DE69501493D1 - Entfernung von Feuchtigkeit und Passivierung von Oberflächen - Google Patents
Entfernung von Feuchtigkeit und Passivierung von OberflächenInfo
- Publication number
- DE69501493D1 DE69501493D1 DE69501493T DE69501493T DE69501493D1 DE 69501493 D1 DE69501493 D1 DE 69501493D1 DE 69501493 T DE69501493 T DE 69501493T DE 69501493 T DE69501493 T DE 69501493T DE 69501493 D1 DE69501493 D1 DE 69501493D1
- Authority
- DE
- Germany
- Prior art keywords
- passivation
- moisture
- removal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B7/00—Drying solid materials or objects by processes using a combination of processes not covered by a single one of groups F26B3/00 and F26B5/00
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
- F26B21/14—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects using gases or vapours other than air or steam, e.g. inert gases
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Drying Of Gases (AREA)
- Drying Of Solid Materials (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
- Detergent Compositions (AREA)
- Preventing Corrosion Or Incrustation Of Metals (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/329,029 US5479727A (en) | 1994-10-25 | 1994-10-25 | Moisture removal and passivation of surfaces |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69501493D1 true DE69501493D1 (de) | 1998-02-26 |
DE69501493T2 DE69501493T2 (de) | 1998-04-30 |
Family
ID=23283561
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69501493T Expired - Fee Related DE69501493T2 (de) | 1994-10-25 | 1995-10-20 | Entfernung von Feuchtigkeit und Passivierung von Oberflächen |
Country Status (6)
Country | Link |
---|---|
US (1) | US5479727A (de) |
EP (1) | EP0709635B1 (de) |
JP (1) | JP2774471B2 (de) |
KR (1) | KR960014412A (de) |
DE (1) | DE69501493T2 (de) |
TW (1) | TW323960B (de) |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19638709A1 (de) * | 1996-09-21 | 1998-04-09 | Sts Gmbh Sanierung Tech System | Verfahren zur Sanierung technischer Bauteile unter Verwendung von Stickstoff sowie eine Anlage dazu |
JP2975917B2 (ja) * | 1998-02-06 | 1999-11-10 | 株式会社半導体プロセス研究所 | 半導体装置の製造方法及び半導体装置の製造装置 |
KR100797202B1 (ko) * | 2000-06-23 | 2008-01-23 | 허니웰 인터내셔널 인코포레이티드 | 손상된 실리카 유전 필름에 소수성을 부여하는 방법 및 손상된 실리카 유전 필름 처리 방법 |
KR100417035B1 (ko) * | 2001-07-06 | 2004-02-25 | 박정선 | 유기 전계발광 소자 |
US7832550B2 (en) * | 2001-07-17 | 2010-11-16 | American Air Liquide, Inc. | Reactive gases with concentrations of increased stability and processes for manufacturing same |
US20030017359A1 (en) * | 2001-07-17 | 2003-01-23 | American Air Liquide, Inc. | Increased stability low concentration gases, products comprising same, and methods of making same |
KR20040030684A (ko) * | 2001-07-17 | 2004-04-09 | 레르 리뀌드, 소시에떼 아노님 아 디렉또와르 에 꽁세예 드 쉬르베양스 뿌르 레뛰드 에 렉스쁠로아따시옹 데 프로세데 죠르쥬 끌로드 | 안정성이 개선된 저농도 가스, 이 가스를 포함하는 제품및 그 제조 방법 |
EP1481284A4 (de) * | 2002-03-04 | 2006-10-25 | Tokyo Electron Ltd | Verfahren zur passivierung von materialien mit niedrigem dielektrikum bei der waferverarbeitung |
CN100335969C (zh) * | 2002-04-12 | 2007-09-05 | 东京毅力科创株式会社 | 减少多孔介电薄膜清洗期间损伤的处理方法 |
AU2003214502A1 (en) * | 2002-05-29 | 2003-12-12 | L'air Liquide - Societe Anonyme A Directoire Et Conseil De Surveillance Pour L'etude Et L'exploitati | Reduced moisture compositions comprising an acid gas and a matrix gas, articles of manufacture comprising said compositions and processes for manufacturing same |
US7709371B2 (en) * | 2003-01-25 | 2010-05-04 | Honeywell International Inc. | Repairing damage to low-k dielectric materials using silylating agents |
CN1742363B (zh) * | 2003-01-25 | 2010-10-13 | 霍尼韦尔国际公司 | 受损电介质材料和电介质膜的修复和恢复 |
WO2004102648A2 (en) * | 2003-05-09 | 2004-11-25 | Asm America, Inc. | Reactor surface passivation through chemical deactivation |
US7914847B2 (en) * | 2003-05-09 | 2011-03-29 | Asm America, Inc. | Reactor surface passivation through chemical deactivation |
JP2007533940A (ja) * | 2003-07-30 | 2007-11-22 | ベーエスハー ボッシュ ウント ジーメンス ハウスゲレーテ ゲゼルシャフト ミット ベシュレンクテル ハフツング | 少なくとも1つの部分プログラム段階「乾燥」を有する装置を運転する方法 |
US8475666B2 (en) * | 2004-09-15 | 2013-07-02 | Honeywell International Inc. | Method for making toughening agent materials |
EP1528430A1 (de) * | 2003-10-30 | 2005-05-04 | ASML Netherlands B.V. | Lithographisches Gerät sowie Methode zur Herstellung eines Elements |
US20060040054A1 (en) * | 2004-08-18 | 2006-02-23 | Pearlstein Ronald M | Passivating ALD reactor chamber internal surfaces to prevent residue buildup |
US7678712B2 (en) * | 2005-03-22 | 2010-03-16 | Honeywell International, Inc. | Vapor phase treatment of dielectric materials |
US7500397B2 (en) * | 2007-02-15 | 2009-03-10 | Air Products And Chemicals, Inc. | Activated chemical process for enhancing material properties of dielectric films |
US20090026924A1 (en) * | 2007-07-23 | 2009-01-29 | Leung Roger Y | Methods of making low-refractive index and/or low-k organosilicate coatings |
US7750095B2 (en) | 2008-08-22 | 2010-07-06 | Chevron Phillips Chemical Company Lp | System and method for reducing fouling in a reactor |
US8293658B2 (en) * | 2010-02-17 | 2012-10-23 | Asm America, Inc. | Reactive site deactivation against vapor deposition |
US8590705B2 (en) | 2010-06-11 | 2013-11-26 | Air Products And Chemicals, Inc. | Cylinder surface treated container for monochlorosilane |
US9223203B2 (en) | 2011-07-08 | 2015-12-29 | Asm International N.V. | Microcontact printed films as an activation layer for selective atomic layer deposition |
EP2812378A4 (de) * | 2012-02-09 | 2015-11-04 | Georgia Pacific Chemicals Llc | Verfahren zur herstellung von polymerartikeln in gelform |
EP3095894B1 (de) | 2012-06-15 | 2018-05-09 | Praxair Technology Inc. | Zylindervorbereitung zur bewahrung der stabilität von gelagerten materialien |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3307271A (en) * | 1964-02-06 | 1967-03-07 | Du Pont | Process for drying polymers |
BE754997A (fr) * | 1969-08-20 | 1971-02-19 | Packo Joseph J | Methode et compositions de colmatage des fuites |
US3716384A (en) * | 1971-05-12 | 1973-02-13 | Packo J | Compositions for sealing leaks in vessels |
US4723363A (en) * | 1986-12-29 | 1988-02-09 | Motorola Inc. | Process for removal of water |
JPH085623B2 (ja) * | 1989-09-27 | 1996-01-24 | 株式会社神戸製鋼所 | クレーンの安全装置 |
CA2070145A1 (en) * | 1991-06-03 | 1992-12-04 | Yao-En Li | Process for passivating metal surfaces to enhance the stability of gaseous hydride mixtures at low concentration in contact therewith |
US5255445A (en) * | 1991-06-06 | 1993-10-26 | American Air Liquide, Chicago Research Center | Process for drying metal surfaces using gaseous hydrides to inhibit moisture adsorption and for removing adsorbed moisture from the metal surfaces |
JPH05310445A (ja) * | 1992-05-13 | 1993-11-22 | Nippon Sheet Glass Co Ltd | 撥水性ガラス物品およびその製造方法 |
-
1994
- 1994-10-25 US US08/329,029 patent/US5479727A/en not_active Expired - Fee Related
-
1995
- 1995-07-31 TW TW084107951A patent/TW323960B/zh active
- 1995-10-18 JP JP7294692A patent/JP2774471B2/ja not_active Expired - Lifetime
- 1995-10-20 EP EP95116557A patent/EP0709635B1/de not_active Expired - Lifetime
- 1995-10-20 DE DE69501493T patent/DE69501493T2/de not_active Expired - Fee Related
- 1995-10-25 KR KR1019950036988A patent/KR960014412A/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
DE69501493T2 (de) | 1998-04-30 |
US5479727A (en) | 1996-01-02 |
EP0709635B1 (de) | 1998-01-21 |
KR960014412A (ko) | 1996-05-22 |
JP2774471B2 (ja) | 1998-07-09 |
JPH08303948A (ja) | 1996-11-22 |
TW323960B (en) | 1998-01-01 |
EP0709635A1 (de) | 1996-05-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |