DK0780674T3 - Trykmåleindretning med skærmelektrode - Google Patents

Trykmåleindretning med skærmelektrode

Info

Publication number
DK0780674T3
DK0780674T3 DK95120452T DK95120452T DK0780674T3 DK 0780674 T3 DK0780674 T3 DK 0780674T3 DK 95120452 T DK95120452 T DK 95120452T DK 95120452 T DK95120452 T DK 95120452T DK 0780674 T3 DK0780674 T3 DK 0780674T3
Authority
DK
Denmark
Prior art keywords
measuring device
pressure measuring
screen electrode
electrode
screen
Prior art date
Application number
DK95120452T
Other languages
English (en)
Inventor
Frank Dr Hegner
Lukas Dipl-Ing Klausmann
Original Assignee
Envec Mess Und Regeltechn Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Envec Mess Und Regeltechn Gmbh filed Critical Envec Mess Und Regeltechn Gmbh
Application granted granted Critical
Publication of DK0780674T3 publication Critical patent/DK0780674T3/da

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
DK95120452T 1995-12-22 1995-12-22 Trykmåleindretning med skærmelektrode DK0780674T3 (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP95120452A EP0780674B1 (de) 1995-12-22 1995-12-22 Druckmessanordnung mit Schirmelektrode

Publications (1)

Publication Number Publication Date
DK0780674T3 true DK0780674T3 (da) 2000-04-03

Family

ID=8219917

Family Applications (1)

Application Number Title Priority Date Filing Date
DK95120452T DK0780674T3 (da) 1995-12-22 1995-12-22 Trykmåleindretning med skærmelektrode

Country Status (6)

Country Link
US (1) US5877424A (da)
EP (1) EP0780674B1 (da)
JP (1) JP2777118B2 (da)
CA (1) CA2191175C (da)
DE (1) DE59507194D1 (da)
DK (1) DK0780674T3 (da)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1106982B1 (de) * 1999-12-10 2005-02-09 Endress + Hauser GmbH + Co. KG Druckmessgerät
DE10318678A1 (de) * 2003-04-24 2004-12-30 Vega Grieshaber Kg Sensor, insbesondere Druck-Sensor zur Befestigung an einem Behältnis
JP4736693B2 (ja) * 2005-10-12 2011-07-27 株式会社Ｉｈｉ 膜厚計測装置及び方法
US8093913B2 (en) 2008-04-24 2012-01-10 Ihi Corporation Film thickness measurement device and method
JP2010197057A (ja) * 2009-02-23 2010-09-09 Kyocera Corp 圧力検出装置用基体および圧力検出装置
FR3005763B1 (fr) 2013-05-17 2016-10-14 Fogale Nanotech Dispositif et procede d'interface de commande capacitive adapte a la mise en œuvre d'electrodes de mesures fortement resistives
DE102013114407A1 (de) 2013-12-18 2015-06-18 Endress + Hauser Gmbh + Co. Kg Drucksensor
FR3028061B1 (fr) * 2014-10-29 2016-12-30 Fogale Nanotech Dispositif capteur capacitif comprenant des electrodes ajourees
FR3032287B1 (fr) 2015-02-04 2018-03-09 Quickstep Technologies Llc Dispositif de detection capacitif multicouches, et appareil comprenant le dispositif

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3948102A (en) * 1974-07-31 1976-04-06 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Trielectrode capacitive pressure transducer
JPS57169644A (en) * 1981-04-14 1982-10-19 Nippon Denso Co Ltd Semiconductor type pressure sensor
DE3901492A1 (de) * 1988-07-22 1990-01-25 Endress Hauser Gmbh Co Drucksensor und verfahren zu seiner herstellung
DE3909186A1 (de) * 1989-03-21 1990-09-27 Endress Hauser Gmbh Co Elektrisch leitende durchfuehrung und verfahren zu ihrer herstellung
DE3909185A1 (de) * 1989-03-21 1990-09-27 Endress Hauser Gmbh Co Kapazitiver drucksensor und verfahren zu seiner herstellung
DE3910646A1 (de) * 1989-04-01 1990-10-04 Endress Hauser Gmbh Co Kapazitiver drucksensor und verfahren zu seiner herstellung
DE3940537A1 (de) * 1989-12-07 1991-06-13 Endress Hauser Gmbh Co Anordnung zur verarbeitung von sensorsignalen
JP2820530B2 (ja) * 1989-09-28 1998-11-05 エンドレス ウント ハウザー ゲゼルシャフト ミット ベシュレンクテル ハフツング ウント コンパニー センサ信号を処理するための装置
US5451940A (en) * 1989-12-20 1995-09-19 Endress U. Hauser Gmbh U. Co. Capacitive sensor signal processing arrangement using switch capacitor structures
US5050034A (en) * 1990-01-22 1991-09-17 Endress U. Hauser Gmbh U. Co. Pressure sensor and method of manufacturing same
JP2779978B2 (ja) * 1990-08-22 1998-07-23 沖電気工業株式会社 圧力センサの製造方法
FR2707002A1 (en) * 1993-06-21 1994-12-30 Jaeger Improved screened electrical sensor
DK0658754T3 (da) * 1993-12-14 1998-03-02 Envec Mess Und Regeltechn Gmbh Trykmåleindretning
JP2798377B2 (ja) * 1996-06-14 1998-09-17 優水化成工業株式会社 床下断熱板と断熱床パネル

Also Published As

Publication number Publication date
EP0780674B1 (de) 1999-11-03
CA2191175A1 (en) 1997-06-23
US5877424A (en) 1999-03-02
CA2191175C (en) 2001-02-13
JPH09189630A (ja) 1997-07-22
JP2777118B2 (ja) 1998-07-16
DE59507194D1 (de) 1999-12-09
EP0780674A1 (de) 1997-06-25

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