DE69501493D1 - Entfernung von Feuchtigkeit und Passivierung von Oberflächen - Google Patents

Entfernung von Feuchtigkeit und Passivierung von Oberflächen

Info

Publication number
DE69501493D1
DE69501493D1 DE69501493T DE69501493T DE69501493D1 DE 69501493 D1 DE69501493 D1 DE 69501493D1 DE 69501493 T DE69501493 T DE 69501493T DE 69501493 T DE69501493 T DE 69501493T DE 69501493 D1 DE69501493 D1 DE 69501493D1
Authority
DE
Germany
Prior art keywords
passivation
moisture
removal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69501493T
Other languages
English (en)
Other versions
DE69501493T2 (de
Inventor
Stephen Mark Fine
Andrew David Johnson
John Giles Langan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Products and Chemicals Inc
Original Assignee
Air Products and Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Products and Chemicals Inc filed Critical Air Products and Chemicals Inc
Application granted granted Critical
Publication of DE69501493D1 publication Critical patent/DE69501493D1/de
Publication of DE69501493T2 publication Critical patent/DE69501493T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B7/00—Drying solid materials or objects by processes using a combination of processes not covered by a single one of groups F26B3/00 and F26B5/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
    • F26B21/14—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects using gases or vapours other than air or steam, e.g. inert gases

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Drying Of Gases (AREA)
  • Drying Of Solid Materials (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Detergent Compositions (AREA)
  • Preventing Corrosion Or Incrustation Of Metals (AREA)
DE69501493T 1994-10-25 1995-10-20 Entfernung von Feuchtigkeit und Passivierung von Oberflächen Expired - Fee Related DE69501493T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/329,029 US5479727A (en) 1994-10-25 1994-10-25 Moisture removal and passivation of surfaces

Publications (2)

Publication Number Publication Date
DE69501493D1 true DE69501493D1 (de) 1998-02-26
DE69501493T2 DE69501493T2 (de) 1998-04-30

Family

ID=23283561

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69501493T Expired - Fee Related DE69501493T2 (de) 1994-10-25 1995-10-20 Entfernung von Feuchtigkeit und Passivierung von Oberflächen

Country Status (6)

Country Link
US (1) US5479727A (de)
EP (1) EP0709635B1 (de)
JP (1) JP2774471B2 (de)
KR (1) KR960014412A (de)
DE (1) DE69501493T2 (de)
TW (1) TW323960B (de)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19638709A1 (de) * 1996-09-21 1998-04-09 Sts Gmbh Sanierung Tech System Verfahren zur Sanierung technischer Bauteile unter Verwendung von Stickstoff sowie eine Anlage dazu
JP2975917B2 (ja) * 1998-02-06 1999-11-10 株式会社半導体プロセス研究所 半導体装置の製造方法及び半導体装置の製造装置
JP5307963B2 (ja) * 2000-06-23 2013-10-02 ハネウェル・インターナショナル・インコーポレーテッド 誘電フィルム及び材料における疎水性を回復する方法
KR100417035B1 (ko) * 2001-07-06 2004-02-25 박정선 유기 전계발광 소자
US20030017359A1 (en) * 2001-07-17 2003-01-23 American Air Liquide, Inc. Increased stability low concentration gases, products comprising same, and methods of making same
US7832550B2 (en) * 2001-07-17 2010-11-16 American Air Liquide, Inc. Reactive gases with concentrations of increased stability and processes for manufacturing same
JP2004536227A (ja) * 2001-07-17 2004-12-02 レール・リキード−ソシエテ・アノニム・ア・ディレクトワール・エ・コンセイユ・ドゥ・スールベイランス・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード 安定性増低濃度ガス、これを含む製品及びその製造方法
EP1481284A4 (de) * 2002-03-04 2006-10-25 Tokyo Electron Ltd Verfahren zur passivierung von materialien mit niedrigem dielektrikum bei der waferverarbeitung
CN100335969C (zh) * 2002-04-12 2007-09-05 东京毅力科创株式会社 减少多孔介电薄膜清洗期间损伤的处理方法
WO2003100410A1 (en) * 2002-05-29 2003-12-04 L'air Liquide - Societe Anonyme A Directoire Et Conseil De Surveillance Pour L'etude Et L'exploitation Des Procedes Georges Claude Reduced moisture compositions comprising an acid gas and a matrix gas, articles of manufacture comprising said compositions and processes for manufacturing same
EP1588411A4 (de) * 2003-01-25 2008-10-01 Honeywell Int Inc Reparatur und restauration beschädigter dielektrischermaterialien und filme
US7709371B2 (en) * 2003-01-25 2010-05-04 Honeywell International Inc. Repairing damage to low-k dielectric materials using silylating agents
WO2004102648A2 (en) * 2003-05-09 2004-11-25 Asm America, Inc. Reactor surface passivation through chemical deactivation
US7914847B2 (en) * 2003-05-09 2011-03-29 Asm America, Inc. Reactor surface passivation through chemical deactivation
WO2005018410A1 (de) * 2003-07-30 2005-03-03 BSH Bosch und Siemens Hausgeräte GmbH Verfahren zum betreiben eines gerätes mit wenigstens einem teilprogrammschritt 'trocknen'
US8475666B2 (en) * 2004-09-15 2013-07-02 Honeywell International Inc. Method for making toughening agent materials
EP1528430A1 (de) * 2003-10-30 2005-05-04 ASML Netherlands B.V. Lithographisches Gerät sowie Methode zur Herstellung eines Elements
US20060040054A1 (en) * 2004-08-18 2006-02-23 Pearlstein Ronald M Passivating ALD reactor chamber internal surfaces to prevent residue buildup
US7678712B2 (en) * 2005-03-22 2010-03-16 Honeywell International, Inc. Vapor phase treatment of dielectric materials
US7500397B2 (en) * 2007-02-15 2009-03-10 Air Products And Chemicals, Inc. Activated chemical process for enhancing material properties of dielectric films
US20090026924A1 (en) * 2007-07-23 2009-01-29 Leung Roger Y Methods of making low-refractive index and/or low-k organosilicate coatings
US7750095B2 (en) 2008-08-22 2010-07-06 Chevron Phillips Chemical Company Lp System and method for reducing fouling in a reactor
US8293658B2 (en) * 2010-02-17 2012-10-23 Asm America, Inc. Reactive site deactivation against vapor deposition
US8590705B2 (en) 2010-06-11 2013-11-26 Air Products And Chemicals, Inc. Cylinder surface treated container for monochlorosilane
US9223203B2 (en) 2011-07-08 2015-12-29 Asm International N.V. Microcontact printed films as an activation layer for selective atomic layer deposition
IN2014KN01689A (de) * 2012-02-09 2015-10-23 Georgia Pacific Chemicals Llc
WO2013188808A1 (en) * 2012-06-15 2013-12-19 Praxair Technology, Inc. Cylinder preparation for maintaining stability of stored materials

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3307271A (en) * 1964-02-06 1967-03-07 Du Pont Process for drying polymers
BE754997A (fr) * 1969-08-20 1971-02-19 Packo Joseph J Methode et compositions de colmatage des fuites
US3716384A (en) * 1971-05-12 1973-02-13 Packo J Compositions for sealing leaks in vessels
US4723363A (en) * 1986-12-29 1988-02-09 Motorola Inc. Process for removal of water
JPH085623B2 (ja) * 1989-09-27 1996-01-24 株式会社神戸製鋼所 クレーンの安全装置
CA2070145A1 (en) * 1991-06-03 1992-12-04 Yao-En Li Process for passivating metal surfaces to enhance the stability of gaseous hydride mixtures at low concentration in contact therewith
US5255445A (en) * 1991-06-06 1993-10-26 American Air Liquide, Chicago Research Center Process for drying metal surfaces using gaseous hydrides to inhibit moisture adsorption and for removing adsorbed moisture from the metal surfaces
JPH05310445A (ja) * 1992-05-13 1993-11-22 Nippon Sheet Glass Co Ltd 撥水性ガラス物品およびその製造方法

Also Published As

Publication number Publication date
KR960014412A (ko) 1996-05-22
TW323960B (en) 1998-01-01
DE69501493T2 (de) 1998-04-30
JPH08303948A (ja) 1996-11-22
JP2774471B2 (ja) 1998-07-09
EP0709635A1 (de) 1996-05-01
EP0709635B1 (de) 1998-01-21
US5479727A (en) 1996-01-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee