EP1995818A1 - Schaltung und Verfahren zur Reduzierung der in einer Zuleitungsinduktivität gespeicherten elektrischen Energie zur schnellen Plasmalichtbogenlöschung - Google Patents

Schaltung und Verfahren zur Reduzierung der in einer Zuleitungsinduktivität gespeicherten elektrischen Energie zur schnellen Plasmalichtbogenlöschung Download PDF

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Publication number
EP1995818A1
EP1995818A1 EP07009567A EP07009567A EP1995818A1 EP 1995818 A1 EP1995818 A1 EP 1995818A1 EP 07009567 A EP07009567 A EP 07009567A EP 07009567 A EP07009567 A EP 07009567A EP 1995818 A1 EP1995818 A1 EP 1995818A1
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EP
European Patent Office
Prior art keywords
power supply
circuit
circuit configuration
plasma
energy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP07009567A
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English (en)
French (fr)
Inventor
Ozimek Pawel
Bugyi Rafal
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Trumpf Huettinger Sp zoo
Original Assignee
Huettinger Electronic Sp zoo
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Huettinger Electronic Sp zoo filed Critical Huettinger Electronic Sp zoo
Priority to EP07009567A priority Critical patent/EP1995818A1/de
Priority to KR1020080043324A priority patent/KR101412736B1/ko
Priority to DE602008006070T priority patent/DE602008006070D1/de
Priority to AT08758454T priority patent/ATE504956T1/de
Priority to PCT/EP2008/003780 priority patent/WO2008138573A1/en
Priority to JP2010507834A priority patent/JP5096564B2/ja
Priority to CN2008800157782A priority patent/CN101682090B/zh
Priority to EP08758454A priority patent/EP2156505B1/de
Priority to US12/118,897 priority patent/US20080309402A1/en
Priority to JP2008125107A priority patent/JP2008283855A/ja
Publication of EP1995818A1 publication Critical patent/EP1995818A1/de
Priority to US12/617,181 priority patent/US8786263B2/en
Priority to US14/325,499 priority patent/US9818579B2/en
Withdrawn legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055—Arc discharge
    • H01J37/32064—Circuits specially adapted for controlling the arc discharge
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M3/00—Conversion of dc power input into dc power output
    • H02M3/02—Conversion of dc power input into dc power output without intermediate conversion into ac
    • H02M3/04—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters
    • H02M3/06—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using resistors or capacitors, e.g. potential divider
    • H02M3/07—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using resistors or capacitors, e.g. potential divider using capacitors charged and discharged alternately by semiconductor devices with control electrode, e.g. charge pumps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32091—Radio frequency generated discharge the radio frequency energy being capacitively coupled to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/42—Methods or arrangements for servicing or maintenance of secondary cells or secondary half-cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/42—Methods or arrangements for servicing or maintenance of secondary cells or secondary half-cells
    • H01M10/425—Structural combination with electronic components, e.g. electronic circuits integrated to the outside of the casing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/42—Methods or arrangements for servicing or maintenance of secondary cells or secondary half-cells
    • H01M10/425—Structural combination with electronic components, e.g. electronic circuits integrated to the outside of the casing
    • H01M10/4264—Structural combination with electronic components, e.g. electronic circuits integrated to the outside of the casing with capacitors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/42—Methods or arrangements for servicing or maintenance of secondary cells or secondary half-cells
    • H01M10/44—Methods for charging or discharging
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M3/00—Conversion of dc power input into dc power output
    • H02M3/02—Conversion of dc power input into dc power output without intermediate conversion into ac
    • H02M3/04—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters
    • H02M3/10—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H02M3/145—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
    • H02M3/155—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/36—Circuit arrangements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10—Energy storage using batteries

Definitions

  • the present invention relates to a circuit configuration for reducing electrical energy stored in a lead inductance, said lead inductance being formed by a number of leads for connecting a power supply unit with a load, in particular a plasma application, said circuit configuration comprising a switching means in operative connection with one of the leads for enabling/interrupting power supply to the load, according to the preamble of claim 1.
  • the present invention also relates to a power supply apparatus for plasma applications, comprising a power supply unit; and outputs for supplying power from the power supply unit to a plasma application via a number of leads, according to the preamble of claim 12.
  • the present invention also relates to a method of reducing electrical energy stored in a lead inductance formed by a number of leads for connecting a direct current power supply unit with a load, in particular a plasma application, said method comprising interrupting power supply to the load by means of a switching means in operative connection with one of the leads, according to the preamble of claim 17.
  • the present invention relates to a method for arc extinction in plasma applications in connection with a direct current power supply, comprising monitoring an operational state of the plasma application with respect to an occurrence of plasma arcs; and interrupting power supply to the plasma application in response to a result of said monitoring, according to the preamble of claim 18.
  • a lead is meant to signify any electrical connection, such as a wire or the like, which can be associated with a non-negligible inductance value.
  • plasma arc discharges or plasma arcs may occur inside the plasma chamber and may cause unwanted results.
  • power supply to the plasma application is interrupted. However, it is essential not only to decouple the power supply from the plasma as soon as possible, but also to decrease the amount of energy which is subsequently delivered to the arc discharge from the lead inductance.
  • the object is achieved by providing a circuit configuration of the above-defined type, which further comprises a first electrical non-linear device arranged in parallel with the switching means; an energy storing device arranged in parallel with the switching means and in series with the first electrical non-linear device.
  • a non-linear device is a device where the current is not proportional to the voltage.
  • a typical non-linear device is an electrical valve means such as a diode.
  • An electrical switch such as a transistor, thyristor, or triac, as well as a varistor or an electromechanical or magnetical device with non-linear behavior can also be considered as an electrical valve means.
  • An energy storing device may be any device which is able to store energy.
  • Typical energy storing devices are capacitances, inductances, or arrangements containing both, at least one capacitance and at least one inductance.
  • the object is achieved by providing a power supply apparatus of the above-defined type, wherein the power supply apparatus further comprises the circuit configuration according to said first aspect of the invention.
  • the object is achieved by providing a method of reducing electrical energy stored in a lead inductance of the above-defined type, which further comprises the steps of: prior to interrupting the power supply, pre-charging an energy storing device arranged in parallel with the switching means to a pre-determined energy level; interrupting the power supply; and discharging electrical energy stored in the energy storing device prior to re-enabling the power supply.
  • the object is achieved by providing a method for arc extinction in plasma applications of the above-defined type, which comprises performing the method according to said third aspect of the present invention in connection with interrupting power supply to the plasma application.
  • circuit configuration, power supply apparatus, and methods according to the present invention ensure a significant reduction of the energy transferred from the lead inductance to the arc discharge without relying on any shortening of leads or cables. In this way, improved arc extinction and plasma application is enabled without placing constraints on the relative location of power supply unit and load.
  • a switching means located between the power supply unit and the load e.g., a plasma application
  • an energy storing device connected in parallel with said switching means is pre-charged to a required energy (voltage) level by means of a pre-charging circuit.
  • the latter can be devised as a voltage-controlled externally powered unit.
  • said switching means When an arc is detected in the plasma, i.e., when a load condition requires interruption of power supply together with a reduction of residual energy from the leads being delivered to the load, said switching means is opened so that an output current from the power supply unit flows along a bypass path comprising the energy storing device connected in series with an electrical non-linear device, e.g., a diode.
  • an electrical non-linear device e.g., a diode.
  • the inventive circuit configuration may be alternatively arranged so that said switching means are either arranged on a positive side of the power supply unit or on a negative side of the power supply unit.
  • the pre-charging circuit and the discharging circuit may be integrated in a common circuit entity.
  • the pre-charging circuit and the discharging circuit may be devised as separate circuits.
  • the discharging circuit may comprise an electrical non-linear device (e.g., a diode) and a resistive element (discharge resistor) connected in parallel.
  • any one of said elements may advantageously be equipped with a heat sink structure in order to efficiently dissipate excess heat.
  • Any diodes used in connection with the present invention may alternatively be devised as controlled metal oxide semiconductor field effect transistors (MOSFETs).
  • MOSFETs controlled metal oxide semiconductor field effect transistors
  • a preferred embodiment of the method according to said forth aspect of the present invention comprises applying an adjustable blocking time after interrupting power supply to the plasma application. During said blocking time, any further interruption of power supply to the plasma application is inhibited. In other words, a subsequent plasma arc extinction will only be enabled after said blocking time has ended. Additionally, this feature also enables "swapping" of charges in the pre-charging/discharging circuits.
  • the power supply apparatus may further comprise an antiparallel connected second circuit configuration of the type mentioned above.
  • the power unit may either be a direct current .power supply or an alternate current power supply.
  • Fig. 1 shows is a circuit diagram of an embodiment of a power supply apparatus in accordance with the present invention, comprising a first embodiment of the circuit configuration in accordance with the present invention.
  • Power supply apparatus 1 is connected with a plasma application 2, e.g., in the form of a plasma device or plasma chamber, by means of leads 3.1, 3.2, which are connected to respective outputs 4.1, 4.2 of power supply apparatus 1.
  • Lead inductance L may store electrical energy during operation of power supply apparatus 1, i.e., during operation of plasma application 2.
  • Output 4.1 of power supply apparatus 1 is connected with a positive pole (+) of direct current (DC) power supply unit (generator) 5 comprised in power supply apparatus 1.
  • output 4.2 of power supply apparatus 1 is connected with a negative pole (-) of DC power supply unit 5.
  • An electrical non-linear device in form of a freewheeling diode D1 is coupled in reverse bias across the positive and negative poles of power supply unit 5.
  • a switching means SS in the form of a serial switch, a suitable design of which is known to a person skilled in the art.
  • serial switch SS could be devised in the form of an IGBT (insulated-gate bipolar transistor or a MOSFET). This switch is a switch which can be switched on and off at a given time.
  • IGBT insulated-gate bipolar transistor or a MOSFET
  • Diode D2 is connected in series with a capacitor C, so that both diode D2 and capacitor C are arranged in parallel with serial switch SS, wherein the cathode of diode D2 faces the capacitor C. In this way, diode D2 and capacitor C effectively form a bypass for serial switch SS.
  • Anode-side connecting node 6 of diode D1 is located between said bypass and the negative pole (-) of power supply unit 5.
  • a pre-charging/discharging circuit 7 is coupled across terminals of capacitor C.
  • Pre-charging/discharging circuit 7 is preferably devised as a voltage-controlled, externally powered unit.
  • Pre-charging/discharging circuit 7 comprises a voltage source (not shown) for charging capacitor C to a pre-determined and adjustable voltage level.
  • pre-charging/discharging circuit 7 presents positive and negative poles (+/-), wherein the positive pole (+) of pre-charging/discharging circuit 7 is connected between capacitor C and the cathode of diode D2, whereas the negative pole (-) of pre-charging/discharging circuit 7 is connected between capacitor C and serial switch SS, i.e., between capacitor C and anode-side connecting node 6 of diode D1.
  • diode D2 is arranged in reverse bias with respect to the pre-charging potential of pre-charging/discharging circuit 7 and is adapted to block a pre-charging current from the pre-charging circuit for charging capacitor C.
  • Capacitor C could be replaced by any sort of energy storing device.
  • the pre-charging/discharging circuit 7 is preferably devised as a current-controlled, externally powered unit.
  • power supply apparatus 1 further comprises a monitoring/control unit 8, a function of which will be explained in detail further below.
  • monitoring/control unit 8 could in principle be devised in the form of a separate entity with respect to power supply apparatus 1.
  • Monitoring/control unit 8 is operatively connected with serial switch SS, pre-charging/discharging circuit 7, power supply unit 5, and plasma application 2.
  • monitoring/control unit 8 is devised as a plasma arc detection/extinction unit, and is adapted for monitoring an operational state of plasma application 2 for detecting occurrences of plasma arcs in order to control operation of serial switch SS and/or pre-charging/discharging circuit 7 in response to said monitoring of plasma application 2.
  • the monitoring/control unit 8 may be adapted to detect plasma arcs directly by monitoring plasma application 2, i.e., from plasma parameters. It may alternatively or additionally be adapted to do so indirectly by monitoring operational parameters of power supply unit 5, e.g., output voltage and/or output current of power supply unit 5.
  • extinction of detected plasma arcs is generally accomplished by interrupting power supply to plasma application 2 by way of opening serial switch SS under control of monitoring/control unit 8. Further to this, the embodiment of Fig. 1 ensures lead inductance energy reduction to enable fast arc extinction in plasma applications.
  • serial switch SS Under normal operating conditions, i.e., with no arcs detected in plasma application 2, serial switch SS is closed, and the pre-charging/discharging circuit 7 pre-charges capacitor C to said pre-determined voltage level.
  • serial switch SS When a plasma arc is detected by monitoring/control unit 8, serial switch SS is opened under control of monitoring/control unit 8, thus forcing an output current of power supply apparatus 1, which will generally be increased due to the occurrence of a plasma arc, to flow through diode D2 against the initial pre-charged voltage of capacitor C and then further through freewheeling diode D1 via connecting node 6. In this way, diode D2 effectively functions as a bypass diode for opened serial switch SS.
  • monitoring/control unit 8 may comprise an additional function 8a, which provides an adjustable blocking time, i.e., a corresponding control signal (not shown) for controlling serial switch SS, during which a further interruption of power supply to plasma application 2 is inhibited.
  • blocking time function 8a will ensure that serial switch SS cannot be opened again during said blocking time - if it has been closed in the meantime in order to re-establish power supply to plasma application 2. This is to adjustably set a low arc detection rate, which may be important in order to allow pre-charging/discharging circuit to swap charges and to avoid excessive heating of serial switch SS.
  • serial switch SS may advantageously be equipped with a heat sink structure for dissipating excess heat, which is not shown in Fig. 1 .
  • serial switch SS, bypass diode D2, capacitor C, and pre-charging/discharging circuit 7 together with freewheeling diode D1 effectively constitute a circuit configuration 9 for reducing electrical energy stored in lead inductance L formed by leads L1, L2.
  • Said circuit configuration 9 has been highlighted by means of dashed box in Fig. 1 .
  • Both diodes D1 and D2 could be replaced by switches which may be controlled by monitoring/control unit 8.
  • this circuit arrangement consisting of at least two antiparallel circuit configurations 9 is also applicable to a system with a power supply unit 5 which feeds AC energy into the plasma application 2.
  • Fig. 2 shows a circuit diagram of an embodiment of a power supply apparatus in accordance with the present invention, comprising a second embodiment of the circuit configuration in accordance with the present invention.
  • power supply apparatus of Fig. 2 is generally similar to that of Fig. 1 , which has been described in detail above, so that the following description will focus on differences between the embodiments of Fig. 1 and Fig. 2 only. It should also be noted that in Fig. 2 monitoring/control unit 8 has been omitted for mere reason of clarity.
  • the power supply apparatus 1 comprises distinct pre-charging and discharging circuits 7.1, 7.2, respectively.
  • Charging circuit 7.1 is formed by an electrical non-linear device in the form of a diode D3 connected between the positive pole (+) of power supply unit 5 and node 10, which is located between capacitor C/cathode of diode D3 and the cathode of bypass diode D2.
  • Discharging circuit 7.2 is formed by a resistive element in the form of discharge resistor R connected between output 4.1 of power supply apparatus 1 and node 11, which is located between node 10 and the cathode of bypass diode D2.
  • discharging circuit 7.2 comprises a discharge switching means DS coupled across the positive and negative poles (+/-) of power supply unit 5 in parallel with freewheeling diode D1.
  • Diodes D2 and D3 are arranged with opposite blocking directions, i.e., they are connected in cathode-to-cathode type fashion.
  • any one of electrical non-linear device D1-D3 could alternatively be devised in the form of a suitably controlled MOSFET, controlling of which could also be provided by monitoring/control unit 8 ( Fig. 1 ).
  • Fig. 3 shows a circuit diagram of an embodiment of a power supply apparatus in accordance with the present invention, comprising a third embodiment of the circuit configuration in accordance with the present invention.
  • power supply apparatus 1 of Fig. 3 generally corresponds to that of Fig. 1 so that only differences between these two embodiments will be explained here in detail.
  • monitoring/control unit 8 has been omitted for reason of clarity only.
  • serial switch SS is arranged on the positive side of power supply unit 5, i.e., is directly connected with the positive pole (+) of the latter. Consequently, configuration of the bypass path comprising bypass diode D2, capacitor C, and integrated pre-charging/discharging circuit 7 has been modified accordingly. It should be noted that bypass diode D2 is now connected with capacitor 10 by means of its anode instead of being connected to capacitor C via its cathode, as in Fig. 1 .
  • Fig. 4 shows a circuit diagram of an embodiment of a power supply apparatus in accordance with the present invention, comprising a forth embodiment of the circuit configuration in accordance with the present invention.
  • power supply apparatus 1 according to the embodiment of Fig. 4 is a variation of the embodiment that was previously described in detail with reference to appended Fig. 2 .
  • serial switch SS is located on the positive side (+) of power supply unit 5 in the embodiment of Fig. 4 . This implies re-arranging capacitor C and bypass diode D2 with respect to the embodiment of Fig. 2 , as previously described with reference to Fig. 3 .
  • Charging diode D3 is now connected between the negative pole (-) of power supply unit 5 and node 10', which is located between the anode of charging diode D3 and capacitor C.
  • Discharge resistor R is connected in parallel with charging diode D3, so that one terminal of discharge resistor R is connected with the negative pole (-) of power supply unit 5 while the other terminal of discharge resistor R is connected with node 11' located between node 10' and the anode of bypass diode D2.
  • Diodes D2, D3 are connected in anode-to-anode type fashion, i.e., with opposite blocking directions. While charging diode D3 of Fig. 4 effectively forms pre-charging circuit 7.1', switching means DS and resistor R effectively form discharging circuit 7.2'.
  • discharge resistors R of Fig. 2 and Fig. 4 may dissipate a considerable amount of heat during operation of power supply apparatus 1. Therefore, discharge resistors R, too, could be advantageously equipped with heat sink structures (not shown) in order to efficiently dissipate excess heat.
  • Fig. 5 shows a flow chart for illustrating an embodiment of a method for arc extinction in plasma applications in accordance with the present invention, comprising an embodiment of a method of reducing electrical energy in accordance with the present invention.
  • the method starts with step S100. Initially assuming normal operation of the power supply apparatus, i.e., no arc discharges detected in the plasma application, temporal blocking of power supply interruption is deactivated.
  • step S102 energy storing device (capacitor C) is (pre-)charged, as previously described.
  • step S104 an operating state of plasma application is monitored, e.g., by means of monitoring/control unit 8 ( Fig. 1 ), as previously described.
  • steps S102 and S104 may be performed quasi simultaneously.
  • step S106 it is decided whether or not an arc discharge has been detected. If the question in step S106 ("arc detected?") is answered in the affirmative (y), in subsequent step S108 it is checked whether or not temporal blocking of power supply interruption has been deactivated or not. Assuming a deactivated state of temporal blocking, the question in step S108 ("temporal blocking of power supply interruption deactivated?") is answered in the affirmative (y) so that in subsequent step S110 serial switch SS is opened, thus interrupting power supply to the plasma application for arc extinction. Furthermore, residual electrical energy stored in the lead inductances is transferred to energy storing device (capacitor C), as previously described.
  • energy storing device capacitor C
  • step S114 temporal blocking of power supply interruption to plasma application is activated.
  • step S116 serial switch SS is closed, thus re-establishing power supply to the plasma application.
  • step S114 could alternatively be performed before step S112 or after step S116.
  • the method returns to step S104, i.e., an operational state of the plasma application is repeatedly monitored.
  • step S116 the method terminates with step S118.
  • the method will return to step S102. It may now be assumed that the question in step S108 ("temporal blocking of power supply interruption deactivated?") will be answered in the negative (n), owing to performing step S114. In this case, from step S108 the method will return to step S104.

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  • Spectroscopy & Molecular Physics (AREA)
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EP07009567A 2007-05-12 2007-05-12 Schaltung und Verfahren zur Reduzierung der in einer Zuleitungsinduktivität gespeicherten elektrischen Energie zur schnellen Plasmalichtbogenlöschung Withdrawn EP1995818A1 (de)

Priority Applications (12)

Application Number Priority Date Filing Date Title
EP07009567A EP1995818A1 (de) 2007-05-12 2007-05-12 Schaltung und Verfahren zur Reduzierung der in einer Zuleitungsinduktivität gespeicherten elektrischen Energie zur schnellen Plasmalichtbogenlöschung
JP2010507834A JP5096564B2 (ja) 2007-05-12 2008-05-09 プラズマアークの急速消弧のためのリードインダクタンスに蓄積されている電気エネルギーの低減のための回路及び方法
DE602008006070T DE602008006070D1 (de) 2007-05-12 2008-05-09 Schaltung und verfahren zur reduzierung der in einer zuleitungsinduktivität gespeicherten elektrischen energie zur schnellen plasmalichtbogenlöschung
AT08758454T ATE504956T1 (de) 2007-05-12 2008-05-09 Schaltung und verfahren zur reduzierung der in einer zuleitungsinduktivität gespeicherten elektrischen energie zur schnellen plasmalichtbogenlöschung
PCT/EP2008/003780 WO2008138573A1 (en) 2007-05-12 2008-05-09 Circuit and method for reducing electrical energy stored in a lead inductance for fast extinction of plasma arcs
KR1020080043324A KR101412736B1 (ko) 2007-05-12 2008-05-09 플라즈마 아크의 신속한 소멸을 위하여 도선 인덕턴스에 저장된 전기 에너지를 감소시키는 회로 및 방법
CN2008800157782A CN101682090B (zh) 2007-05-12 2008-05-09 用于快速消除等离子弧的减少引线电感中存储的电能的电路和方法
EP08758454A EP2156505B1 (de) 2007-05-12 2008-05-09 Schaltung und verfahren zur reduzierung der in einer zuleitungsinduktivität gespeicherten elektrischen energie zur schnellen plasmalichtbogenlöschung
US12/118,897 US20080309402A1 (en) 2007-05-12 2008-05-12 Extinction of plasma arcs
JP2008125107A JP2008283855A (ja) 2007-05-12 2008-05-12 プラズマアークの急速消弧のためのリードインダクタンスに蓄積されている電気エネルギーの低減のための回路及び方法
US12/617,181 US8786263B2 (en) 2007-05-12 2009-11-12 Reducing stored electrical energy in a lead inductance
US14/325,499 US9818579B2 (en) 2007-05-12 2014-07-08 Reducing stored electrical energy in a lead inductance

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KR101412736B1 (ko) 2014-07-01
JP2010528405A (ja) 2010-08-19
WO2008138573A1 (en) 2008-11-20
EP2156505B1 (de) 2011-04-06
JP2008283855A (ja) 2008-11-20
CN101682090B (zh) 2012-10-24
EP2156505A1 (de) 2010-02-24
US20080309402A1 (en) 2008-12-18
DE602008006070D1 (de) 2011-05-19
US9818579B2 (en) 2017-11-14
US8786263B2 (en) 2014-07-22
CN101682090A (zh) 2010-03-24
US20100213903A1 (en) 2010-08-26
JP5096564B2 (ja) 2012-12-12
ATE504956T1 (de) 2011-04-15
US20140320015A1 (en) 2014-10-30

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