DK0445382T3 - Trykføler og fremgangsmåde til fremstilling heraf - Google Patents

Trykføler og fremgangsmåde til fremstilling heraf

Info

Publication number
DK0445382T3
DK0445382T3 DK90122994.8T DK90122994T DK0445382T3 DK 0445382 T3 DK0445382 T3 DK 0445382T3 DK 90122994 T DK90122994 T DK 90122994T DK 0445382 T3 DK0445382 T3 DK 0445382T3
Authority
DK
Denmark
Prior art keywords
manufacture
pressure sensor
sensor
pressure
Prior art date
Application number
DK90122994.8T
Other languages
English (en)
Inventor
Frank Dr-Ing Hegner
Manfred Dipl-Ing Frank
Thomas Dipl-Ing Klaehn
Original Assignee
Endress Hauser Gmbh Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Endress Hauser Gmbh Co filed Critical Endress Hauser Gmbh Co
Application granted granted Critical
Publication of DK0445382T3 publication Critical patent/DK0445382T3/da

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/43—Electric condenser making
    • Y10T29/435—Solid dielectric type
DK90122994.8T 1990-01-22 1990-11-30 Trykføler og fremgangsmåde til fremstilling heraf DK0445382T3 (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP90810045 1990-01-22

Publications (1)

Publication Number Publication Date
DK0445382T3 true DK0445382T3 (da) 1993-06-21

Family

ID=8205901

Family Applications (1)

Application Number Title Priority Date Filing Date
DK90122994.8T DK0445382T3 (da) 1990-01-22 1990-11-30 Trykføler og fremgangsmåde til fremstilling heraf

Country Status (8)

Country Link
US (1) US5050034A (da)
EP (1) EP0445382B1 (da)
JP (1) JPH0750007B2 (da)
CA (1) CA2031427C (da)
DE (1) DE59001567D1 (da)
DK (1) DK0445382T3 (da)
ES (1) ES2041106T3 (da)
IE (1) IE904277A1 (da)

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US5954900A (en) * 1996-10-04 1999-09-21 Envec Mess- Und Regeltechnik Gmbh + Co. Process for joining alumina ceramic bodies
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DE19729785C2 (de) * 1997-07-11 1999-08-19 Micronas Semiconductor Holding Kondensatoranordnung und ihr Herstellungsverfahren
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US6374680B1 (en) 1999-03-24 2002-04-23 Endress + Hauser Gmbh + Co. Capacitive pressure sensor or capacitive differential pressure sensor
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US6578427B1 (en) * 1999-06-15 2003-06-17 Envec Mess- Und Regeltechnik Gmbh + Co. Capacitive ceramic relative-pressure sensor
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US6520020B1 (en) 2000-01-06 2003-02-18 Rosemount Inc. Method and apparatus for a direct bonded isolated pressure sensor
US6508129B1 (en) 2000-01-06 2003-01-21 Rosemount Inc. Pressure sensor capsule with improved isolation
US6516671B2 (en) 2000-01-06 2003-02-11 Rosemount Inc. Grain growth of electrical interconnection for microelectromechanical systems (MEMS)
US6561038B2 (en) 2000-01-06 2003-05-13 Rosemount Inc. Sensor with fluid isolation barrier
US6505516B1 (en) 2000-01-06 2003-01-14 Rosemount Inc. Capacitive pressure sensing with moving dielectric
US6612175B1 (en) 2000-07-20 2003-09-02 Nt International, Inc. Sensor usable in ultra pure and highly corrosive environments
US7152478B2 (en) * 2000-07-20 2006-12-26 Entegris, Inc. Sensor usable in ultra pure and highly corrosive environments
DE10052053A1 (de) * 2000-10-19 2002-04-25 Endress Hauser Gmbh Co Druckmeßzelle
JP4557405B2 (ja) * 2000-10-26 2010-10-06 京セラ株式会社 圧力検出装置用パッケージ
JP4557406B2 (ja) * 2000-10-27 2010-10-06 京セラ株式会社 圧力検出装置用パッケージ
DE10163567A1 (de) * 2001-12-21 2003-07-17 Endress & Hauser Gmbh & Co Kg Drucksensor mit hydrophober Beschichtung
US6490148B1 (en) 2002-01-02 2002-12-03 Greatbatch-Hittman, Incorporated Installation of filter capacitors into feedthroughs for implantable medical devices
US6958446B2 (en) * 2002-04-17 2005-10-25 Agilent Technologies, Inc. Compliant and hermetic solder seal
EP1439380B8 (en) * 2002-08-07 2012-05-09 Panasonic Corporation Load sensor and method of manufacturing the load sensor, paste used for the method, and method of manufacturing the paste
EP1429357A1 (en) * 2002-12-09 2004-06-16 IEE INTERNATIONAL ELECTRONICS & ENGINEERING S.A. Foil-type switching element with multi-layered carrier foil
US6993973B2 (en) * 2003-05-16 2006-02-07 Mks Instruments, Inc. Contaminant deposition control baffle for a capacitive pressure transducer
JP2006047279A (ja) * 2004-07-02 2006-02-16 Alps Electric Co Ltd ガラス基板及びそれを用いた静電容量型圧力センサ
US7201057B2 (en) 2004-09-30 2007-04-10 Mks Instruments, Inc. High-temperature reduced size manometer
US7137301B2 (en) 2004-10-07 2006-11-21 Mks Instruments, Inc. Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor
US7141447B2 (en) 2004-10-07 2006-11-28 Mks Instruments, Inc. Method of forming a seal between a housing and a diaphragm of a capacitance sensor
US7089798B2 (en) * 2004-10-18 2006-08-15 Silverbrook Research Pty Ltd Pressure sensor with thin membrane
JP2006170893A (ja) * 2004-12-17 2006-06-29 Alps Electric Co Ltd 静電容量型圧力センサ
US7204150B2 (en) 2005-01-14 2007-04-17 Mks Instruments, Inc. Turbo sump for use with capacitive pressure sensor
DE102005027365A1 (de) * 2005-06-14 2006-12-21 Robert Bosch Gmbh Hochdrucksensoreinrichtung und Verfahren zu ihrer Herstellung
TWI288652B (en) * 2006-05-29 2007-10-21 Advanced Int Multitech Co Ltd Joining method of golf club head
TW200831166A (en) * 2007-01-26 2008-08-01 Advanced Int Multitech Co Ltd Jointing method for a gold club head
EP2145162A1 (de) * 2007-05-04 2010-01-20 Carag AG Waage
DE102008064654A1 (de) 2008-08-05 2010-04-15 Endress + Hauser Gmbh + Co. Kg Verfahren zur Herstellung eines elastischen Körpers aus Al2O3- Keramik
EP2229967B1 (en) * 2009-03-17 2020-04-15 F.Hoffmann-La Roche Ag Cannula assembly and ambulatory infusion system with a pressure sensor made of stacked coplanar layers
GB2469823B (en) * 2009-04-28 2011-07-06 Illinois Tool Works Weighing method and apparatus
KR101051348B1 (ko) * 2009-07-13 2011-07-22 한국표준과학연구원 정전용량형 압력센서 및 그 제조방법
DE102009027742A1 (de) 2009-07-15 2011-01-27 Endress + Hauser Gmbh + Co. Kg Kapazitive keramische Druckmesszelle und Drucksensor mit einer solchen Druckmesszelle
DE102009046844A1 (de) 2009-11-18 2011-05-19 Endress + Hauser Gmbh + Co. Kg Kapazitive keramische Druckmesszelle
DE102009054909A1 (de) 2009-12-17 2011-06-22 Endress + Hauser GmbH + Co. KG, 79689 Keramisches Produkt und Verfahren zu dessen Herstellung
DE102012103166A1 (de) * 2012-04-12 2013-10-17 Endress + Hauser Gmbh + Co. Kg Druckmesszelle und Verfahren zu ihrer Herstellung
DE102012106236A1 (de) * 2012-07-11 2014-01-16 Endress + Hauser Gmbh + Co. Kg Verfahren zum Fügen von Keramikkörpern mittels eines Aktivhartlots, Baugruppe mit mindestens zwei miteinander gefügten Keramikkörpern, insbesondere Druckmesszelle
DE102014114882A1 (de) * 2014-10-14 2016-04-14 Endress + Hauser Gmbh + Co. Kg Drucksensor
DE102015105057A1 (de) * 2015-04-01 2016-10-06 Endress + Hauser Gmbh + Co. Kg Kapazitiver Drucksensor
DE102015108949A1 (de) * 2015-06-08 2016-12-08 Endress + Hauser Gmbh + Co. Kg Aktivhartlot zum Aktivhartlöten von Keramik
DE102015122220A1 (de) * 2015-12-18 2017-06-22 Endress + Hauser Gmbh + Co. Kg Keramische Druckmesszelle mit mindestens einem Temperaturmesswandler und Druckmessaufnehmer mit einer solchen Druckmesszelle
DE102016102775A1 (de) 2016-02-17 2017-08-17 Endress+Hauser Gmbh+Co. Kg Kapazitiver Drucksensor
US10640374B2 (en) * 2017-05-18 2020-05-05 Dunan Microstaq, Inc. Method and structure of attachment layer for reducing stress transmission to attached MEMS die
US10921943B2 (en) 2019-04-30 2021-02-16 Apple Inc. Compliant material for protecting capacitive force sensors and increasing capacitive sensitivity
US11300442B2 (en) 2020-02-07 2022-04-12 Illinois Tool Works Inc. Weighing apparatus with alignment of accelerometer coordinate system and load cell coordinate system and related method
US11592946B1 (en) 2021-09-21 2023-02-28 Apple Inc. Capacitive gap force sensor with multi-layer fill

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DE3910646A1 (de) * 1989-04-01 1990-10-04 Endress Hauser Gmbh Co Kapazitiver drucksensor und verfahren zu seiner herstellung

Also Published As

Publication number Publication date
EP0445382A2 (de) 1991-09-11
US5050034A (en) 1991-09-17
ES2041106T3 (es) 1993-11-01
DE59001567D1 (de) 1993-07-01
EP0445382B1 (de) 1993-05-26
IE904277A1 (en) 1991-07-31
JPH0750007B2 (ja) 1995-05-31
CA2031427C (en) 1996-07-30
JPH0749277A (ja) 1995-02-21
EP0445382A3 (en) 1991-12-04
CA2031427A1 (en) 1991-07-23

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