DE69501444T2 - Epitaxie zur Züchtung von Verbindunghalbleitern und InP Substraten für das Epitaxiezüchten - Google Patents
Epitaxie zur Züchtung von Verbindunghalbleitern und InP Substraten für das EpitaxiezüchtenInfo
- Publication number
- DE69501444T2 DE69501444T2 DE69501444T DE69501444T DE69501444T2 DE 69501444 T2 DE69501444 T2 DE 69501444T2 DE 69501444 T DE69501444 T DE 69501444T DE 69501444 T DE69501444 T DE 69501444T DE 69501444 T2 DE69501444 T2 DE 69501444T2
- Authority
- DE
- Germany
- Prior art keywords
- epitaxy
- epitaxial growth
- compound semiconductors
- inp substrates
- growing compound
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
- C30B23/02—Epitaxial-layer growth
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10S117/901—Levitation, reduced gravity, microgravity, space
- Y10S117/902—Specified orientation, shape, crystallography, or size of seed or substrate
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Recrystallisation Techniques (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP06240680A JP3129112B2 (ja) | 1994-09-08 | 1994-09-08 | 化合物半導体エピタキシャル成長方法とそのためのInP基板 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69501444D1 DE69501444D1 (de) | 1998-02-19 |
DE69501444T2 true DE69501444T2 (de) | 1998-04-23 |
Family
ID=17063117
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69501444T Expired - Lifetime DE69501444T2 (de) | 1994-09-08 | 1995-09-06 | Epitaxie zur Züchtung von Verbindunghalbleitern und InP Substraten für das Epitaxiezüchten |
Country Status (4)
Country | Link |
---|---|
US (1) | US5647917A (de) |
EP (1) | EP0701008B1 (de) |
JP (1) | JP3129112B2 (de) |
DE (1) | DE69501444T2 (de) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2002029138A2 (en) * | 2000-09-29 | 2002-04-11 | Showa Denko K.K. | Inp single crystal substrate |
WO2004051725A1 (ja) * | 2002-12-03 | 2004-06-17 | Nikko Materials Co., Ltd. | エピタキシャル成長方法およびエピタキシャル成長用基板 |
CN100378257C (zh) * | 2003-05-07 | 2008-04-02 | 住友电气工业株式会社 | 磷化铟基板、磷化铟单晶及其制造方法 |
US20090072205A1 (en) * | 2003-05-07 | 2009-03-19 | Sumitomo Electric Industries, Ltd. | Indium phosphide substrate, indium phosphide single crystal and process for producing them |
JP2007019048A (ja) * | 2003-09-19 | 2007-01-25 | Nikko Kinzoku Kk | エピタキシャル成長方法及びエピタキシャル成長用基板 |
JP2005150187A (ja) | 2003-11-12 | 2005-06-09 | Sumitomo Chemical Co Ltd | 化合物半導体エピタキシャル基板の製造方法 |
WO2005090650A1 (ja) * | 2004-03-19 | 2005-09-29 | Nippon Mining & Metals Co., Ltd. | 化合物半導体基板 |
US20050217560A1 (en) * | 2004-03-31 | 2005-10-06 | Tolchinsky Peter G | Semiconductor wafers with non-standard crystal orientations and methods of manufacturing the same |
JP4696070B2 (ja) | 2004-09-17 | 2011-06-08 | Jx日鉱日石金属株式会社 | エピタキシャル結晶の成長方法 |
TWI402896B (zh) | 2006-02-02 | 2013-07-21 | Nippon Mining Co | Substrate semiconductor growth substrate and epitaxial growth method |
US7531851B1 (en) * | 2007-02-28 | 2009-05-12 | Hrl Laboratories, Llc | Electronic device with reduced interface charge between epitaxially grown layers and a method for making the same |
