KR100382689B1 - 기판의산화물층코팅방법및,산하물층으로코팅된핵연료집합체피복관과유도관및스페이서그리드 - Google Patents

기판의산화물층코팅방법및,산하물층으로코팅된핵연료집합체피복관과유도관및스페이서그리드 Download PDF

Info

Publication number
KR100382689B1
KR100382689B1 KR1019970703711A KR19970703711A KR100382689B1 KR 100382689 B1 KR100382689 B1 KR 100382689B1 KR 1019970703711 A KR1019970703711 A KR 1019970703711A KR 19970703711 A KR19970703711 A KR 19970703711A KR 100382689 B1 KR100382689 B1 KR 100382689B1
Authority
KR
South Korea
Prior art keywords
substrate
zirconium
gas
coating
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1019970703711A
Other languages
English (en)
Korean (ko)
Other versions
KR980700452A (ko
Inventor
도미니끄 에르또
띠리 벨몽뜨
제롬 가빌레뜨
앙리 미셸
Original Assignee
프라마톰므 아엔페
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 프라마톰므 아엔페 filed Critical 프라마톰므 아엔페
Publication of KR980700452A publication Critical patent/KR980700452A/ko
Application granted granted Critical
Publication of KR100382689B1 publication Critical patent/KR100382689B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0209—Pretreatment of the material to be coated by heating
    • C23C16/0218—Pretreatment of the material to be coated by heating in a reactive atmosphere
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/452—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by activating reactive gas streams before their introduction into the reaction chamber, e.g. by ionisation or addition of reactive species

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Glass Compositions (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
KR1019970703711A 1994-12-01 1995-11-29 기판의산화물층코팅방법및,산하물층으로코팅된핵연료집합체피복관과유도관및스페이서그리드 Expired - Fee Related KR100382689B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR94/14466 1994-12-01
FR9414466A FR2727691A1 (fr) 1994-12-01 1994-12-01 Procede de revetement d'un substrat en metal ou alliage passivable, par une couche d'oxyde, et tube de gainage et grille-entretoise pour assemblage combustible revetus d'une couche d'oxyde

Publications (2)

Publication Number Publication Date
KR980700452A KR980700452A (ko) 1998-03-30
KR100382689B1 true KR100382689B1 (ko) 2003-07-18

Family

ID=9469386

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019970703711A Expired - Fee Related KR100382689B1 (ko) 1994-12-01 1995-11-29 기판의산화물층코팅방법및,산하물층으로코팅된핵연료집합체피복관과유도관및스페이서그리드

Country Status (8)

