ES2041106T3 - Sensor de presion y su procedimiento de fabricacion. - Google Patents
Sensor de presion y su procedimiento de fabricacion.Info
- Publication number
- ES2041106T3 ES2041106T3 ES199090122994T ES90122994T ES2041106T3 ES 2041106 T3 ES2041106 T3 ES 2041106T3 ES 199090122994 T ES199090122994 T ES 199090122994T ES 90122994 T ES90122994 T ES 90122994T ES 2041106 T3 ES2041106 T3 ES 2041106T3
- Authority
- ES
- Spain
- Prior art keywords
- membrane
- pressure sensor
- base body
- layer
- covers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/43—Electric condenser making
- Y10T29/435—Solid dielectric type
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Abstract
EL CUERPO BASE (12) Y/O LA MEMBRANA (11) DEL SENSOR DE PRESION (10) CONSTA DE CERAMICA, VIDRIO O UN MATERIAL CRISTALINO. LA MEMBRANA (11) ESTA SOBRE UN LADO QUE SE DIRIGE HACIA EL CUERPO BASE (12) CON UNA CAPA DE PROTECCION (21) QUE CUBRE LA SUPERFICIE LIBRE DE ESTE LADO Y QUE ESTA RECUBIERTO A MODO DE UN ELECTRODO CONDENSADOR (14) POR UNA CAPA DE KARBID DE SILICIO, NIOB O TANTAL. EL CUERPO BASE (12) ESTA SOBRE LA PARTE DIRIGIDA A LA MEMBRANA (11) CON AL MENOS UNA CAPA DE PROTECCION (22) QUE CUBRE LAS SUPERFICIES LIBRES DE LOS LADOS, ETC. EL CUERPO BASE (12) ASI COMO LA MEMBRANA (11) ESTAN UNIDOS ENTRE SI POR MEDIO DE UNA PIEZA DE MOLDEO DE UN LOTE DE SOLDADURA (20) QUE SIRVE PARA MANTENER LA SUJECCION DE LAS DISTANCIAS. ESTE SENSOR DE PRESION SE PUEDE FABRICAR DE UNA SOLA VEZ. LA CARGA DE LA PRESION MAXIMA DE LA MEMBRANA NO SE CORRESPONDE CON LA CONSISTENCIA DE LAS JUNTAS, SINO SIMPLEMENTE CON EL MATERIAL DE LA MEMBRANA. EL SENSOR DE PRESION PUEDE SER UTILIZADA A TEMPERATURAS ALTAS. TAMBIEN SE PUEDE UTILIZAR COMO SENSOR DE PRESION CON ENSAMBLADOS DE FRITA DE VIDRIO.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP90810045 | 1990-01-22 |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2041106T3 true ES2041106T3 (es) | 1993-11-01 |
Family
ID=8205901
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES199090122994T Expired - Lifetime ES2041106T3 (es) | 1990-01-22 | 1990-11-30 | Sensor de presion y su procedimiento de fabricacion. |
Country Status (8)
Country | Link |
---|---|
US (1) | US5050034A (es) |
EP (1) | EP0445382B1 (es) |
JP (1) | JPH0750007B2 (es) |
CA (1) | CA2031427C (es) |
DE (1) | DE59001567D1 (es) |
DK (1) | DK0445382T3 (es) |
ES (1) | ES2041106T3 (es) |
IE (1) | IE904277A1 (es) |
Families Citing this family (68)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4031791A1 (de) * | 1990-10-08 | 1992-04-09 | Leybold Ag | Sensor fuer ein kapazitaetsmanometer |
US5150759A (en) * | 1990-10-29 | 1992-09-29 | Borchard John S | Capacitor-sensor |
DK0516579T3 (da) * | 1991-05-26 | 1994-09-26 | Endress Hauser Gmbh Co | Gennemgående forbindelse i en isolationsmaterialedel |
EP0544934B1 (de) * | 1991-11-30 | 1996-10-02 | Endress U. Hauser Gmbh U. Co. | Verfahren zum Stabilisieren der Oberflächeneigenschaften von in Vakuum temperaturzubehandelnden Gegenständen |
KR950004637Y1 (ko) * | 1992-09-09 | 1995-06-12 | 구자홍 | 전자레인지의 조리물 중량 검출장치 |
EP0657718B1 (en) * | 1993-12-07 | 1998-08-26 | Matsushita Electric Industrial Co., Ltd. | Capacitance sensor and method of manufacturing the same |
CN1041260C (zh) * | 1995-01-28 | 1998-12-16 | 克罗内有限公司 | 确定浪涌电压抑制器中最高电压的空气火花隙 |
US6484585B1 (en) | 1995-02-28 | 2002-11-26 | Rosemount Inc. | Pressure sensor for a pressure transmitter |
US5637802A (en) | 1995-02-28 | 1997-06-10 | Rosemount Inc. | Capacitive pressure sensor for a pressure transmitted where electric field emanates substantially from back sides of plates |
DE59507194D1 (de) * | 1995-12-22 | 1999-12-09 | Envec Mess Und Regeltechn Gmbh | Druckmessanordnung mit Schirmelektrode |
US5954900A (en) * | 1996-10-04 | 1999-09-21 | Envec Mess- Und Regeltechnik Gmbh + Co. | Process for joining alumina ceramic bodies |
US6165623A (en) | 1996-11-07 | 2000-12-26 | Cabot Corporation | Niobium powders and niobium electrolytic capacitors |
US5880371A (en) * | 1997-01-27 | 1999-03-09 | Texas Instruments Incorporated | Pressure transducer apparatus and method for making |
US5965821A (en) * | 1997-07-03 | 1999-10-12 | Mks Instruments, Inc. | Pressure sensor |
DE19729785C2 (de) * | 1997-07-11 | 1999-08-19 | Micronas Semiconductor Holding | Kondensatoranordnung und ihr Herstellungsverfahren |
US20040099061A1 (en) | 1997-12-22 | 2004-05-27 | Mks Instruments | Pressure sensor for detecting small pressure differences and low pressures |
US6051044A (en) | 1998-05-04 | 2000-04-18 | Cabot Corporation | Nitrided niobium powders and niobium electrolytic capacitors |
US6267009B1 (en) | 1998-12-14 | 2001-07-31 | Endress + Hauser Gmbh + Co. | Capacitive pressure sensor cells or differential pressure sensor cells and methods for manufacturing the same |
DE59801050D1 (de) * | 1998-12-14 | 2001-08-23 | Endress Hauser Gmbh Co | Kapazitive Druck- oder Differenzdruckmesszellen und Verfahren zu deren Herstellung |
US6374680B1 (en) | 1999-03-24 | 2002-04-23 | Endress + Hauser Gmbh + Co. | Capacitive pressure sensor or capacitive differential pressure sensor |
US6578427B1 (en) * | 1999-06-15 | 2003-06-17 | Envec Mess- Und Regeltechnik Gmbh + Co. | Capacitive ceramic relative-pressure sensor |
DK1061351T3 (da) * | 1999-06-15 | 2003-11-03 | Endress & Hauser Gmbh & Co Kg | Kapacitiv keramisk relativtryksensor |
DE59903469D1 (de) * | 1999-08-07 | 2003-01-02 | Endress Hauser Gmbh Co | Kapazitiver keramischer Drucksensor |
WO2001050106A1 (en) | 2000-01-06 | 2001-07-12 | Rosemount Inc. | Grain growth of electrical interconnection for microelectromechanical systems (mems) |
US6561038B2 (en) | 2000-01-06 | 2003-05-13 | Rosemount Inc. | Sensor with fluid isolation barrier |
US6520020B1 (en) | 2000-01-06 | 2003-02-18 | Rosemount Inc. | Method and apparatus for a direct bonded isolated pressure sensor |
US6508129B1 (en) | 2000-01-06 | 2003-01-21 | Rosemount Inc. | Pressure sensor capsule with improved isolation |
US6505516B1 (en) | 2000-01-06 | 2003-01-14 | Rosemount Inc. | Capacitive pressure sensing with moving dielectric |
US6612175B1 (en) | 2000-07-20 | 2003-09-02 | Nt International, Inc. | Sensor usable in ultra pure and highly corrosive environments |
US7152478B2 (en) * | 2000-07-20 | 2006-12-26 | Entegris, Inc. | Sensor usable in ultra pure and highly corrosive environments |
DE10052053A1 (de) * | 2000-10-19 | 2002-04-25 | Endress Hauser Gmbh Co | Druckmeßzelle |
JP4557405B2 (ja) * | 2000-10-26 | 2010-10-06 | 京セラ株式会社 | 圧力検出装置用パッケージ |
JP4557406B2 (ja) * | 2000-10-27 | 2010-10-06 | 京セラ株式会社 | 圧力検出装置用パッケージ |
DE10163567A1 (de) * | 2001-12-21 | 2003-07-17 | Endress & Hauser Gmbh & Co Kg | Drucksensor mit hydrophober Beschichtung |
US6490148B1 (en) | 2002-01-02 | 2002-12-03 | Greatbatch-Hittman, Incorporated | Installation of filter capacitors into feedthroughs for implantable medical devices |
US6958446B2 (en) * | 2002-04-17 | 2005-10-25 | Agilent Technologies, Inc. | Compliant and hermetic solder seal |
US7164342B2 (en) * | 2002-08-07 | 2007-01-16 | Matsushita Electric Industrial Co., Ltd. | Load sensor and method of manufacturing the load sensor, paste used for the method, and method of manufacturing the paste |
EP1429357A1 (en) * | 2002-12-09 | 2004-06-16 | IEE INTERNATIONAL ELECTRONICS & ENGINEERING S.A. | Foil-type switching element with multi-layered carrier foil |
US6993973B2 (en) * | 2003-05-16 | 2006-02-07 | Mks Instruments, Inc. | Contaminant deposition control baffle for a capacitive pressure transducer |
JP2006047279A (ja) * | 2004-07-02 | 2006-02-16 | Alps Electric Co Ltd | ガラス基板及びそれを用いた静電容量型圧力センサ |
US7201057B2 (en) | 2004-09-30 | 2007-04-10 | Mks Instruments, Inc. | High-temperature reduced size manometer |
US7137301B2 (en) | 2004-10-07 | 2006-11-21 | Mks Instruments, Inc. | Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor |
US7141447B2 (en) | 2004-10-07 | 2006-11-28 | Mks Instruments, Inc. | Method of forming a seal between a housing and a diaphragm of a capacitance sensor |
US7089798B2 (en) * | 2004-10-18 | 2006-08-15 | Silverbrook Research Pty Ltd | Pressure sensor with thin membrane |
JP2006170893A (ja) * | 2004-12-17 | 2006-06-29 | Alps Electric Co Ltd | 静電容量型圧力センサ |
US7204150B2 (en) | 2005-01-14 | 2007-04-17 | Mks Instruments, Inc. | Turbo sump for use with capacitive pressure sensor |
DE102005027365A1 (de) * | 2005-06-14 | 2006-12-21 | Robert Bosch Gmbh | Hochdrucksensoreinrichtung und Verfahren zu ihrer Herstellung |
TWI288652B (en) * | 2006-05-29 | 2007-10-21 | Advanced Int Multitech Co Ltd | Joining method of golf club head |
TW200831166A (en) * | 2007-01-26 | 2008-08-01 | Advanced Int Multitech Co Ltd | Jointing method for a gold club head |
WO2008134906A1 (de) * | 2007-05-04 | 2008-11-13 | Carag Ag | Waage |
DE102008064654A1 (de) | 2008-08-05 | 2010-04-15 | Endress + Hauser Gmbh + Co. Kg | Verfahren zur Herstellung eines elastischen Körpers aus Al2O3- Keramik |
EP2229967B1 (en) * | 2009-03-17 | 2020-04-15 | F.Hoffmann-La Roche Ag | Cannula assembly and ambulatory infusion system with a pressure sensor made of stacked coplanar layers |
GB2469823B (en) * | 2009-04-28 | 2011-07-06 | Illinois Tool Works | Weighing method and apparatus |
KR101051348B1 (ko) * | 2009-07-13 | 2011-07-22 | 한국표준과학연구원 | 정전용량형 압력센서 및 그 제조방법 |
DE102009027742A1 (de) | 2009-07-15 | 2011-01-27 | Endress + Hauser Gmbh + Co. Kg | Kapazitive keramische Druckmesszelle und Drucksensor mit einer solchen Druckmesszelle |
DE102009046844A1 (de) | 2009-11-18 | 2011-05-19 | Endress + Hauser Gmbh + Co. Kg | Kapazitive keramische Druckmesszelle |
DE102009054909A1 (de) | 2009-12-17 | 2011-06-22 | Endress + Hauser GmbH + Co. KG, 79689 | Keramisches Produkt und Verfahren zu dessen Herstellung |
DE102012103166A1 (de) * | 2012-04-12 | 2013-10-17 | Endress + Hauser Gmbh + Co. Kg | Druckmesszelle und Verfahren zu ihrer Herstellung |
DE102012106236A1 (de) * | 2012-07-11 | 2014-01-16 | Endress + Hauser Gmbh + Co. Kg | Verfahren zum Fügen von Keramikkörpern mittels eines Aktivhartlots, Baugruppe mit mindestens zwei miteinander gefügten Keramikkörpern, insbesondere Druckmesszelle |
DE102014114882A1 (de) * | 2014-10-14 | 2016-04-14 | Endress + Hauser Gmbh + Co. Kg | Drucksensor |
DE102015105057A1 (de) * | 2015-04-01 | 2016-10-06 | Endress + Hauser Gmbh + Co. Kg | Kapazitiver Drucksensor |
DE102015108949A1 (de) * | 2015-06-08 | 2016-12-08 | Endress + Hauser Gmbh + Co. Kg | Aktivhartlot zum Aktivhartlöten von Keramik |
DE102015122220A1 (de) * | 2015-12-18 | 2017-06-22 | Endress + Hauser Gmbh + Co. Kg | Keramische Druckmesszelle mit mindestens einem Temperaturmesswandler und Druckmessaufnehmer mit einer solchen Druckmesszelle |
DE102016102775A1 (de) | 2016-02-17 | 2017-08-17 | Endress+Hauser Gmbh+Co. Kg | Kapazitiver Drucksensor |
US10640374B2 (en) * | 2017-05-18 | 2020-05-05 | Dunan Microstaq, Inc. | Method and structure of attachment layer for reducing stress transmission to attached MEMS die |
US10921943B2 (en) | 2019-04-30 | 2021-02-16 | Apple Inc. | Compliant material for protecting capacitive force sensors and increasing capacitive sensitivity |
US11300442B2 (en) | 2020-02-07 | 2022-04-12 | Illinois Tool Works Inc. | Weighing apparatus with alignment of accelerometer coordinate system and load cell coordinate system and related method |
US11592946B1 (en) | 2021-09-21 | 2023-02-28 | Apple Inc. | Capacitive gap force sensor with multi-layer fill |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4064550A (en) * | 1976-03-22 | 1977-12-20 | Hewlett-Packard Company | High fidelity pressure transducer |
US4198670A (en) * | 1978-11-20 | 1980-04-15 | General Motors Corporation | Capacitive pressure transducer |
US4740429A (en) * | 1985-07-22 | 1988-04-26 | Ngk Insulators, Ltd. | Metal-ceramic joined articles |
SE459887B (sv) * | 1987-02-12 | 1989-08-14 | Hydrolab Ab | Tryckgivare |
DE3901492A1 (de) * | 1988-07-22 | 1990-01-25 | Endress Hauser Gmbh Co | Drucksensor und verfahren zu seiner herstellung |
DE3910646A1 (de) * | 1989-04-01 | 1990-10-04 | Endress Hauser Gmbh Co | Kapazitiver drucksensor und verfahren zu seiner herstellung |
-
1990
- 1990-08-21 US US07/570,312 patent/US5050034A/en not_active Expired - Lifetime
- 1990-11-27 IE IE427790A patent/IE904277A1/en unknown
- 1990-11-30 DK DK90122994.8T patent/DK0445382T3/da active
- 1990-11-30 ES ES199090122994T patent/ES2041106T3/es not_active Expired - Lifetime
- 1990-11-30 DE DE9090122994T patent/DE59001567D1/de not_active Expired - Lifetime
- 1990-11-30 EP EP90122994A patent/EP0445382B1/de not_active Expired - Lifetime
- 1990-12-04 CA CA002031427A patent/CA2031427C/en not_active Expired - Lifetime
-
1991
- 1991-01-18 JP JP3004482A patent/JPH0750007B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0445382B1 (de) | 1993-05-26 |
DE59001567D1 (de) | 1993-07-01 |
IE904277A1 (en) | 1991-07-31 |
EP0445382A2 (de) | 1991-09-11 |
EP0445382A3 (en) | 1991-12-04 |
CA2031427A1 (en) | 1991-07-23 |
JPH0749277A (ja) | 1995-02-21 |
US5050034A (en) | 1991-09-17 |
JPH0750007B2 (ja) | 1995-05-31 |
DK0445382T3 (da) | 1993-06-21 |
CA2031427C (en) | 1996-07-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FG2A | Definitive protection |
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