventor
Thierry F-54600 Villers-Les-Nancy Belmonte
Jerome F-54000 Nancy Gavillet
Dominique F-69110 Saint-Foy-Les-Lyon Hertz
Henri F-54500 Vandoeuvre-Les-Nancy Michel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Areva NP SAS
Original Assignee
Areva NC SA
Framatome SA
Compagnie Generale des Matieres Nucleaires SA
Framatome SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Areva NC SA, Framatome SA, Compagnie Generale des Matieres Nucleaires SA, Framatome SAS filed Critical Areva NC SA
Application granted granted Critical
Publication of DE69505842D1 publication Critical patent/DE69505842D1/de
Publication of DE69505842T2 publication Critical patent/DE69505842T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0209—Pretreatment of the material to be coated by heating
    • C23C16/0218—Pretreatment of the material to be coated by heating in a reactive atmosphere
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/452—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by activating reactive gas streams before their introduction into the reaction chamber, e.g. by ionisation or addition of reactive species

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Glass Compositions (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
DE69505842T 1994-12-01 1995-11-29 Verfahren zur Beschichtung eines passivierbaren Subtrates aus einem Metall oder einer Legierung mit einer Oxidschicht Expired - Fee Related DE69505842T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9414466A FR2727691A1 (fr) 1994-12-01 1994-12-01 Procede de revetement d'un substrat en metal ou alliage passivable, par une couche d'oxyde, et tube de gainage et grille-entretoise pour assemblage combustible revetus d'une couche d'oxyde
PCT/FR1995/001576 WO1996017105A1 (fr) 1994-12-01 1995-11-29 Procede de realisation d'une couche en oxyde

Publications (2)

Publication Number Publication Date
DE69505842D1 DE69505842D1 (de) 1998-12-10
DE69505842T2 true DE69505842T2 (de) 1999-04-29

Family

ID=9469386

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69505842T Expired - Fee Related DE69505842T2 (de) 1994-12-01 1995-11-29 Verfahren zur Beschichtung eines passivierbaren Subtrates aus einem Metall oder einer Legierung mit einer Oxidschicht

Country Status (8)

