DE69403395D1 - Kapazitiver Druckwandler und Herstellungsverfahren dazu - Google Patents

Kapazitiver Druckwandler und Herstellungsverfahren dazu

Info

Publication number
DE69403395D1
DE69403395D1 DE69403395T DE69403395T DE69403395D1 DE 69403395 D1 DE69403395 D1 DE 69403395D1 DE 69403395 T DE69403395 T DE 69403395T DE 69403395 T DE69403395 T DE 69403395T DE 69403395 D1 DE69403395 D1 DE 69403395D1
Authority
DE
Germany
Prior art keywords
manufacturing process
pressure transducer
capacitive pressure
process therefor
therefor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69403395T
Other languages
English (en)
Other versions
DE69403395T2 (de
Inventor
Tarja Kankkunen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Vaisala Oy
Original Assignee
Vaisala Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vaisala Oy filed Critical Vaisala Oy
Application granted granted Critical
Publication of DE69403395D1 publication Critical patent/DE69403395D1/de
Publication of DE69403395T2 publication Critical patent/DE69403395T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
DE69403395T 1993-07-07 1994-06-29 Kapazitiver Druckwandler und Herstellungsverfahren dazu Expired - Fee Related DE69403395T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI933124A FI93059C (fi) 1993-07-07 1993-07-07 Kapasitiivinen paineanturirakenne ja menetelmä sen valmistamiseksi

Publications (2)

Publication Number Publication Date
DE69403395D1 true DE69403395D1 (de) 1997-07-03
DE69403395T2 DE69403395T2 (de) 1997-11-06

Family

ID=8538294

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69403395T Expired - Fee Related DE69403395T2 (de) 1993-07-07 1994-06-29 Kapazitiver Druckwandler und Herstellungsverfahren dazu

Country Status (5)

Country Link
US (1) US5656781A (de)
EP (1) EP0633459B1 (de)
JP (1) JP3428729B2 (de)
DE (1) DE69403395T2 (de)
FI (1) FI93059C (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000002611A (ja) * 1998-06-12 2000-01-07 Fujikura Ltd 圧力センサ
WO2000002028A1 (en) * 1998-07-07 2000-01-13 The Goodyear Tire & Rubber Company Method of fabricating silicon capacitive sensor
US6780830B1 (en) * 2000-05-19 2004-08-24 Huish Detergents, Incorporated Post-added α-sulfofatty acid ester compositions and methods of making and using the same
US6445053B1 (en) * 2000-07-28 2002-09-03 Abbott Laboratories Micro-machined absolute pressure sensor
US6662663B2 (en) * 2002-04-10 2003-12-16 Hewlett-Packard Development Company, L.P. Pressure sensor with two membranes forming a capacitor
US6958255B2 (en) * 2002-08-08 2005-10-25 The Board Of Trustees Of The Leland Stanford Junior University Micromachined ultrasonic transducers and method of fabrication
FR2859281B1 (fr) * 2003-09-02 2005-12-23 Auxitrol Sa Protection d'une membrane deformable contre de fortes deformations dans une structure micromecanique
US7214324B2 (en) * 2005-04-15 2007-05-08 Delphi Technologies, Inc. Technique for manufacturing micro-electro mechanical structures
JP4585426B2 (ja) * 2005-10-31 2010-11-24 アルプス電気株式会社 静電容量型圧力センサ
US7345867B2 (en) * 2005-11-18 2008-03-18 Alps Electric Co., Ltd Capacitive pressure sensor and method of manufacturing the same
JP2010169665A (ja) * 2008-12-24 2010-08-05 Canon Anelva Corp 静電容量型隔膜真空計、真空装置
JP5714648B2 (ja) 2012-11-16 2015-05-07 株式会社豊田中央研究所 力学量ｍｅｍｓセンサ及び力学量ｍｅｍｓセンサシステム
EP2871456B1 (de) 2013-11-06 2018-10-10 Invensense, Inc. Drucksensor und Herstellungsmethode für einen Drucksensor
EP2871455B1 (de) 2013-11-06 2020-03-04 Invensense, Inc. Drucksensor
DE102014200500A1 (de) * 2014-01-14 2015-07-16 Robert Bosch Gmbh Mikromechanische Drucksensorvorrichtung und entsprechendes Herstellungsverfahren
TWI550261B (zh) * 2014-03-17 2016-09-21 立錡科技股份有限公司 微機電壓力計以及其製作方法
US20170328800A1 (en) * 2014-07-11 2017-11-16 Richtek Technology Corporation Combo micro-electro-mechanical system device and manufacturing method thereof
EP3614115A1 (de) 2015-04-02 2020-02-26 InvenSense, Inc. Drucksensor
EP3106426B1 (de) * 2015-06-19 2019-11-06 Invensense, Inc. Drucksensor
US11225409B2 (en) 2018-09-17 2022-01-18 Invensense, Inc. Sensor with integrated heater
EP3969868A1 (de) 2019-05-17 2022-03-23 InvenSense, Inc. Drucksensor mit verbesserter dichtigkeit

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3288656A (en) * 1961-07-26 1966-11-29 Nippon Electric Co Semiconductor device
GB1138401A (en) * 1965-05-06 1969-01-01 Mallory & Co Inc P R Bonding
JPS5516228A (en) * 1978-07-21 1980-02-04 Hitachi Ltd Capacity type sensor
US4386453A (en) * 1979-09-04 1983-06-07 Ford Motor Company Method for manufacturing variable capacitance pressure transducers
US4332000A (en) * 1980-10-03 1982-05-25 International Business Machines Corporation Capacitive pressure transducer
US4390925A (en) * 1981-08-26 1983-06-28 Leeds & Northrup Company Multiple-cavity variable capacitance pressure transducer
FI69211C (fi) * 1984-02-21 1985-12-10 Vaisala Oy Kapacitiv styckgivare
FI71015C (fi) * 1984-02-21 1986-10-27 Vaisala Oy Temperaturoberoende kapacitiv tryckgivare
FI74350C (fi) * 1984-02-21 1988-01-11 Vaisala Oy Kapacitiv absoluttryckgivare.
US4625561A (en) * 1984-12-06 1986-12-02 Ford Motor Company Silicon capacitive pressure sensor and method of making
EP0339981A3 (de) * 1988-04-29 1991-10-09 Schlumberger Industries, Inc. Geschichteter Halbleitersensor mit Überdruckschutz
US4951174A (en) * 1988-12-30 1990-08-21 United Technologies Corporation Capacitive pressure sensor with third encircling plate
DE4115420A1 (de) * 1991-05-10 1992-11-12 Fraunhofer Ges Forschung Drucksensor
JP2896725B2 (ja) * 1991-12-26 1999-05-31 株式会社山武 静電容量式圧力センサ
DE4206677C1 (de) * 1992-02-28 1993-09-02 Siemens Ag, 80333 Muenchen, De

Also Published As

Publication number Publication date
DE69403395T2 (de) 1997-11-06
EP0633459A2 (de) 1995-01-11
US5656781A (en) 1997-08-12
FI93059C (fi) 1995-02-10
EP0633459B1 (de) 1997-05-28
FI93059B (fi) 1994-10-31
FI933124A0 (fi) 1993-07-07
JP3428729B2 (ja) 2003-07-22
JPH0755617A (ja) 1995-03-03
EP0633459A3 (en) 1995-02-08

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee