DE69427556T2 - Drain/Source-Kontakt für Dünnfilmtransistor - Google Patents
Drain/Source-Kontakt für DünnfilmtransistorInfo
- Publication number
- DE69427556T2 DE69427556T2 DE69427556T DE69427556T DE69427556T2 DE 69427556 T2 DE69427556 T2 DE 69427556T2 DE 69427556 T DE69427556 T DE 69427556T DE 69427556 T DE69427556 T DE 69427556T DE 69427556 T2 DE69427556 T2 DE 69427556T2
- Authority
- DE
- Germany
- Prior art keywords
- drain
- thin film
- film transistor
- source contact
- source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000010409 thin film Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/417—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
- H01L29/41725—Source or drain electrodes for field effect devices
- H01L29/41733—Source or drain electrodes for field effect devices for thin film transistors with insulated gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
- H01L29/78618—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device characterised by the drain or the source properties, e.g. the doping structure, the composition, the sectional shape or the contact structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78651—Silicon transistors
- H01L29/7866—Non-monocrystalline silicon transistors
- H01L29/78663—Amorphous silicon transistors
- H01L29/78669—Amorphous silicon transistors with inverted-type structure, e.g. with bottom gate
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Thin Film Transistor (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP05127838A JP3129878B2 (ja) | 1993-04-30 | 1993-04-30 | 薄膜トランジスタ |
JP10484293A JPH06314789A (ja) | 1993-04-30 | 1993-04-30 | 薄膜トランジスタ |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69427556D1 DE69427556D1 (de) | 2001-08-02 |
DE69427556T2 true DE69427556T2 (de) | 2002-04-11 |
Family
ID=26445219
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69427556T Expired - Fee Related DE69427556T2 (de) | 1993-04-30 | 1994-04-29 | Drain/Source-Kontakt für Dünnfilmtransistor |
Country Status (4)
Country | Link |
---|---|
US (1) | US5473168A (de) |
EP (1) | EP0622855B1 (de) |
KR (1) | KR0159318B1 (de) |
DE (1) | DE69427556T2 (de) |
Families Citing this family (38)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3255942B2 (ja) | 1991-06-19 | 2002-02-12 | 株式会社半導体エネルギー研究所 | 逆スタガ薄膜トランジスタの作製方法 |
US6709907B1 (en) * | 1992-02-25 | 2004-03-23 | Semiconductor Energy Laboratory Co., Ltd. | Method of fabricating a thin film transistor |
JP3512849B2 (ja) * | 1993-04-23 | 2004-03-31 | 株式会社東芝 | 薄膜トランジスタおよびそれを用いた表示装置 |
US5796116A (en) | 1994-07-27 | 1998-08-18 | Sharp Kabushiki Kaisha | Thin-film semiconductor device including a semiconductor film with high field-effect mobility |
US5885884A (en) * | 1995-09-29 | 1999-03-23 | Intel Corporation | Process for fabricating a microcrystalline silicon structure |
KR100198556B1 (ko) * | 1995-11-22 | 1999-07-01 | 구자홍 | 박막트랜지스터의 구조 및 제조방법 |
US5717223A (en) * | 1995-12-22 | 1998-02-10 | Xerox Corporation | Array with amorphous silicon TFTs in which channel leads overlap insulating region no more than maximum overlap |
US5733804A (en) * | 1995-12-22 | 1998-03-31 | Xerox Corporation | Fabricating fully self-aligned amorphous silicon device |
JPH09203908A (ja) * | 1996-01-25 | 1997-08-05 | Furontetsuku:Kk | 液晶表示装置用薄膜トランジスタおよび液晶表示装置 |
JP3516424B2 (ja) * | 1996-03-10 | 2004-04-05 | 株式会社半導体エネルギー研究所 | 薄膜半導体装置 |
US6746905B1 (en) | 1996-06-20 | 2004-06-08 | Kabushiki Kaisha Toshiba | Thin film transistor and manufacturing process therefor |
KR100196336B1 (en) * | 1996-07-27 | 1999-06-15 | Lg Electronics Inc | Method of manufacturing thin film transistor |
US5814530A (en) * | 1996-09-27 | 1998-09-29 | Xerox Corporation | Producing a sensor with doped microcrystalline silicon channel leads |
US5959312A (en) * | 1996-09-27 | 1999-09-28 | Xerox Corporation | Sensor with doped microcrystalline silicon channel leads with bubble formation protection means |
US6288099B1 (en) | 1998-12-04 | 2001-09-11 | American Home Products Corporation | Substituted benzofuranoindoles and indenoindoles as novel potassium channel openers |
GB9927287D0 (en) | 1999-11-19 | 2000-01-12 | Koninkl Philips Electronics Nv | Top gate thin film transistor and method of producing the same |
JP3701832B2 (ja) * | 2000-02-04 | 2005-10-05 | インターナショナル・ビジネス・マシーンズ・コーポレーション | 薄膜トランジスタ、液晶表示パネル、および薄膜トランジスタの製造方法 |
KR100606963B1 (ko) * | 2000-12-27 | 2006-08-01 | 엘지.필립스 엘시디 주식회사 | 액정 디스플레이 패널 및 그의 제조방법 |
KR100379684B1 (ko) * | 2001-04-20 | 2003-04-10 | 엘지.필립스 엘시디 주식회사 | 박막 트랜지스터 액정표시소자 제조방법 |
US20050048706A1 (en) * | 2003-08-27 | 2005-03-03 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing semiconductor device |
TWI279916B (en) * | 2005-01-31 | 2007-04-21 | Au Optronics Corp | TFT array substrate of a LCD, LCD panel and method of fabricating the same |
US8102339B2 (en) * | 2005-04-05 | 2012-01-24 | Sharp Kabushiki Kaisha | Liquid crystal display device, driving circuit for the same and driving method for the same |
US7719008B2 (en) * | 2006-02-03 | 2010-05-18 | Samsung Electronics Co., | Thin film transistor substrate and method of manufacturing the same and mask for manufacturing thin film transistor substrate |
US7952099B2 (en) * | 2006-04-21 | 2011-05-31 | Beijing Boe Optoelectronics Technology Co., Ltd. | Thin film transistor liquid crystal display array substrate |
TWI378562B (en) * | 2008-01-23 | 2012-12-01 | Ind Tech Res Inst | Microcrystalline silicon thin film transistor and method for manufactruing the same |
US7786485B2 (en) * | 2008-02-29 | 2010-08-31 | Semicondutor Energy Laboratory Co., Ltd. | Thin-film transistor and display device |
US7968880B2 (en) | 2008-03-01 | 2011-06-28 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor and display device |
US7821012B2 (en) * | 2008-03-18 | 2010-10-26 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor |
JP5411528B2 (ja) * | 2008-03-18 | 2014-02-12 | 株式会社半導体エネルギー研究所 | 薄膜トランジスタ及び表示装置 |
US8039842B2 (en) * | 2008-05-22 | 2011-10-18 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor and display device including thin film transistor |
TWI637444B (zh) | 2008-08-08 | 2018-10-01 | 半導體能源研究所股份有限公司 | 半導體裝置的製造方法 |
TWI485851B (zh) | 2009-03-30 | 2015-05-21 | Semiconductor Energy Lab | 半導體裝置及其製造方法 |
JP2011187506A (ja) * | 2010-03-04 | 2011-09-22 | Sony Corp | 薄膜トランジスタおよびその製造方法、並びに表示装置 |
TWI474487B (zh) * | 2010-11-30 | 2015-02-21 | Au Optronics Corp | 氧化物半導體薄膜電晶體結構與其製作方法 |
TWI605590B (zh) | 2011-09-29 | 2017-11-11 | 半導體能源研究所股份有限公司 | 半導體裝置及其製造方法 |
CN202487578U (zh) | 2012-03-27 | 2012-10-10 | 京东方科技集团股份有限公司 | 薄膜晶体管、阵列基板及显示装置 |
JP6376788B2 (ja) | 2013-03-26 | 2018-08-22 | 株式会社半導体エネルギー研究所 | 半導体装置およびその作製方法 |
KR102295477B1 (ko) * | 2014-02-17 | 2021-08-30 | 삼성디스플레이 주식회사 | 박막 트랜지스터 표시판 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6377159A (ja) * | 1986-09-19 | 1988-04-07 | Fujitsu Ltd | 薄膜トランジスタの製造方法 |
JPS6393156A (ja) * | 1986-10-08 | 1988-04-23 | Seiko Epson Corp | 薄膜トランジスタ |
JPS63119577A (ja) * | 1986-11-07 | 1988-05-24 | Toshiba Corp | 薄膜トランジスタ |
JPH01236655A (ja) * | 1988-03-17 | 1989-09-21 | Matsushita Electric Ind Co Ltd | 薄膜電界効果トランジスタとその製造方法 |
EP0341003B1 (de) * | 1988-04-30 | 1994-08-31 | Sharp Kabushiki Kaisha | Dünnfilm-Halbleitervorrichtung und damit hergestellte Flüssigkristallanzeige |
US5122849A (en) * | 1988-07-13 | 1992-06-16 | Seikosha Co., Ltd. | Silicon thin film transistor |
JP2675587B2 (ja) * | 1988-08-09 | 1997-11-12 | シャープ株式会社 | マトリックス型液晶表示パネル |
JPH02260460A (ja) * | 1989-03-31 | 1990-10-23 | Casio Comput Co Ltd | 薄膜トランジスタ |
US5109260A (en) * | 1989-07-10 | 1992-04-28 | Seikosha Co., Ltd. | Silicon thin film transistor and method for producing the same |
US5270567A (en) * | 1989-09-06 | 1993-12-14 | Casio Computer Co., Ltd. | Thin film transistors without capacitances between electrodes thereof |
JPH0393274A (ja) * | 1989-09-06 | 1991-04-18 | Casio Comput Co Ltd | 薄膜トランジスタ |
JPH03185840A (ja) * | 1989-12-15 | 1991-08-13 | Casio Comput Co Ltd | 薄膜トランジスタ |
EP0473988A1 (de) * | 1990-08-29 | 1992-03-11 | International Business Machines Corporation | Verfahren zur Herstellung eines Dünnfilmtransistors mit amorpher/polykristalliner Halbleiterkanalzone |
JPH0541391A (ja) * | 1991-08-06 | 1993-02-19 | Fujitsu Ltd | 薄膜トランジスタの製造方法 |
-
1994
- 1994-04-26 US US08/233,805 patent/US5473168A/en not_active Expired - Fee Related
- 1994-04-29 EP EP94303130A patent/EP0622855B1/de not_active Expired - Lifetime
- 1994-04-29 KR KR1019940009370A patent/KR0159318B1/ko not_active IP Right Cessation
- 1994-04-29 DE DE69427556T patent/DE69427556T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0622855A2 (de) | 1994-11-02 |
KR0159318B1 (ko) | 1998-12-01 |
EP0622855A3 (de) | 1996-04-17 |
EP0622855B1 (de) | 2001-06-27 |
DE69427556D1 (de) | 2001-08-02 |
US5473168A (en) | 1995-12-05 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |