DE69422098D1 - Hybridsystem zur Durchflussmengenänderung mittels Ventilen - Google Patents

Hybridsystem zur Durchflussmengenänderung mittels Ventilen

Info

Publication number
DE69422098D1
DE69422098D1 DE69422098T DE69422098T DE69422098D1 DE 69422098 D1 DE69422098 D1 DE 69422098D1 DE 69422098 T DE69422098 T DE 69422098T DE 69422098 T DE69422098 T DE 69422098T DE 69422098 D1 DE69422098 D1 DE 69422098D1
Authority
DE
Germany
Prior art keywords
valves
changing
flow rate
hybrid system
hybrid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69422098T
Other languages
English (en)
Other versions
DE69422098T2 (de
Inventor
Daniel J Gordon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Biosystems Inc
Original Assignee
Perkin Elmer Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Perkin Elmer Corp filed Critical Perkin Elmer Corp
Application granted granted Critical
Publication of DE69422098D1 publication Critical patent/DE69422098D1/de
Publication of DE69422098T2 publication Critical patent/DE69422098T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
    • G05D7/0652—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means the plurality of throttling means being arranged in parallel
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87265—Dividing into parallel flow paths with recombining
    • Y10T137/87298—Having digital flow controller
    • Y10T137/87306—Having plural branches under common control for separate valve actuators
    • Y10T137/87314—Electromagnetic or electric control [e.g., digital control, bistable electro control, etc.]

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
DE69422098T 1993-07-30 1994-06-27 Hybridsystem zur Durchflussmengenänderung mittels Ventilen Expired - Lifetime DE69422098T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/100,596 US5329965A (en) 1993-07-30 1993-07-30 Hybrid valving system for varying fluid flow rate

Publications (2)

Publication Number Publication Date
DE69422098D1 true DE69422098D1 (de) 2000-01-20
DE69422098T2 DE69422098T2 (de) 2000-04-27

Family

ID=22280558

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69422098T Expired - Lifetime DE69422098T2 (de) 1993-07-30 1994-06-27 Hybridsystem zur Durchflussmengenänderung mittels Ventilen

Country Status (6)

Country Link
US (1) US5329965A (de)
EP (1) EP0636959B1 (de)
JP (1) JP3556276B2 (de)
AU (1) AU692773B2 (de)
CA (1) CA2126496C (de)
DE (1) DE69422098T2 (de)

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US8128060B2 (en) * 2009-03-25 2012-03-06 Valve Tech, Inc. Non-sliding solenoid valve
DE102009052285B4 (de) * 2009-11-09 2020-10-15 Robert Bosch Gmbh Digital-Hydraulik-Ventil
GB201006530D0 (en) 2010-04-19 2010-06-02 Sec Dep For Business Innovatio Method of and system for calibrating gas flow dilutors
JP5562712B2 (ja) * 2010-04-30 2014-07-30 東京エレクトロン株式会社 半導体製造装置用のガス供給装置
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US9695579B2 (en) 2011-03-15 2017-07-04 Sloan Valve Company Automatic faucets
CN105804166B (zh) 2011-03-15 2019-03-26 仕龙阀门公司 自动水龙头
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DE102011121755A1 (de) * 2011-12-21 2013-06-27 Wabco Gmbh Luftfederungsanlage eines Kraftfahrzeugs und Verfahren zu deren Steuerung
WO2013186299A1 (en) * 2012-06-14 2013-12-19 Basell Polyolefine Gmbh Method for cooling a gas-phase reactor for the polymerization of olefins
EP2674213A1 (de) * 2012-06-14 2013-12-18 Basell Polyolefine GmbH Verfahren zum Kühlen eines Gasphasenreaktors zur Polymerisierung von Olefinen
DE102012017207A1 (de) * 2012-08-31 2014-03-06 Robert Bosch Gmbh Verfahren zum Ansteuern einer hydraulischen Ventilanordnung und hydraulische Ventilanordnung
US9146007B2 (en) * 2012-11-27 2015-09-29 Lam Research Ag Apparatus for liquid treatment of work pieces and flow control system for use in same
US10036568B2 (en) 2013-03-15 2018-07-31 Trane International, Inc. Fluid flow measurement and control
JP6193679B2 (ja) * 2013-08-30 2017-09-06 株式会社フジキン ガス分流供給装置及びガス分流供給方法
US9683975B2 (en) * 2014-02-12 2017-06-20 Idex Health & Science Llc Volumetric flow regulation in multi-dimensional liquid analysis systems
US10658222B2 (en) 2015-01-16 2020-05-19 Lam Research Corporation Moveable edge coupling ring for edge process control during semiconductor wafer processing
US10957561B2 (en) * 2015-07-30 2021-03-23 Lam Research Corporation Gas delivery system
US10192751B2 (en) 2015-10-15 2019-01-29 Lam Research Corporation Systems and methods for ultrahigh selective nitride etch
US10825659B2 (en) 2016-01-07 2020-11-03 Lam Research Corporation Substrate processing chamber including multiple gas injection points and dual injector
US10147588B2 (en) 2016-02-12 2018-12-04 Lam Research Corporation System and method for increasing electron density levels in a plasma of a substrate processing system
US10699878B2 (en) 2016-02-12 2020-06-30 Lam Research Corporation Chamber member of a plasma source and pedestal with radially outward positioned lift pins for translation of a substrate c-ring
US10651015B2 (en) 2016-02-12 2020-05-12 Lam Research Corporation Variable depth edge ring for etch uniformity control
US10438833B2 (en) 2016-02-16 2019-10-08 Lam Research Corporation Wafer lift ring system for wafer transfer
US10410832B2 (en) 2016-08-19 2019-09-10 Lam Research Corporation Control of on-wafer CD uniformity with movable edge ring and gas injection adjustment
FR3064621B1 (fr) * 2017-04-03 2022-02-18 Fluigent Dispositif microfluidique
JP7068062B2 (ja) * 2018-06-18 2022-05-16 株式会社堀場製作所 流体制御装置、及び、流量比率制御装置
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Also Published As

Publication number Publication date
EP0636959A3 (de) 1995-04-12
JP3556276B2 (ja) 2004-08-18
AU692773B2 (en) 1998-06-18
JPH0778032A (ja) 1995-03-20
EP0636959B1 (de) 1999-12-15
CA2126496C (en) 2000-08-15
DE69422098T2 (de) 2000-04-27
AU6879594A (en) 1995-02-09
US5329965A (en) 1994-07-19
CA2126496A1 (en) 1995-01-31
EP0636959A2 (de) 1995-02-01

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: APPLERA CORP., FOSTER CITY, CALIF., US

8327 Change in the person/name/address of the patent owner

Owner name: THE PERKIN-ELMER CORP., NORWALK, CONN., US