FR2648001B1 - Alimentation en courant continu d'electrodes a plasma et procede pour regenerer un plasma - Google Patents

Alimentation en courant continu d'electrodes a plasma et procede pour regenerer un plasma

Info

Publication number
FR2648001B1
FR2648001B1 FR8907191A FR8907191A FR2648001B1 FR 2648001 B1 FR2648001 B1 FR 2648001B1 FR 8907191 A FR8907191 A FR 8907191A FR 8907191 A FR8907191 A FR 8907191A FR 2648001 B1 FR2648001 B1 FR 2648001B1
Authority
FR
France
Prior art keywords
plasma
regenerating
direct current
current supply
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR8907191A
Other languages
English (en)
Other versions
FR2648001A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to FR8907191A priority Critical patent/FR2648001B1/fr
Publication of FR2648001A1 publication Critical patent/FR2648001A1/fr
Application granted granted Critical
Publication of FR2648001B1 publication Critical patent/FR2648001B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
FR8907191A 1989-05-31 1989-05-31 Alimentation en courant continu d'electrodes a plasma et procede pour regenerer un plasma Expired - Lifetime FR2648001B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR8907191A FR2648001B1 (fr) 1989-05-31 1989-05-31 Alimentation en courant continu d'electrodes a plasma et procede pour regenerer un plasma

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8907191A FR2648001B1 (fr) 1989-05-31 1989-05-31 Alimentation en courant continu d'electrodes a plasma et procede pour regenerer un plasma

Publications (2)

Publication Number Publication Date
FR2648001A1 FR2648001A1 (fr) 1990-12-07
FR2648001B1 true FR2648001B1 (fr) 1991-09-27

Family

ID=9382227

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8907191A Expired - Lifetime FR2648001B1 (fr) 1989-05-31 1989-05-31 Alimentation en courant continu d'electrodes a plasma et procede pour regenerer un plasma

Country Status (1)

Country Link
FR (1) FR2648001B1 (fr)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4127505C2 (de) * 1991-08-20 2003-05-08 Unaxis Deutschland Holding Einrichtung zur Unterdrückung von Lichtbögen in Gasentladungsvorrichtungen
DE4127504A1 (de) * 1991-08-20 1993-02-25 Leybold Ag Einrichtung zur unterdrueckung von lichtboegen
JP3631246B2 (ja) * 1992-09-30 2005-03-23 アドバンスド エナージィ インダストリーズ，インコーポレイテッド 形状的に精密な薄膜フィルムコーティングシステム
DE4239218C2 (de) * 1992-11-21 2000-08-10 Leybold Ag Anordnung zum Verhindern von Überschlägen in einem Plasma-Prozeßraum
DE4242633C2 (de) * 1992-12-17 1996-11-14 Fraunhofer Ges Forschung Verfahren zur Durchführung von stabilen Niederdruck-Glimmprozessen
US6217717B1 (en) 1992-12-30 2001-04-17 Advanced Energy Industries, Inc. Periodically clearing thin film plasma processing system
US5427669A (en) * 1992-12-30 1995-06-27 Advanced Energy Industries, Inc. Thin film DC plasma processing system
US5718813A (en) * 1992-12-30 1998-02-17 Advanced Energy Industries, Inc. Enhanced reactive DC sputtering system
WO1996031899A1 (fr) 1995-04-07 1996-10-10 Advanced Energy Industries, Inc. Systeme de traitement par plasma en film mince a quantum d'energie ajustable
US5576939A (en) * 1995-05-05 1996-11-19 Drummond; Geoffrey N. Enhanced thin film DC plasma power supply
US6687284B1 (en) * 1999-11-16 2004-02-03 Centre d'Innovation sur le Transport d'Energie du Québec Method and apparatus to facilitate restriking in an arc-furnace
DE60030757T2 (de) * 1999-11-16 2007-09-13 Hydro-Quebec, Montreal Verfahren und vorrichtung zum erleichtern der wiederzündung in einem lichtbogenofen

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2900548A (en) * 1956-06-06 1959-08-18 Winston H Bostick Plasma generator
EP0101774B1 (fr) * 1982-08-26 1986-05-14 CENTRE STEPHANOIS DE RECHERCHES MECANIQUES HYDROMECANIQUE ET FROTTEMENT Société dite: Alimentation électrique de sécurité pour décharge luminescente
BG41745A1 (en) * 1984-12-29 1987-08-14 Minchev Device for discontinuing of arc dicharges in gas dicharge vessel

Also Published As

Publication number Publication date
FR2648001A1 (fr) 1990-12-07

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