DE69421749D1 - Halbleiterschalter mit IGBT und Thyristor - Google Patents

Halbleiterschalter mit IGBT und Thyristor

Info

Publication number
DE69421749D1
DE69421749D1 DE69421749T DE69421749T DE69421749D1 DE 69421749 D1 DE69421749 D1 DE 69421749D1 DE 69421749 T DE69421749 T DE 69421749T DE 69421749 T DE69421749 T DE 69421749T DE 69421749 D1 DE69421749 D1 DE 69421749D1
Authority
DE
Germany
Prior art keywords
thyristor
igbt
semiconductor switch
semiconductor
switch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69421749T
Other languages
English (en)
Other versions
DE69421749T2 (de
Inventor
Hideo Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP5100712A external-priority patent/JP2797890B2/ja
Priority claimed from JP30411993A external-priority patent/JPH07161967A/ja
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Application granted granted Critical
Publication of DE69421749D1 publication Critical patent/DE69421749D1/de
Publication of DE69421749T2 publication Critical patent/DE69421749T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/70Bipolar devices
    • H01L29/72Transistor-type devices, i.e. able to continuously respond to applied control signals
    • H01L29/739Transistor-type devices, i.e. able to continuously respond to applied control signals controlled by field-effect, e.g. bipolar static induction transistors [BSIT]
    • H01L29/7393Insulated gate bipolar mode transistors, i.e. IGBT; IGT; COMFET
    • H01L29/7395Vertical transistors, e.g. vertical IGBT
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/70Bipolar devices
    • H01L29/74Thyristor-type devices, e.g. having four-zone regenerative action
    • H01L29/744Gate-turn-off devices
    • H01L29/745Gate-turn-off devices with turn-off by field effect
    • H01L29/7455Gate-turn-off devices with turn-off by field effect produced by an insulated gate structure
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/70Bipolar devices
    • H01L29/74Thyristor-type devices, e.g. having four-zone regenerative action
    • H01L29/749Thyristor-type devices, e.g. having four-zone regenerative action with turn-on by field effect

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Thyristors (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
DE69421749T 1993-04-27 1994-04-25 Halbleiterschalter mit IGBT und Thyristor Expired - Fee Related DE69421749T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP5100712A JP2797890B2 (ja) 1993-04-27 1993-04-27 複合半導体装置
JP30411993A JPH07161967A (ja) 1993-12-03 1993-12-03 複合半導体装置

Publications (2)

Publication Number Publication Date
DE69421749D1 true DE69421749D1 (de) 1999-12-30
DE69421749T2 DE69421749T2 (de) 2000-06-08

Family

ID=26441687

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69421749T Expired - Fee Related DE69421749T2 (de) 1993-04-27 1994-04-25 Halbleiterschalter mit IGBT und Thyristor

Country Status (3)

Country Link
US (1) US5621226A (de)
EP (1) EP0622854B1 (de)
DE (1) DE69421749T2 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0736909A3 (de) * 1995-04-05 1997-10-08 Fuji Electric Co Ltd Thyristor mit isoliertem Gate
JP3298385B2 (ja) * 1995-04-05 2002-07-02 富士電機株式会社 絶縁ゲート型サイリスタ
JPH10125896A (ja) * 1996-10-16 1998-05-15 Fuji Electric Co Ltd 絶縁ゲート型サイリスタ

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57206279A (en) * 1981-06-12 1982-12-17 Hitachi Ltd Gto inverter device
US4847671A (en) * 1987-05-19 1989-07-11 General Electric Company Monolithically integrated insulated gate semiconductor device
US4857983A (en) * 1987-05-19 1989-08-15 General Electric Company Monolithically integrated semiconductor device having bidirectional conducting capability and method of fabrication
ATE93654T1 (de) * 1988-04-22 1993-09-15 Asea Brown Boveri Abschaltbares leistungshalbleiterbauelement.
US4958211A (en) * 1988-09-01 1990-09-18 General Electric Company MCT providing turn-off control of arbitrarily large currents
DE4025122A1 (de) * 1989-10-24 1991-04-25 Asea Brown Boveri Abschaltbares leistungshalbleiter-bauelement in form eines mos-gesteuerten thyristors mct
JPH0529607A (ja) * 1991-07-23 1993-02-05 Fuji Electric Co Ltd Misゲート制御型サイリスタ半導体装置
GB2267996B (en) * 1992-06-01 1996-04-17 Fuji Electric Co Ltd Semiconductor device

Also Published As

Publication number Publication date
DE69421749T2 (de) 2000-06-08
US5621226A (en) 1997-04-15
EP0622854A1 (de) 1994-11-02
EP0622854B1 (de) 1999-11-24

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee