ATE504956T1 - Schaltung und verfahren zur reduzierung der in einer zuleitungsinduktivität gespeicherten elektrischen energie zur schnellen plasmalichtbogenlöschung - Google Patents

Schaltung und verfahren zur reduzierung der in einer zuleitungsinduktivität gespeicherten elektrischen energie zur schnellen plasmalichtbogenlöschung

Info

Publication number
ATE504956T1
ATE504956T1 AT08758454T AT08758454T ATE504956T1 AT E504956 T1 ATE504956 T1 AT E504956T1 AT 08758454 T AT08758454 T AT 08758454T AT 08758454 T AT08758454 T AT 08758454T AT E504956 T1 ATE504956 T1 AT E504956T1
Authority
AT
Austria
Prior art keywords
circuit
reducing
energy stored
lead
electrical energy
Prior art date
Application number
AT08758454T
Other languages
English (en)
Inventor
Pawel Ozimek
Rafal Bugyi
Robert Dziuba
Andrzej Klimczak
Marcin Zelechowski
Original Assignee
Huettinger Electronic Sp Z O O
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Huettinger Electronic Sp Z O O filed Critical Huettinger Electronic Sp Z O O
Application granted granted Critical
Publication of ATE504956T1 publication Critical patent/ATE504956T1/de

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M3/00—Conversion of dc power input into dc power output
    • H02M3/02—Conversion of dc power input into dc power output without intermediate conversion into ac
    • H02M3/04—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters
    • H02M3/06—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using resistors or capacitors, e.g. potential divider
    • H02M3/07—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using resistors or capacitors, e.g. potential divider using capacitors charged and discharged alternately by semiconductor devices with control electrode, e.g. charge pumps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055—Arc discharge
    • H01J37/32064—Circuits specially adapted for controlling the arc discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32091—Radio frequency generated discharge the radio frequency energy being capacitively coupled to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/42—Methods or arrangements for servicing or maintenance of secondary cells or secondary half-cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/42—Methods or arrangements for servicing or maintenance of secondary cells or secondary half-cells
    • H01M10/425—Structural combination with electronic components, e.g. electronic circuits integrated to the outside of the casing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/42—Methods or arrangements for servicing or maintenance of secondary cells or secondary half-cells
    • H01M10/425—Structural combination with electronic components, e.g. electronic circuits integrated to the outside of the casing
    • H01M10/4264—Structural combination with electronic components, e.g. electronic circuits integrated to the outside of the casing with capacitors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/42—Methods or arrangements for servicing or maintenance of secondary cells or secondary half-cells
    • H01M10/44—Methods for charging or discharging
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M3/00—Conversion of dc power input into dc power output
    • H02M3/02—Conversion of dc power input into dc power output without intermediate conversion into ac
    • H02M3/04—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters
    • H02M3/10—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H02M3/145—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
    • H02M3/155—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/36—Circuit arrangements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10—Energy storage using batteries

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Power Engineering (AREA)
  • Plasma Technology (AREA)
  • Charge And Discharge Circuits For Batteries Or The Like (AREA)
  • Generation Of Surge Voltage And Current (AREA)
  • Dc-Dc Converters (AREA)
  • Discharge Heating (AREA)
  • Keying Circuit Devices (AREA)
AT08758454T 2007-05-12 2008-05-09 Schaltung und verfahren zur reduzierung der in einer zuleitungsinduktivität gespeicherten elektrischen energie zur schnellen plasmalichtbogenlöschung ATE504956T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP07009567A EP1995818A1 (de) 2007-05-12 2007-05-12 Schaltung und Verfahren zur Reduzierung der in einer Zuleitungsinduktivität gespeicherten elektrischen Energie zur schnellen Plasmalichtbogenlöschung
PCT/EP2008/003780 WO2008138573A1 (en) 2007-05-12 2008-05-09 Circuit and method for reducing electrical energy stored in a lead inductance for fast extinction of plasma arcs

Publications (1)

Publication Number Publication Date
ATE504956T1 true ATE504956T1 (de) 2011-04-15

Family

ID=38523403

Family Applications (1)

Application Number Title Priority Date Filing Date
AT08758454T ATE504956T1 (de) 2007-05-12 2008-05-09 Schaltung und verfahren zur reduzierung der in einer zuleitungsinduktivität gespeicherten elektrischen energie zur schnellen plasmalichtbogenlöschung

Country Status (8)

Country Link
US (3) US20080309402A1 (de)
EP (2) EP1995818A1 (de)
JP (2) JP5096564B2 (de)
KR (1) KR101412736B1 (de)
CN (1) CN101682090B (de)
AT (1) ATE504956T1 (de)
DE (1) DE602008006070D1 (de)
WO (1) WO2008138573A1 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8217299B2 (en) * 2007-02-22 2012-07-10 Advanced Energy Industries, Inc. Arc recovery without over-voltage for plasma chamber power supplies using a shunt switch
EP1995818A1 (de) * 2007-05-12 2008-11-26 Huettinger Electronic Sp. z o. o Schaltung und Verfahren zur Reduzierung der in einer Zuleitungsinduktivität gespeicherten elektrischen Energie zur schnellen Plasmalichtbogenlöschung
US8395078B2 (en) 2008-12-05 2013-03-12 Advanced Energy Industries, Inc Arc recovery with over-voltage protection for plasma-chamber power supplies
EP2219205B1 (de) 2009-02-17 2014-06-04 Solvix GmbH Energieversorgungsvorrichtung zur Plasmaverarbeitung
DE102010031568B4 (de) 2010-07-20 2014-12-11 TRUMPF Hüttinger GmbH + Co. KG Arclöschanordnung und Verfahren zum Löschen von Arcs
US8552665B2 (en) 2010-08-20 2013-10-08 Advanced Energy Industries, Inc. Proactive arc management of a plasma load
CN104362593A (zh) * 2014-10-10 2015-02-18 湖南红太阳光电科技有限公司 一种直流磁控溅射镀膜电源快速灭弧电路
EP3035365A1 (de) 2014-12-19 2016-06-22 TRUMPF Huettinger Sp. Z o. o. Verfahren zur Erfassung eines Lichtbogens während der Energieversorgung eines Plasmaverfahrens, Steuereinheit für eine Plasma-Energieversorgung und Plasma-Energieversorgung
EP3054472A1 (de) * 2015-02-03 2016-08-10 TRUMPF Huettinger Sp. Z o. o. Lichtbogenbehandlungsvorrichtung und Verfahren dazu
US10300791B2 (en) * 2015-12-18 2019-05-28 Ge Global Sourcing Llc Trolley interfacing device having a pre-charging unit
GB201610901D0 (en) * 2016-06-22 2016-08-03 Eaton Ind Austria Gmbh Hybrid DC circuit breaker
EP3379672A1 (de) * 2017-03-23 2018-09-26 Siemens Aktiengesellschaft Effiziente vorladung von abschnitten eines gleichspannungsnetzes
KR101965681B1 (ko) * 2017-05-17 2019-04-04 파워소프트 주식회사 아크 저감 장치 및 이를 포함하는 플라즈마 전원 장치
US11183844B2 (en) * 2018-06-14 2021-11-23 Arm Limited Supplying energy to an apparatus
JP7161357B2 (ja) * 2018-09-26 2022-10-26 Fdk株式会社 電池ユニット、蓄電システム、及び電池ユニットの充放電方法
WO2024015158A1 (en) * 2022-07-14 2024-01-18 Lam Research Corporation Metal-oxide varistor (mov) based surge protection circuit for plasma processing chamber

Family Cites Families (44)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3867669A (en) * 1974-01-11 1975-02-18 Yakov Lvovich Krasik Power source with a sparkproof output
DE3010099A1 (de) * 1980-02-25 1981-09-03 BBC AG Brown, Boveri & Cie., Baden, Aargau Elektronische schutzschaltung
US4459629A (en) * 1981-11-23 1984-07-10 General Electric Company Electric circuit breaker utilizing semiconductor diodes for facilitating interruption
DE3514690A1 (de) 1985-04-24 1986-10-30 Aeg-Elotherm Gmbh, 5630 Remscheid Gleichspannungsquelle fuer anlagen zur oberflaechenbearbeitung von werkstuecken, insbesondere fuer eine ionitrierhaertanlage
DE3538494A1 (de) 1985-10-30 1987-05-07 Boehringer Andreas Aus einer gleichspannungsquelle gespeiste elektrische schaltungsanordnung zur versorgung eines verbraucherzweipols mit eingepraegtem, jedoch unterbrechbarem gleichstrom oder eingepraegtem, jedoch unterbrechbarem, blockfoermigem wechselstrom mit einstellbarer begrenzung der spannungen am verbraucherzweipol und an den verwendeten elektronischen einwegschaltern
DE3706153A1 (de) * 1987-02-26 1988-09-08 Roewac Elektrotechnische Fabri Elektrische sicherheitsschaltung fuer plasma-schneidanlagen
US5241152A (en) * 1990-03-23 1993-08-31 Anderson Glen L Circuit for detecting and diverting an electrical arc in a glow discharge apparatus
DE9109503U1 (de) * 1991-07-31 1991-10-17 Magtron Magneto Elektronische Geraete Gmbh, 7583 Ottersweier, De
DE4127504A1 (de) * 1991-08-20 1993-02-25 Leybold Ag Einrichtung zur unterdrueckung von lichtboegen
CH689767A5 (de) 1992-03-24 1999-10-15 Balzers Hochvakuum Verfahren zur Werkstueckbehandlung in einer Vakuumatmosphaere und Vakuumbehandlungsanlage.
WO1994008067A1 (en) * 1992-09-30 1994-04-14 Advanced Energy Industries, Inc. Topographically precise thin film coating system
DE4239218C2 (de) 1992-11-21 2000-08-10 Leybold Ag Anordnung zum Verhindern von Überschlägen in einem Plasma-Prozeßraum
US5427669A (en) * 1992-12-30 1995-06-27 Advanced Energy Industries, Inc. Thin film DC plasma processing system
US5718813A (en) * 1992-12-30 1998-02-17 Advanced Energy Industries, Inc. Enhanced reactive DC sputtering system
US5651865A (en) * 1994-06-17 1997-07-29 Eni Preferential sputtering of insulators from conductive targets
FR2728408B1 (fr) * 1994-12-20 1997-01-31 Alsthom Cge Alcatel Dispositif d'alimentation electrique notamment pour appareils portatifs
US5535906A (en) * 1995-01-30 1996-07-16 Advanced Energy Industries, Inc. Multi-phase DC plasma processing system
JP2733454B2 (ja) 1995-02-16 1998-03-30 株式会社京三製作所 成膜装置用異常放電抑制装置
US5584974A (en) * 1995-10-20 1996-12-17 Eni Arc control and switching element protection for pulsed dc cathode sputtering power supply
US5882492A (en) 1996-06-21 1999-03-16 Sierra Applied Sciences, Inc. A.C. plasma processing system
US5682067A (en) * 1996-06-21 1997-10-28 Sierra Applied Sciences, Inc. Circuit for reversing polarity on electrodes
ATE468420T1 (de) 1997-02-20 2010-06-15 Shibaura Mechatronics Corp Stromversorgungseinheit für sputtervorrichtung
US6104967A (en) 1997-07-25 2000-08-15 3M Innovative Properties Company Fault-tolerant battery system employing intra-battery network architecture
US6043636A (en) * 1997-10-20 2000-03-28 Diversified Technologies, Inc. Voltage transient suppression
US5889391A (en) * 1997-11-07 1999-03-30 Sierra Applied Sciences, Inc. Power supply having combined regulator and pulsing circuits
JPH11178333A (ja) * 1997-12-15 1999-07-02 Sansha Electric Mfg Co Ltd 直流電源装置
DE19937859C2 (de) * 1999-08-13 2003-06-18 Huettinger Elektronik Gmbh Elektrische Versorgungseinheit für Plasmaanlagen
DE10015244C2 (de) * 2000-03-28 2002-09-19 Fraunhofer Ges Forschung Verfahren und Schaltungsanordnung zur pulsförmigen Energieeinspeisung in Magnetronentladungen
EP1434336A4 (de) * 2001-09-28 2008-10-08 Shibaura Mechatronics Corp Stromversorgung für das sputtern
AUPR967301A0 (en) * 2001-12-21 2002-01-24 Energy Storage Systems Pty Ltd A control circuit
JP4100938B2 (ja) 2002-03-14 2008-06-11 芝浦メカトロニクス株式会社 アーク遮断回路、スパッタ用電源及びスパッタ装置
JP2005537776A (ja) * 2002-08-29 2005-12-08 エナジィ・ストーリッジ・システムズ・プロプライエタリー・リミテッド 予め定められた期間中に高電力を必要とする通信モジュールのための電源
AU2002951291A0 (en) * 2002-09-09 2002-09-19 Energy Storage Systems Pty Ltd A power supply
US6808607B2 (en) * 2002-09-25 2004-10-26 Advanced Energy Industries, Inc. High peak power plasma pulsed supply with arc handling
JP2004194420A (ja) 2002-12-11 2004-07-08 Shibaura Mechatronics Corp 電源、電源システム、スパッタリング用電源及びスパッタリング装置
US6876205B2 (en) * 2003-06-06 2005-04-05 Advanced Energy Industries, Inc. Stored energy arc detection and arc reduction circuit
US6967305B2 (en) * 2003-08-18 2005-11-22 Mks Instruments, Inc. Control of plasma transitions in sputter processing systems
US6943317B1 (en) * 2004-07-02 2005-09-13 Advanced Energy Industries, Inc. Apparatus and method for fast arc extinction with early shunting of arc current in plasma
JP4597886B2 (ja) 2005-02-24 2010-12-15 イーエヌ テクノロジー インコーポレイテッド プラズマ電源装置用アークエネルギー制御回路
JP5057731B2 (ja) * 2005-09-16 2012-10-24 株式会社半導体エネルギー研究所 表示装置、モジュール、及び電子機器
TWI332742B (en) * 2006-04-21 2010-11-01 Delta Electronics Inc Uninterruptible power supply capable of providing sinusoidal-wave ouput ac voltage and method thereof
TWI309498B (en) * 2006-06-09 2009-05-01 Delta Electronics Inc Resonant converter and voltage stabilizing method thereof
US7514935B2 (en) 2006-09-13 2009-04-07 Advanced Energy Industries, Inc. System and method for managing power supplied to a plasma chamber
EP1995818A1 (de) * 2007-05-12 2008-11-26 Huettinger Electronic Sp. z o. o Schaltung und Verfahren zur Reduzierung der in einer Zuleitungsinduktivität gespeicherten elektrischen Energie zur schnellen Plasmalichtbogenlöschung

Also Published As

Publication number Publication date
JP2008283855A (ja) 2008-11-20
US20100213903A1 (en) 2010-08-26
DE602008006070D1 (de) 2011-05-19
KR101412736B1 (ko) 2014-07-01
CN101682090A (zh) 2010-03-24
JP2010528405A (ja) 2010-08-19
US8786263B2 (en) 2014-07-22
US9818579B2 (en) 2017-11-14
KR20080100300A (ko) 2008-11-17
EP1995818A1 (de) 2008-11-26
US20080309402A1 (en) 2008-12-18
US20140320015A1 (en) 2014-10-30
JP5096564B2 (ja) 2012-12-12
EP2156505A1 (de) 2010-02-24
WO2008138573A1 (en) 2008-11-20
CN101682090B (zh) 2012-10-24
EP2156505B1 (de) 2011-04-06

Similar Documents

Publication Publication Date Title
ATE504956T1 (de) Schaltung und verfahren zur reduzierung der in einer zuleitungsinduktivität gespeicherten elektrischen energie zur schnellen plasmalichtbogenlöschung
MX2010006973A (es) Suministro de potencia para un dispositivo de control de carga.
WO2011095212A3 (en) Switching module to limit and/or break the current of an electric power line
ATE523950T1 (de) Vorrichtung zum umrichten eines elektrischen stromes
TN2012000201A1 (en) Device and method to break the current of a power transmission or distribution line and current limiting arrangement
WO2009010025A8 (de) Vorrichtung zur einspeisung elektrischer energie in ein energieversorgungsnetz und gleichspannungswandler für eine solche vorrichtung
JP2011223854A5 (de)
CL2012000408A1 (es) Una instalacion electrica para cargar vehiculos electricos que contienen: una instalacion de energia eolica y un aparato de carga (1) y un dispositivo de almacenamiento electrico (28) conectado al aparato de carga (1); y metodo asociado.
CN107834526B (zh) 一种混合式直流固态断路器及其控制方法
CN104917164B (zh) 一种驱动保护电路
BRPI0916236A2 (pt) conjunto de acionadores e de um sistema de alimentação elétrica dos acionadores a partir de uma rede de corrente elétrica alternada trifásica
MY155813A (en) Ac vontage reduction by means of a transformer
CN103401468B (zh) 一种等离子体起弧电路
CN202135057U (zh) 一种半桥三电平直流变换器
GB2484737B (en) Power controller system
ATE553633T1 (de) Schaltungsanordnung zum erzeugen einer hilfsspannung und zum betreiben mindestens einer entladungslampe
WO2008092870A3 (en) Apparatus comprising low voltage power source
CN202043053U (zh) 一种带有欠压保护功能的开关电源
PL2259949T3 (pl) System magazynowania energii dla pojazdu szynowego
CN203166587U (zh) 太阳能储能电源系统
CN105225895B (zh) 一种智能型直流接触器
CN207426665U (zh) 电流互感器及其二次侧限压保护装置
CN203747638U (zh) 工频变压器冲击电流抑制电路、工频变压器及其本安电源
CN203800685U (zh) 微机保护装置的电源模块
CN203933374U (zh) 一种用于手持设备的漏感能量缓冲及回收电路

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties