FI933124A0 - Kapasitiivinen paineanturirakenne ja menetelmä sen valmistamiseksi - Google Patents

Kapasitiivinen paineanturirakenne ja menetelmä sen valmistamiseksi

Info

Publication number
FI933124A0
FI933124A0 FI933124A FI933124A FI933124A0 FI 933124 A0 FI933124 A0 FI 933124A0 FI 933124 A FI933124 A FI 933124A FI 933124 A FI933124 A FI 933124A FI 933124 A0 FI933124 A0 FI 933124A0
Authority
FI
Finland
Prior art keywords
manufacture
pressure sensor
capacitive pressure
sensor design
design
Prior art date
Application number
FI933124A
Other languages
English (en)
Swedish (sv)
Other versions
FI93059C (fi
FI93059B (fi
Inventor
Tarja Kankkunen
Original Assignee
Vaisala Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vaisala Oy filed Critical Vaisala Oy
Priority to FI933124A priority Critical patent/FI93059C/fi
Publication of FI933124A0 publication Critical patent/FI933124A0/fi
Priority to EP94304740A priority patent/EP0633459B1/en
Priority to DE69403395T priority patent/DE69403395T2/de
Priority to JP15557794A priority patent/JP3428729B2/ja
Application granted granted Critical
Publication of FI93059B publication Critical patent/FI93059B/fi
Publication of FI93059C publication Critical patent/FI93059C/fi
Priority to US08/641,264 priority patent/US5656781A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
FI933124A 1993-07-07 1993-07-07 Kapasitiivinen paineanturirakenne ja menetelmä sen valmistamiseksi FI93059C (fi)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FI933124A FI93059C (fi) 1993-07-07 1993-07-07 Kapasitiivinen paineanturirakenne ja menetelmä sen valmistamiseksi
EP94304740A EP0633459B1 (en) 1993-07-07 1994-06-29 Capacitive pressure transducer structure and method for manufacturing the same
DE69403395T DE69403395T2 (de) 1993-07-07 1994-06-29 Kapazitiver Druckwandler und Herstellungsverfahren dazu
JP15557794A JP3428729B2 (ja) 1993-07-07 1994-07-07 容量式圧力変換器
US08/641,264 US5656781A (en) 1993-07-07 1996-04-30 Capacitive pressure transducer structure with a sealed vacuum chamber formed by two bonded silicon wafers

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI933124A FI93059C (fi) 1993-07-07 1993-07-07 Kapasitiivinen paineanturirakenne ja menetelmä sen valmistamiseksi
FI933124 1993-07-07

Publications (3)

Publication Number Publication Date
FI933124A0 true FI933124A0 (fi) 1993-07-07
FI93059B FI93059B (fi) 1994-10-31
FI93059C FI93059C (fi) 1995-02-10

Family

ID=8538294

Family Applications (1)

Application Number Title Priority Date Filing Date
FI933124A FI93059C (fi) 1993-07-07 1993-07-07 Kapasitiivinen paineanturirakenne ja menetelmä sen valmistamiseksi

Country Status (5)

Country Link
US (1) US5656781A (fi)
EP (1) EP0633459B1 (fi)
JP (1) JP3428729B2 (fi)
DE (1) DE69403395T2 (fi)
FI (1) FI93059C (fi)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000002611A (ja) * 1998-06-12 2000-01-07 Fujikura Ltd 圧力センサ
WO2000002028A1 (en) * 1998-07-07 2000-01-13 The Goodyear Tire & Rubber Company Method of fabricating silicon capacitive sensor
US6780830B1 (en) * 2000-05-19 2004-08-24 Huish Detergents, Incorporated Post-added α-sulfofatty acid ester compositions and methods of making and using the same
US6445053B1 (en) * 2000-07-28 2002-09-03 Abbott Laboratories Micro-machined absolute pressure sensor
US6662663B2 (en) * 2002-04-10 2003-12-16 Hewlett-Packard Development Company, L.P. Pressure sensor with two membranes forming a capacitor
US6958255B2 (en) * 2002-08-08 2005-10-25 The Board Of Trustees Of The Leland Stanford Junior University Micromachined ultrasonic transducers and method of fabrication
FR2859281B1 (fr) * 2003-09-02 2005-12-23 Auxitrol Sa Protection d'une membrane deformable contre de fortes deformations dans une structure micromecanique
US7214324B2 (en) * 2005-04-15 2007-05-08 Delphi Technologies, Inc. Technique for manufacturing micro-electro mechanical structures
JP4585426B2 (ja) * 2005-10-31 2010-11-24 アルプス電気株式会社 静電容量型圧力センサ
US7345867B2 (en) * 2005-11-18 2008-03-18 Alps Electric Co., Ltd Capacitive pressure sensor and method of manufacturing the same
JP2010169665A (ja) * 2008-12-24 2010-08-05 Canon Anelva Corp 静電容量型隔膜真空計、真空装置
JP5714648B2 (ja) 2012-11-16 2015-05-07 株式会社豊田中央研究所 力学量ｍｅｍｓセンサ及び力学量ｍｅｍｓセンサシステム
EP2871456B1 (en) 2013-11-06 2018-10-10 Invensense, Inc. Pressure sensor and method for manufacturing a pressure sensor
EP2871455B1 (en) 2013-11-06 2020-03-04 Invensense, Inc. Pressure sensor
DE102014200500A1 (de) * 2014-01-14 2015-07-16 Robert Bosch Gmbh Mikromechanische Drucksensorvorrichtung und entsprechendes Herstellungsverfahren
TWI550261B (zh) * 2014-03-17 2016-09-21 立錡科技股份有限公司 微機電壓力計以及其製作方法
US20170328800A1 (en) * 2014-07-11 2017-11-16 Richtek Technology Corporation Combo micro-electro-mechanical system device and manufacturing method thereof
EP3614115A1 (en) 2015-04-02 2020-02-26 InvenSense, Inc. Pressure sensor
EP3106426B1 (en) * 2015-06-19 2019-11-06 Invensense, Inc. Pressure sensor
US11225409B2 (en) 2018-09-17 2022-01-18 Invensense, Inc. Sensor with integrated heater
EP3969868A1 (en) 2019-05-17 2022-03-23 InvenSense, Inc. A pressure sensor with improve hermeticity

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3288656A (en) * 1961-07-26 1966-11-29 Nippon Electric Co Semiconductor device
GB1138401A (en) * 1965-05-06 1969-01-01 Mallory & Co Inc P R Bonding
JPS5516228A (en) * 1978-07-21 1980-02-04 Hitachi Ltd Capacity type sensor
US4386453A (en) * 1979-09-04 1983-06-07 Ford Motor Company Method for manufacturing variable capacitance pressure transducers
US4332000A (en) * 1980-10-03 1982-05-25 International Business Machines Corporation Capacitive pressure transducer
US4390925A (en) * 1981-08-26 1983-06-28 Leeds & Northrup Company Multiple-cavity variable capacitance pressure transducer
FI69211C (fi) * 1984-02-21 1985-12-10 Vaisala Oy Kapacitiv styckgivare
FI71015C (fi) * 1984-02-21 1986-10-27 Vaisala Oy Temperaturoberoende kapacitiv tryckgivare
FI74350C (fi) * 1984-02-21 1988-01-11 Vaisala Oy Kapacitiv absoluttryckgivare.
US4625561A (en) * 1984-12-06 1986-12-02 Ford Motor Company Silicon capacitive pressure sensor and method of making
EP0339981A3 (en) * 1988-04-29 1991-10-09 Schlumberger Industries, Inc. Laminated semiconductor sensor with overpressure protection
US4951174A (en) * 1988-12-30 1990-08-21 United Technologies Corporation Capacitive pressure sensor with third encircling plate
DE4115420A1 (de) * 1991-05-10 1992-11-12 Fraunhofer Ges Forschung Drucksensor
JP2896725B2 (ja) * 1991-12-26 1999-05-31 株式会社山武 静電容量式圧力センサ
DE4206677C1 (fi) * 1992-02-28 1993-09-02 Siemens Ag, 80333 Muenchen, De

Also Published As

Publication number Publication date
DE69403395T2 (de) 1997-11-06
DE69403395D1 (de) 1997-07-03
EP0633459A2 (en) 1995-01-11
US5656781A (en) 1997-08-12
FI93059C (fi) 1995-02-10
EP0633459B1 (en) 1997-05-28
FI93059B (fi) 1994-10-31
JP3428729B2 (ja) 2003-07-22
JPH0755617A (ja) 1995-03-03
EP0633459A3 (en) 1995-02-08

Similar Documents

Publication Publication Date Title
FI933124A0 (fi) Kapasitiivinen paineanturirakenne ja menetelmä sen valmistamiseksi
DK0414871T3 (da) Kapacitiv trykføler og fremgangsmåde til fremstilling heraf
DE818046T1 (de) Kapazitiver absolutdrucksensor
DE59508560D1 (de) Kapazitiver Drucksensor
DK0445382T3 (da) Trykføler og fremgangsmåde til fremstilling heraf
DK0587032T3 (da) Integreret kapacitiv transducer
DE69426774D1 (de) Kapazitiver Druckwandler mit justierbarer Durchführung
BR8706755A (pt) Sensor de pressao capacitivo eletrostatico
DE59600582D1 (de) Kapazitiver füllstandsensor
DE69325705D1 (de) Kapazitiver feuchtigkeitsfühler
GB2214350B (en) Capacitive pressure sensor and method for its fabrication
DK0674164T3 (da) Kapacitativ trykføler eller differenstrykføler
DE69412769T2 (de) Kapazitiver Sensor und Verfahren zur Herstellung
FI883523A (fi) Kapasitiiviset paineanturit
DE69306019T2 (de) Drucksensor
DE59303373D1 (de) Drucksensor
DE69508003T2 (de) Differentialkapazitivgeber
DE29502825U1 (de) Piezoresistiver Drucksensor oder Druckaufnehmer
NO942410L (no) Kapasitiv differensial-trykkföler
FI98567B (fi) Impedanssianturi, etenkin radiosondikäyttöön, sekä menetelmä anturin valmistamiseksi
DE69211449D1 (de) Sensor zur Bohrlochdruckmessung
NO308921B1 (no) Trykkføler
IT8868156A0 (it) Sensore di deformazione ad effetto capacitivo
DE69301053D1 (de) Drucksensor
ATA252192A (de) Drucksensorik

Legal Events

Date Code Title Description
BB Publication of examined application