Country Link
US (1) US6033493A (enExample)
EP (1) EP0795042B1 (enExample)
JP (1) JP4097042B2 (enExample)
KR (1) KR100382689B1 (enExample)
DE (1) DE69505842T2 (enExample)
FR (1) FR2727691A1 (enExample)
WO (1) WO1996017105A1 (enExample)
ZA (1) ZA9510173B (enExample)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6512806B2 (en) * 1996-02-23 2003-01-28 Westinghouse Atom Ab Component designed for use in a light water reactor, and a method for the manufacture of such a component
JP4570186B2 (ja) * 1999-11-04 2010-10-27 キヤノンアネルバ株式会社 プラズマクリーニング方法
KR100407728B1 (ko) * 2001-03-21 2003-12-01 한국원자력연구소 플라즈마를 이용한 사용후핵연료 산화환원 장치
US6488783B1 (en) * 2001-03-30 2002-12-03 Babcock & Wilcox Canada, Ltd. High temperature gaseous oxidation for passivation of austenitic alloys
US7601225B2 (en) 2002-06-17 2009-10-13 Asm International N.V. System for controlling the sublimation of reactants
AU2003254266A1 (en) * 2002-07-30 2004-02-16 Asm America, Inc. Sublimation system employing carrier gas
US20040086648A1 (en) * 2002-10-30 2004-05-06 Xiangyang Zhou Hydrothermal deposition of thin and adherent metal oxide coatings for high temperature corrosion protection
US7156380B2 (en) * 2003-09-29 2007-01-02 Asm International, N.V. Safe liquid source containers
US7833353B2 (en) * 2007-01-24 2010-11-16 Asm Japan K.K. Liquid material vaporization apparatus for semiconductor processing apparatus
KR100804132B1 (ko) 2007-02-21 2008-02-19 한국원자력연구원 반응가스의 펄스분사를 이용한 사용후핵연료 산화환원반응장치 및 그 방법
US20090022259A1 (en) * 2007-07-20 2009-01-22 General Electric Company Fuel rod with wear-inhibiting coating
CN101911211B (zh) 2007-12-26 2014-02-12 钍能源股份有限公司 核反应堆(可选的)、用于核反应堆(可选的)的点火区-再生区子组件的燃料组件和用于燃料组件的燃料元件
US8116423B2 (en) 2007-12-26 2012-02-14 Thorium Power, Inc. Nuclear reactor (alternatives), fuel assembly of seed-blanket subassemblies for nuclear reactor (alternatives), and fuel element for fuel assembly
US8343583B2 (en) 2008-07-10 2013-01-01 Asm International N.V. Method for vaporizing non-gaseous precursor in a fluidized bed
US8012876B2 (en) * 2008-12-02 2011-09-06 Asm International N.V. Delivery of vapor precursor from solid source
EP3032541B1 (en) 2008-12-25 2019-02-20 Thorium Power, Inc. A fuel element and a method of manufacturing a fuel element for a fuel assembly of a nuclear reactor
US9117773B2 (en) * 2009-08-26 2015-08-25 Asm America, Inc. High concentration water pulses for atomic layer deposition
WO2011143172A1 (en) 2010-05-11 2011-11-17 Thorium Power, Inc. Fuel assembly with metal fuel alloy kernel and method of manufacturing thereof
US10192644B2 (en) 2010-05-11 2019-01-29 Lightbridge Corporation Fuel assembly
US10170207B2 (en) 2013-05-10 2019-01-01 Thorium Power, Inc. Fuel assembly
US9911511B2 (en) 2012-12-28 2018-03-06 Global Nuclear Fuel—Americas, LLC Fuel rods with wear-inhibiting coatings and methods of making the same
JP7198746B2 (ja) * 2016-09-28 2023-01-04 コミサーリャ ア レナジー アトミック エー オー エナジー アルタナティブ 金属基材を有する原子炉コンポーネント、ｄｌｉ－ｍｏｃｖｄによる製造方法および酸化／水素化に対する使用
KR101941673B1 (ko) 2017-04-18 2019-01-23 가천대학교 산학협력단 다층구조 핵연료 피복관 및 다층구조 핵연료 피복관의 제조방법
CN113718190A (zh) * 2021-09-15 2021-11-30 西安稀有金属材料研究院有限公司 一种提升锆合金耐沸腾硝酸腐蚀性与耐磨性的方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4239819A (en) * 1978-12-11 1980-12-16 Chemetal Corporation Deposition method and products
US4297150A (en) * 1979-07-07 1981-10-27 The British Petroleum Company Limited Protective metal oxide films on metal or alloy substrate surfaces susceptible to coking, corrosion or catalytic activity
CH654334A5 (de) * 1982-09-02 1986-02-14 Maschf Augsburg Nuernberg Ag Verfahren zur bildung einer korrosionsbestaendigen oxidischen schicht auf einem metallischen substrat sowie verwendung dieser schicht.
AU1026688A (en) * 1987-01-20 1988-07-21 Gte Laboratories Incorporated A method for depositing composite coatings
FR2652591B1 (fr) * 1989-10-03 1993-10-08 Framatome Procede d'oxydation superficielle d'une piece en metal passivable, et elements d'assemblage combustible en alliage metallique revetus d'une couche d'oxyde protectrice.
JPH0614582B2 (ja) * 1990-11-19 1994-02-23 日本シイエムケイ株式会社 ホールマスキング装置

Also Published As

Publication number Publication date
JPH10510005A (ja) 1998-09-29
KR980700452A (ko) 1998-03-30
KR100382689B1 (ko) 2003-07-18
FR2727691B1 (enExample) 1997-02-28
WO1996017105A1 (fr) 1996-06-06
ZA9510173B (en) 1997-05-30
DE69505842D1 (de) 1998-12-10
FR2727691A1 (fr) 1996-06-07
US6033493A (en) 2000-03-07
EP0795042B1 (fr) 1998-11-04
EP0795042A1 (fr) 1997-09-17
JP4097042B2 (ja) 2008-06-04

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: FRAMATOME, COURBEVOIE, FR

8327 Change in the person/name/address of the patent owner

Owner name: FRAMATOME ANP, COURBEVOIE, FR

8339 Ceased/non-payment of the annual fee