ATE547804T1 - Stromänderungsbegrenzungsvorrichtung - Google Patents

Stromänderungsbegrenzungsvorrichtung

Info

Publication number
ATE547804T1
ATE547804T1 AT07025085T AT07025085T ATE547804T1 AT E547804 T1 ATE547804 T1 AT E547804T1 AT 07025085 T AT07025085 T AT 07025085T AT 07025085 T AT07025085 T AT 07025085T AT E547804 T1 ATE547804 T1 AT E547804T1
Authority
AT
Austria
Prior art keywords
current
limiting device
current change
change limiting
power supply
Prior art date
Application number
AT07025085T
Other languages
English (en)
Inventor
Andrzej Klimczak
Rafal Bugyi
Pawel Ozimek
Original Assignee
Huettinger Electronic Sp Z O O
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Huettinger Electronic Sp Z O O filed Critical Huettinger Electronic Sp Z O O
Application granted granted Critical
Publication of ATE547804T1 publication Critical patent/ATE547804T1/de

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02H—EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS
    • H02H9/00—Emergency protective circuit arrangements for limiting excess current or voltage without disconnection
    • H02H9/02—Emergency protective circuit arrangements for limiting excess current or voltage without disconnection responsive to excess current
    • H02H9/021—Current limitation using saturable reactors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3444—Associated circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3464—Operating strategies
    • H01J37/3467—Pulsed operation, e.g. HIPIMS

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Power Engineering (AREA)
  • Plasma Technology (AREA)
  • Emergency Protection Circuit Devices (AREA)
AT07025085T 2007-12-24 2007-12-24 Stromänderungsbegrenzungsvorrichtung ATE547804T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP07025085A EP2075823B1 (de) 2007-12-24 2007-12-24 Stromänderungsbegrenzungsvorrichtung

Publications (1)

Publication Number Publication Date
ATE547804T1 true ATE547804T1 (de) 2012-03-15

Family

ID=39383770

Family Applications (1)

Application Number Title Priority Date Filing Date
AT07025085T ATE547804T1 (de) 2007-12-24 2007-12-24 Stromänderungsbegrenzungsvorrichtung

Country Status (5)

Country Link
US (1) US8981664B2 (de)
EP (1) EP2075823B1 (de)
JP (1) JP5558705B2 (de)
AT (1) ATE547804T1 (de)
CA (1) CA2646522C (de)

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US8440061B2 (en) * 2009-07-20 2013-05-14 Lam Research Corporation System and method for plasma arc detection, isolation and prevention
DE102010031568B4 (de) 2010-07-20 2014-12-11 TRUMPF Hüttinger GmbH + Co. KG Arclöschanordnung und Verfahren zum Löschen von Arcs
DE102011112434A1 (de) * 2011-01-05 2012-07-05 Oerlikon Trading Ag, Trübbach Blitzdetektion in Beschichtungsanlagen
DE202011109467U1 (de) 2011-12-22 2012-02-03 Hüttinger Elektronik Gmbh + Co. Kg Plasmastromversorungssystem
KR101303040B1 (ko) * 2012-02-28 2013-09-03 주식회사 뉴파워 프라즈마 플라즈마 챔버의 아크 검출 방법 및 장치
US10993293B2 (en) * 2013-12-23 2021-04-27 Whirlpool Corporation Interrupting circuit for a radio frequency generator
CN108292582B (zh) * 2015-12-04 2020-04-28 应用材料公司 用于等离子体处理的发弧检测设备
KR101995684B1 (ko) * 2016-09-30 2019-07-02 가부시키가이샤 알박 전원 장치
EP3605115A1 (de) 2018-08-02 2020-02-05 TRUMPF Huettinger Sp. Z o. o. Lichtbogendetektor zur detektion von lichtbögen, plasmasystem und verfahren zur detektion von lichtbögen
DE102019204818A1 (de) * 2019-04-04 2020-10-08 Robert Bosch Gmbh Verfahren zur Überwachung eines plasmagestützten Prozesses zur Beschichtung eines Bauteils und Vorrichtung zur Beschichtung eines Bauteils

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Also Published As

Publication number Publication date
JP5558705B2 (ja) 2014-07-23
US8981664B2 (en) 2015-03-17
EP2075823A1 (de) 2009-07-01
JP2009176726A (ja) 2009-08-06
US20090160417A1 (en) 2009-06-25
EP2075823B1 (de) 2012-02-29
CA2646522C (en) 2016-04-12
CA2646522A1 (en) 2009-06-24

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