DE69530074D1 - Kapazitive Messvorrichtung - Google Patents

Kapazitive Messvorrichtung

Info

Publication number
DE69530074D1
DE69530074D1 DE69530074T DE69530074T DE69530074D1 DE 69530074 D1 DE69530074 D1 DE 69530074D1 DE 69530074 T DE69530074 T DE 69530074T DE 69530074 T DE69530074 T DE 69530074T DE 69530074 D1 DE69530074 D1 DE 69530074D1
Authority
DE
Germany
Prior art keywords
measuring device
capacitive measuring
capacitive
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69530074T
Other languages
English (en)
Other versions
DE69530074T2 (de
Inventor
Pascal Jordil
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tesa SARL
Original Assignee
Brown and Sharpe Tesa SA
Tesa Brown and Sharpe SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Brown and Sharpe Tesa SA, Tesa Brown and Sharpe SA filed Critical Brown and Sharpe Tesa SA
Application granted granted Critical
Publication of DE69530074D1 publication Critical patent/DE69530074D1/de
Publication of DE69530074T2 publication Critical patent/DE69530074T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2412—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap
    • G01D5/2415—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap adapted for encoders

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
DE69530074T 1995-06-07 1995-06-07 Kapazitive Messvorrichtung Expired - Lifetime DE69530074T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP95810372A EP0747673B1 (de) 1995-06-07 1995-06-07 Kapazitive Messvorrichtung

Publications (2)

Publication Number Publication Date
DE69530074D1 true DE69530074D1 (de) 2003-04-30
DE69530074T2 DE69530074T2 (de) 2004-03-04

Family

ID=8221749

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69530074T Expired - Lifetime DE69530074T2 (de) 1995-06-07 1995-06-07 Kapazitive Messvorrichtung

Country Status (4)

Country Link
US (1) US5977781A (de)
EP (1) EP0747673B1 (de)
JP (1) JP2824509B2 (de)
DE (1) DE69530074T2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9815826D0 (en) * 1998-07-22 1998-09-16 British Aerospace Capacitive position transducer
CN1155794C (zh) 1999-12-02 2004-06-30 株式会社三丰 静电电容式变位检测装置
JP2001201308A (ja) * 2000-01-21 2001-07-27 Mitsutoyo Corp 静電容量式変位検出装置及びその製造方法
US6925411B1 (en) * 2003-04-02 2005-08-02 Sun Microsystems, Inc. Method and apparatus for aligning semiconductor chips using an actively driven vernier
JP2007093287A (ja) * 2005-09-27 2007-04-12 Tietech Co Ltd リニアモータ
JP6313903B2 (ja) * 2015-03-20 2018-04-18 アルプス電気株式会社 回転式入力装置
JP6611467B2 (ja) * 2015-05-19 2019-11-27 キヤノン株式会社 変位検出装置、レンズ鏡筒、および、撮像装置
JP6823483B2 (ja) * 2017-02-02 2021-02-03 株式会社ミツトヨ 変位検出器
KR101992965B1 (ko) * 2017-11-22 2019-06-26 한국생산기술연구원 인코더 및 그 인코더의 오차를 보상하기 위한 방법

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH538114A (de) * 1971-05-06 1973-06-15 Bauer Messinstrumente Ag Vorrichtung zur Digitalen, kapazitiven Messung der örtlichen Lage von Trennschichten zwischen mindestens zwei aneinandergrenzenden Medien
CH651136A5 (de) 1980-11-21 1985-08-30 Hans Ulrich Meyer Kapazitives laengen- und winkelmessverfahren.
CH648929A5 (fr) * 1982-07-07 1985-04-15 Tesa Sa Dispositif de mesure capacitif de deplacement.
DE3340782C2 (de) 1983-11-11 1985-12-05 Mauser-Werke Oberndorf Gmbh, 7238 Oberndorf Kapazitive Längen- und Winkelmeßeinrichtung
US4879508A (en) * 1986-04-04 1989-11-07 Mitutoyo Corporation Capacitance-type measuring device for absolute measurement of positions
DE3786424T2 (de) 1986-04-04 1993-10-28 Mitutoyo Corp Transduktor vom kapazitiven Typ für Lagemessungen.
JPS62235504A (ja) * 1986-04-04 1987-10-15 Mitsutoyo Corp 容量型位置測定トランスデユ−サ
JPS62242816A (ja) * 1986-04-15 1987-10-23 Mitsutoyo Corp 容量型位置測定トランスデユ−サの信号検出方法及び回路
US4959615A (en) 1988-05-31 1990-09-25 Micro Encoder, Inc. Electrode structure for capacitance-type measurement transducers
DE68906382T2 (de) 1989-06-28 1993-08-12 Mitutoyo Corp Kapazitives messverfahren fuer absolutwegmessung.
EP0413922B1 (de) 1989-06-29 1993-09-22 Mitutoyo Corporation Kapazitive Einrichtung zur absoluten Positionsmessung
DE69014577T2 (de) 1989-10-10 1995-07-27 Mitutoyo Corp Verfahren und Vorrichtung zur gleichzeitigen Messung der Winkel- und Axialposition.
US5239307A (en) * 1989-10-10 1993-08-24 Micro Encoder Inc. Method and apparatus for sensing of position
US5225830A (en) 1991-02-26 1993-07-06 Mitutoyo Combination optical and capacitive absolute position apparatus and method
DE4237652A1 (de) * 1992-11-07 1994-05-11 Peter Dr Bauer Absolutes kapazitives Wegmeßsystem
US5469364A (en) * 1993-03-15 1995-11-21 Hughey; Bradley W. Apparatus and methods for measuring and detecting variations in the value of a capacitor
DE4313344A1 (de) * 1993-04-23 1994-11-03 Roch Pierre Ets Kapazitive Meßeinrichtung
US5574381A (en) * 1995-01-06 1996-11-12 Mitutoyo Corporation Sealed mechanical configuration for electronic calipers for reliable operation in contaminated environments
US5731707A (en) * 1996-04-17 1998-03-24 Mitutoyo Corporation Method and apparatus for synthesizing spatial waveforms in an electronic position encoder

Also Published As

Publication number Publication date
JPH08334378A (ja) 1996-12-17
JP2824509B2 (ja) 1998-11-11
EP0747673B1 (de) 2003-03-26
DE69530074T2 (de) 2004-03-04
US5977781A (en) 1999-11-02
EP0747673A1 (de) 1996-12-11

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: TESA SA, RENENS, CH

8364 No opposition during term of opposition