US7670928B2 (en) * | 2006-06-14 | 2010-03-02 | Intel Corporation | Ultra-thin oxide bonding for S1 to S1 dual orientation bonding |
US20080217652A1 (en) * | 2006-10-24 | 2008-09-11 | Keh-Yung Cheng | Growth of AsSb-Based Semiconductor Structures on InP Substrates Using Sb-Containing Buffer Layers |
WO2009101892A1 (ja) * | 2008-02-13 | 2009-08-20 | Eudyna Devices Inc. | 半導体デバイスの製造方法 |
JP2014216624A (ja) * | 2013-04-30 | 2014-11-17 | 住友電気工業株式会社 | エピタキシャルウエハ、その製造方法、半導体素子、および光学センサ装置 |
TW201535720A (zh) * | 2014-03-07 | 2015-09-16 | Visual Photonics Epitaxy Co Ltd | 定向磊晶之異質接面雙極性電晶體結構 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6288318A (ja) * | 1985-10-14 | 1987-04-22 | Sharp Corp | 半導体装置の製造方法 |
US5011550A (en) * | 1987-05-13 | 1991-04-30 | Sharp Kabushiki Kaisha | Laminated structure of compound semiconductors |
JP2664904B2 (ja) * | 1987-07-09 | 1997-10-22 | 日本電気株式会社 | 半導体受光素子の製造方法 |
JPS6422072A (en) * | 1987-07-17 | 1989-01-25 | Nec Corp | Manufacture of pin type semiconductor photodetector |
JP2666841B2 (ja) * | 1987-07-28 | 1997-10-22 | 日本電気株式会社 | アバランシェ型半導体受光素子の製造方法 |
JP2750856B2 (ja) | 1987-11-12 | 1998-05-13 | シャープ株式会社 | 半導体装置 |
JPH01270599A (ja) | 1988-04-22 | 1989-10-27 | Nec Corp | 半導体積層構造及びその半導体結晶の成長方法 |
US5264389A (en) * | 1988-09-29 | 1993-11-23 | Sanyo Electric Co., Ltd. | Method of manufacturing a semiconductor laser device |
JPH0692278B2 (ja) | 1989-03-09 | 1994-11-16 | 株式会社ジャパンエナジー | エピタキシャル成長方法 |
JP2784364B2 (ja) | 1989-04-27 | 1998-08-06 | 株式会社 ジャパンエナジー | 化合物半導体のエピタキシャル成長方法 |
JPH0316993A (ja) | 1989-06-13 | 1991-01-24 | Nippon Mining Co Ltd | 化合物半導体の気相エピタキシャル成長方法 |
US5230768A (en) * | 1990-03-26 | 1993-07-27 | Sharp Kabushiki Kaisha | Method for the production of SiC single crystals by using a specific substrate crystal orientation |
JPH0473610A (ja) | 1990-07-13 | 1992-03-09 | Furukawa Electric Co Ltd:The | 光コネクタカバー |
JP2750331B2 (ja) * | 1992-04-23 | 1998-05-13 | 株式会社ジャパンエナジー | エピタキシャル成長用基板およびエピタキシャル成長方法 |
JPH06240680A (ja) | 1993-02-12 | 1994-08-30 | Toshihito Okamoto | 法枠の施工方法 |
JPH0794420A (ja) * | 1993-09-20 | 1995-04-07 | Fujitsu Ltd | 化合物半導体結晶基板の製造方法 |
-
1994
- 1994-09-08 JP JP06240680A patent/JP3129112B2/ja not_active Expired - Lifetime
-
1995
- 1995-09-06 DE DE69501444T patent/DE69501444T2/de not_active Expired - Lifetime
- 1995-09-06 EP EP95306232A patent/EP0701008B1/de not_active Expired - Lifetime
- 1995-09-07 US US08/525,423 patent/US5647917A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0878348A (ja) | 1996-03-22 |
EP0701008A3 (de) | 1996-06-26 |
EP0701008B1 (de) | 1998-01-14 |
EP0701008A2 (de) | 1996-03-13 |
US5647917A (en) | 1997-07-15 |
DE69501444D1 (de) | 1998-02-19 |
JP3129112B2 (ja) | 2001-01-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8328 | Change in the person/name/address of the agent |
Free format text: WESER & KOLLEGEN, 81245 MUENCHEN |
|
8328 | Change in the person/name/address of the agent |
Representative=s name: MEISSNER, BOLTE & PARTNER GBR, 80538 MUENCHEN |