DE69433498D1 - Reaktives gleichstrom-zerstäubungssystem - Google Patents

Reaktives gleichstrom-zerstäubungssystem

Info

Publication number
DE69433498D1
DE69433498D1 DE69433498T DE69433498T DE69433498D1 DE 69433498 D1 DE69433498 D1 DE 69433498D1 DE 69433498 T DE69433498 T DE 69433498T DE 69433498 T DE69433498 T DE 69433498T DE 69433498 D1 DE69433498 D1 DE 69433498D1
Authority
DE
Germany
Prior art keywords
voltage
reversal
restoration
condition
power
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69433498T
Other languages
English (en)
Other versions
DE69433498T3 (de
DE69433498T2 (de
Inventor
Geoffrey N Drummond
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advanced Energy Industries Inc
Original Assignee
Advanced Energy Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=21922882&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69433498(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Advanced Energy Industries Inc filed Critical Advanced Energy Industries Inc
Publication of DE69433498D1 publication Critical patent/DE69433498D1/de
Application granted granted Critical
Publication of DE69433498T2 publication Critical patent/DE69433498T2/de
Anticipated expiration legal-status Critical
Publication of DE69433498T3 publication Critical patent/DE69433498T3/de
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/004—Charge control of objects or beams
    • H01J2237/0041—Neutralising arrangements
    • H01J2237/0044—Neutralising arrangements of objects being observed or treated
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/02—Details
    • H01J2237/0203—Protection arrangements
    • H01J2237/0206—Extinguishing, preventing or controlling unwanted discharges

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
  • Physical Vapour Deposition (AREA)
  • Lining And Supports For Tunnels (AREA)
DE69433498.7T 1993-04-02 1994-04-01 Reaktives gleichstrom-zerstäubungssystem Expired - Lifetime DE69433498T3 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US42619 1993-04-02
US08/042,619 US5718813A (en) 1992-12-30 1993-04-02 Enhanced reactive DC sputtering system
EP94912385.5A EP0692138B2 (de) 1993-04-02 1994-04-01 Reaktives gleichstrom-zerstäubungssystem
PCT/US1994/003611 WO1994023440A1 (en) 1993-04-02 1994-04-01 Reactive dc sputtering system

Publications (3)

Publication Number Publication Date
DE69433498D1 true DE69433498D1 (de) 2004-02-26
DE69433498T2 DE69433498T2 (de) 2004-11-04
DE69433498T3 DE69433498T3 (de) 2015-02-19

Family

ID=21922882

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69433498.7T Expired - Lifetime DE69433498T3 (de) 1993-04-02 1994-04-01 Reaktives gleichstrom-zerstäubungssystem

Country Status (6)

Country Link
US (3) US5718813A (de)
EP (1) EP0692138B2 (de)
JP (1) JP3702304B2 (de)
AT (1) ATE258337T1 (de)
DE (1) DE69433498T3 (de)
WO (1) WO1994023440A1 (de)

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Publication number Publication date
EP0692138B1 (de) 2004-01-21
DE69433498T3 (de) 2015-02-19
ATE258337T1 (de) 2004-02-15
JPH08510504A (ja) 1996-11-05
WO1994023440A1 (en) 1994-10-13
US6024844A (en) 2000-02-15
US6001224A (en) 1999-12-14
JP3702304B2 (ja) 2005-10-05
EP0692138B2 (de) 2014-10-22
DE69433498T2 (de) 2004-11-04
EP0692138A1 (de) 1996-01-17
US5718813A (en) 1998-02-17

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