Country Link
US (1) US6033493A (enExample)
EP (1) EP0795042B1 (enExample)
JP (1) JP4097042B2 (enExample)
KR (1) KR100382689B1 (enExample)
DE (1) DE69505842T2 (enExample)
FR (1) FR2727691A1 (enExample)
WO (1) WO1996017105A1 (enExample)
ZA (1) ZA9510173B (enExample)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6512806B2 (en) * 1996-02-23 2003-01-28 Westinghouse Atom Ab Component designed for use in a light water reactor, and a method for the manufacture of such a component
JP4570186B2 (ja) * 1999-11-04 2010-10-27 キヤノンアネルバ株式会社 プラズマクリーニング方法
KR100407728B1 (ko) * 2001-03-21 2003-12-01 한국원자력연구소 플라즈마를 이용한 사용후핵연료 산화환원 장치
US6488783B1 (en) * 2001-03-30 2002-12-03 Babcock & Wilcox Canada, Ltd. High temperature gaseous oxidation for passivation of austenitic alloys
US7601225B2 (en) * 2002-06-17 2009-10-13 Asm International N.V. System for controlling the sublimation of reactants
KR101183109B1 (ko) * 2002-07-30 2012-09-24 에이에스엠 아메리카, 인코포레이티드 캐리어 가스를 이용하는 승화 시스템
US20040086648A1 (en) * 2002-10-30 2004-05-06 Xiangyang Zhou Hydrothermal deposition of thin and adherent metal oxide coatings for high temperature corrosion protection
US7156380B2 (en) * 2003-09-29 2007-01-02 Asm International, N.V. Safe liquid source containers
US7833353B2 (en) * 2007-01-24 2010-11-16 Asm Japan K.K. Liquid material vaporization apparatus for semiconductor processing apparatus
KR100804132B1 (ko) 2007-02-21 2008-02-19 한국원자력연구원 반응가스의 펄스분사를 이용한 사용후핵연료 산화환원반응장치 및 그 방법
US20090022259A1 (en) * 2007-07-20 2009-01-22 General Electric Company Fuel rod with wear-inhibiting coating
US8116423B2 (en) 2007-12-26 2012-02-14 Thorium Power, Inc. Nuclear reactor (alternatives), fuel assembly of seed-blanket subassemblies for nuclear reactor (alternatives), and fuel element for fuel assembly
UA98370C2 (ru) 2007-12-26 2012-05-10 Ториум Пауэр Инк. Ядерный реактор (варианты), топливная сборка из зажигающе-воспроизводящих модулей для ядерного реактора (варианты) и топливный элемент топливной сборки
US8343583B2 (en) 2008-07-10 2013-01-01 Asm International N.V. Method for vaporizing non-gaseous precursor in a fluidized bed
US8012876B2 (en) * 2008-12-02 2011-09-06 Asm International N.V. Delivery of vapor precursor from solid source
AU2008365658B2 (en) 2008-12-25 2015-05-21 Thorium Power Inc. Fuel assembly for a light-water nuclear reactor (embodiments), light-water nuclear reactor and fuel element of the fuel assembly
US9117773B2 (en) * 2009-08-26 2015-08-25 Asm America, Inc. High concentration water pulses for atomic layer deposition
US10170207B2 (en) 2013-05-10 2019-01-01 Thorium Power, Inc. Fuel assembly
US10192644B2 (en) 2010-05-11 2019-01-29 Lightbridge Corporation Fuel assembly
WO2011143172A1 (en) 2010-05-11 2011-11-17 Thorium Power, Inc. Fuel assembly with metal fuel alloy kernel and method of manufacturing thereof
US9911511B2 (en) 2012-12-28 2018-03-06 Global Nuclear Fuel—Americas, LLC Fuel rods with wear-inhibiting coatings and methods of making the same
ES2827830T3 (es) * 2016-09-28 2021-05-24 Commissariat Energie Atomique Componente nuclear con sustrato metálico, procedimiento de fabricación mediante DLI-MOCVD y usos contra la oxidación/hidruración
KR101941673B1 (ko) * 2017-04-18 2019-01-23 가천대학교 산학협력단 다층구조 핵연료 피복관 및 다층구조 핵연료 피복관의 제조방법
CN113718190A (zh) * 2021-09-15 2021-11-30 西安稀有金属材料研究院有限公司 一种提升锆合金耐沸腾硝酸腐蚀性与耐磨性的方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4297150A (en) * 1979-07-07 1981-10-27 The British Petroleum Company Limited Protective metal oxide films on metal or alloy substrate surfaces susceptible to coking, corrosion or catalytic activity
US5328524A (en) * 1989-10-03 1994-07-12 Framatome Process for the surface oxidation of a part composed of passivatable metal, and fuel assembly elements composed of metal alloy covered with a protective oxide layer

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4239819A (en) * 1978-12-11 1980-12-16 Chemetal Corporation Deposition method and products
CH654334A5 (de) * 1982-09-02 1986-02-14 Maschf Augsburg Nuernberg Ag Verfahren zur bildung einer korrosionsbestaendigen oxidischen schicht auf einem metallischen substrat sowie verwendung dieser schicht.
AU1026688A (en) * 1987-01-20 1988-07-21 Gte Laboratories Incorporated A method for depositing composite coatings
JPH0614582B2 (ja) * 1990-11-19 1994-02-23 日本シイエムケイ株式会社 ホールマスキング装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4297150A (en) * 1979-07-07 1981-10-27 The British Petroleum Company Limited Protective metal oxide films on metal or alloy substrate surfaces susceptible to coking, corrosion or catalytic activity
US5328524A (en) * 1989-10-03 1994-07-12 Framatome Process for the surface oxidation of a part composed of passivatable metal, and fuel assembly elements composed of metal alloy covered with a protective oxide layer

Also Published As

Publication number Publication date
KR980700452A (ko) 1998-03-30
WO1996017105A1 (fr) 1996-06-06
EP0795042A1 (fr) 1997-09-17
ZA9510173B (en) 1997-05-30
JP4097042B2 (ja) 2008-06-04
FR2727691B1 (enExample) 1997-02-28
FR2727691A1 (fr) 1996-06-07
JPH10510005A (ja) 1998-09-29
US6033493A (en) 2000-03-07
DE69505842T2 (de) 1999-04-29
EP0795042B1 (fr) 1998-11-04
DE69505842D1 (de) 1998-12-10

Similar Documents

Publication Publication Date Title
KR100382689B1 (ko) 기판의산화물층코팅방법및,산하물층으로코팅된핵연료집합체피복관과유도관및스페이서그리드
CA1272077A (en) Hard surface coatings for metals in fluidized beds
US8839740B2 (en) Simple chemical vapor deposition systems for depositing multiple-metal aluminide coatings
US9493873B2 (en) Method for preparing a coating for protecting a part against oxidation
US8778445B2 (en) Apparatus and methods for forming modified metal coatings
JP4086146B2 (ja) 半導体装置の製造方法および基板処理装置
EP0635460B1 (en) Gas producing apparatus and method and apparatus for manufacturing optical waveguide and optical fiber preform
US5328524A (en) Process for the surface oxidation of a part composed of passivatable metal, and fuel assembly elements composed of metal alloy covered with a protective oxide layer
JP4535620B2 (ja) 過剰ｃｖｄ反応物の制御方法及びその装置
Okada et al. Radio‐Frequency Plasma Spraying of Ceramics
Akahoshi et al. Deuterium permeation through multi-layer ceramic coatings under liquid lithium-lead exposure condition
US20040066874A1 (en) Method for forming coatings on structural components with corrosion-mitigating materials
US5137683A (en) Process for forming a chromium oxide insulating layer between the pellets and the cladding of a nuclear fuel element, and fuel element having such an insulating layer
Lackey et al. Continuous fiber coating system
US7147823B2 (en) High temperature cooling system and method
GB2078699A (en) Coating of metallic substrates
Iyer et al. Kinetics of low pressure CVD growth of SiO2 on InP and Si
US20060153983A1 (en) Hydrothermal deposition of thin and adherent metal oxide coatings for high temperature corrosion protection
Pochet et al. Practical aspects of deposition of CVD SiC and boron silicon carbide onto high temperature composites
Halverson et al. Plasma assisted chemical vapor deposition on ‘‘three‐dimensional’’substrates
JPH03130366A (ja) 炭化珪素膜製造装置
Kieschke et al. Sputter deposition of diffusion barrier coatings on SiC monofilaments for use in Ti-based composites
KR20200015385A (ko) 금속 오염 방지 방법 및 금속 오염 방지 장치, 그리고 이들을 이용한 기판 처리 방법 및 기판 처리 장치
HK1168876B (en) Apparatus and methods for forming modified metal coatings
Bennett et al. Coating of metallic substrates

Legal Events

Date Code Title Description
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

R17-X000 Change to representative recorded

St.27 status event code: A-3-3-R10-R17-oth-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

R17-X000 Change to representative recorded

St.27 status event code: A-3-3-R10-R17-oth-X000

A201 Request for examination
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

N231 Notification of change of applicant
PN2301 Change of applicant

St.27 status event code: A-3-3-R10-R13-asn-PN2301

St.27 status event code: A-3-3-R10-R11-asn-PN2301

N231 Notification of change of applicant
PN2301 Change of applicant

St.27 status event code: A-3-3-R10-R13-asn-PN2301

St.27 status event code: A-3-3-R10-R11-asn-PN2301

R17-X000 Change to representative recorded

St.27 status event code: A-3-3-R10-R17-oth-X000

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U12-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

R18-X000 Changes to party contact information recorded

St.27 status event code: A-5-5-R10-R18-oth-X000

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

PN2301 Change of applicant

St.27 status event code: A-5-5-R10-R13-asn-PN2301

St.27 status event code: A-5-5-R10-R11-asn-PN2301

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 5

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 6

FPAY Annual fee payment

Payment date: 20090319

Year of fee payment: 7

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 7

R18-X000 Changes to party contact information recorded

St.27 status event code: A-5-5-R10-R18-oth-X000

LAPS Lapse due to unpaid annual fee
PC1903 Unpaid annual fee

St.27 status event code: A-4-4-U10-U13-oth-PC1903

Not in force date: 20100422

Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

PC1903 Unpaid annual fee

St.27 status event code: N-4-6-H10-H13-oth-PC1903

Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

Not in force date: 20100422

R18-X000 Changes to party contact information recorded

St.27 status event code: A-5-5-R10-R18-oth-X000