DE69525819D1 - Kapazitives Verschiebungsmessgerät - Google Patents

Kapazitives Verschiebungsmessgerät

Info

Publication number
DE69525819D1
DE69525819D1 DE69525819T DE69525819T DE69525819D1 DE 69525819 D1 DE69525819 D1 DE 69525819D1 DE 69525819 T DE69525819 T DE 69525819T DE 69525819 T DE69525819 T DE 69525819T DE 69525819 D1 DE69525819 D1 DE 69525819D1
Authority
DE
Germany
Prior art keywords
measuring device
displacement measuring
capacitive displacement
capacitive
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69525819T
Other languages
English (en)
Other versions
DE69525819T2 (de
Inventor
Kouji Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP33068994A external-priority patent/JP2837636B2/ja
Priority claimed from JP6332084A external-priority patent/JP2889143B2/ja
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Publication of DE69525819D1 publication Critical patent/DE69525819D1/de
Application granted granted Critical
Publication of DE69525819T2 publication Critical patent/DE69525819T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2412—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap
    • G01D5/2415—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap adapted for encoders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B3/00—Measuring instruments characterised by the use of mechanical techniques
    • G01B3/20—Slide gauges
    • G01B3/205—Slide gauges provided with a counter for digital indication of the measured dimension
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/2403—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by moving plates, not forming part of the capacitor itself, e.g. shields

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
DE69525819T 1994-12-07 1995-11-28 Kapazitives Verschiebungsmessgerät Expired - Fee Related DE69525819T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP33068994A JP2837636B2 (ja) 1994-12-07 1994-12-07 静電容量式変位測定装置
JP6332084A JP2889143B2 (ja) 1994-12-12 1994-12-12 静電容量式変位測定装置

Publications (2)

Publication Number Publication Date
DE69525819D1 true DE69525819D1 (de) 2002-04-18
DE69525819T2 DE69525819T2 (de) 2002-09-19

Family

ID=26573609

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69535508T Expired - Lifetime DE69535508T2 (de) 1994-12-07 1995-11-28 Kapazitive Wegmesseinrichtung
DE69525819T Expired - Fee Related DE69525819T2 (de) 1994-12-07 1995-11-28 Kapazitives Verschiebungsmessgerät

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69535508T Expired - Lifetime DE69535508T2 (de) 1994-12-07 1995-11-28 Kapazitive Wegmesseinrichtung

Country Status (4)

Country Link
US (1) US5691646A (de)
EP (2) EP1070938B1 (de)
CN (1) CN1051152C (de)
DE (2) DE69535508T2 (de)

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JP3256443B2 (ja) * 1996-09-20 2002-02-12 株式会社ミツトヨ 静電容量式変位測定装置
JP3115555B2 (ja) 1998-04-03 2000-12-11 株式会社ミツトヨ マイクロメータ
JP3246726B2 (ja) * 1998-11-13 2002-01-15 株式会社ミツトヨ 静電容量式変位検出器及び測定装置
US6587093B1 (en) * 1999-11-04 2003-07-01 Synaptics Incorporated Capacitive mouse
US6480007B1 (en) * 2000-04-05 2002-11-12 Trw Inc. Capacitive sensor excitation techniques
US6400162B1 (en) * 2000-07-21 2002-06-04 Ade Corporation Capacitive displacement sensor for measuring thin targets
WO2002011792A1 (en) 2000-08-10 2002-02-14 Novo Nordisk A/S A support for a cartridge for transferring an electronically readable information to an electronic circuit, and use of a composite material in a support
DE10048881A1 (de) * 2000-09-29 2002-03-07 Infineon Technologies Ag Vorrichtung und Verfahren zum planen Verbinden zweier Wafer für ein Dünnschleifen und ein Trennen eines Produkt-Wafers
US7371562B2 (en) * 2000-10-30 2008-05-13 Sru Biosystems, Inc. Guided mode resonant filter biosensor using a linear grating surface structure
US7575939B2 (en) * 2000-10-30 2009-08-18 Sru Biosystems, Inc. Optical detection of label-free biomolecular interactions using microreplicated plastic sensor elements
GB0102324D0 (en) * 2001-01-30 2001-03-14 Renishaw Plc Capacitance type displacement responsive device and a suspension system for a displacement responsive device
ATE355093T1 (de) * 2001-05-16 2006-03-15 Lilly Co Eli Arzneimitteleinspritzvorrichtung mit rückstellung erleichternder antriebsanordnung
DE10133216B4 (de) * 2001-07-09 2005-01-27 Tecpharma Licensing Ag Positionsdetektion
US7927822B2 (en) * 2002-09-09 2011-04-19 Sru Biosystems, Inc. Methods for screening cells and antibodies
DE602004015432D1 (de) 2003-03-24 2008-09-11 Novo Nordisk As Transparentes elektronisches markieren eines medikamentenbehälters
JP4270128B2 (ja) * 2003-04-11 2009-05-27 三菱電機株式会社 回転型エンコーダ
JP4455201B2 (ja) * 2004-07-20 2010-04-21 富士通マイクロエレクトロニクス株式会社 検出回路
US7135874B2 (en) * 2004-08-06 2006-11-14 Waters Investments Limited System and method for enhanced measurement of rheological properties
US7075317B2 (en) * 2004-08-06 2006-07-11 Waters Investment Limited System and method for measurement of small-angle or small-displacement
DE102004052587A1 (de) * 2004-10-29 2006-05-04 Martin Steffek Wegaufnehmer
EP1881859B1 (de) 2005-05-10 2011-01-19 Novo Nordisk A/S Injektionsvorrichtung mit optischem sensor
AU2006299142B2 (en) 2005-09-22 2011-11-03 Novo Nordisk A/S Device and method for contact free absolute position determination
ATE478396T1 (de) 2006-03-20 2010-09-15 Novo Nordisk As Kontaktfreie ablesung von speicheridentifikationscodes
EP2011223B1 (de) 2006-04-12 2018-06-13 Novo Nordisk A/S Absolutpositions-bestimmung eines beweglich angeordneten elements in einer vorrichtung zur verabreichung von medikamenten
BRPI0710915A2 (pt) * 2006-04-26 2011-09-27 Novo Nordisk As dispositivo de distribuição de medicação e método para determinar posições absolutas de um primeiro membro em relação a um segundo membro de um dispositivo de distribuição de medicação
JP5295217B2 (ja) 2007-03-21 2013-09-18 ノボ・ノルデイスク・エー／エス 容器識別を有する医薬送達システム及び当該医薬送達システムに使用される容器
US9134307B2 (en) 2007-07-11 2015-09-15 X-Body, Inc. Method for determining ion channel modulating properties of a test reagent
CN101354231B (zh) * 2007-07-28 2011-07-27 深圳市联思精密机器有限公司 一种栅状电极位移传感器
EP2396059B1 (de) 2009-02-13 2014-01-08 Novo Nordisk A/S Medizinische vorrichtung und kartusche
JP5479236B2 (ja) * 2010-06-15 2014-04-23 キヤノン株式会社 ロータリーエンコーダ
JP5574899B2 (ja) * 2010-09-24 2014-08-20 キヤノン株式会社 ロータリーエンコーダ及びこれを備えた光学機器
US9092082B2 (en) 2010-12-22 2015-07-28 Synaptics Incorporated Methods and apparatus for mounting a touch sensor device
WO2014026006A2 (en) * 2012-08-08 2014-02-13 Marvell World Trade Ltd. Controlling fan motors using capacitive sensing
USRE47140E1 (en) * 2013-12-11 2018-11-27 Tesa Sa Micrometer
USD744359S1 (en) * 2013-12-11 2015-12-01 Tesa Sa Micrometer
AU2017237925B2 (en) 2016-03-25 2019-04-04 Eli Lilly And Company Determination of a dose set and delivered in a medication delivery device
US11266788B2 (en) 2016-04-19 2022-03-08 Eli Lilly And Company Determination of a dose in a medication delivery device using two moving arrays with teeth and a sensor
FR3052250B1 (fr) * 2016-06-06 2020-05-01 Continental Automotive France Dispositif de mesure de position angulaire d'un arbre ou similaire
CN106124796B (zh) * 2016-06-28 2019-01-01 蚌埠大洋传感系统工程有限公司 一种高精度角速度传感器
CN106018500B (zh) * 2016-08-01 2019-02-22 清华大学深圳研究生院 一种电容传感器及测量系统
JP6718554B2 (ja) 2016-08-12 2020-07-08 イーライ リリー アンド カンパニー 薬剤送達デバイスにおける用量の判定
CN107806892A (zh) * 2016-09-09 2018-03-16 西门子公司 柱型电容编码器和电机
JP6828165B2 (ja) 2016-12-15 2021-02-10 イーライ リリー アンド カンパニー 感知システムを備えた薬剤送達デバイス
JP6823483B2 (ja) * 2017-02-02 2021-02-03 株式会社ミツトヨ 変位検出器
US20190069786A1 (en) * 2017-09-01 2019-03-07 Nestec Sa Heart rate detection device and related systems and methods
CN108168417B (zh) 2018-01-17 2019-06-14 中国矿业大学 一种立井钢丝绳罐道滑套磨损量检测装置及其检测方法
WO2020262385A1 (ja) 2019-06-28 2020-12-30 パナソニックＩｐマネジメント株式会社 入力装置
CN113503810A (zh) * 2021-08-11 2021-10-15 中国工程物理研究院机械制造工艺研究所 一种回转体狭小间隙层间转角测量方法及装置
CN114136197B (zh) * 2021-11-26 2022-12-06 中国科学院长春光学精密机械与物理研究所 高精度差分电容测头

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JPS5750006U (de) * 1980-09-05 1982-03-20
US4463333A (en) * 1982-09-29 1984-07-31 Farrand Industries, Inc. Transformer-type position transducer
DE3426750A1 (de) * 1984-07-20 1986-01-23 Mauser-Werke Oberndorf Gmbh, 7238 Oberndorf Messgeraet und fertigungsvorrichtung
JP2554465B2 (ja) * 1985-08-09 1996-11-13 株式会社 エスジー アブソリユ−ト位置検出装置
EP0226716A3 (de) * 1985-09-16 1989-01-11 Hewlett-Packard Company Kapazitives Weggebersystem
CH666122A5 (fr) * 1986-04-10 1988-06-30 Hans Ulrich Meyer Capteur capacitif de position.
US4862752A (en) * 1986-05-21 1989-09-05 Ferrotec, Inc. D.C. excited capacitive shaft rotation transducer
US4864300A (en) * 1987-06-18 1989-09-05 Trw Inc. Rotating high-resolution shaft encoder utilizing capacitive sensing
US5239307A (en) * 1989-10-10 1993-08-24 Micro Encoder Inc. Method and apparatus for sensing of position
DE4201813A1 (de) * 1992-01-24 1993-07-29 Pav Praezisions Apparatebau Ag Vorrichtung zum messen einer geometrischen groesse
SE470271B (sv) * 1992-06-29 1993-12-20 Johansson Ab C E Skalsystem för absolutmätning
DE4313344A1 (de) * 1993-04-23 1994-11-03 Roch Pierre Ets Kapazitive Meßeinrichtung
JP2965444B2 (ja) * 1993-10-01 1999-10-18 株式会社ミツトヨ 定圧型測定機
CH689190A5 (fr) * 1993-10-19 1998-11-30 Hans Ulrich Meyer Instrument de mesure de longueurs ou d'angles.

Also Published As

Publication number Publication date
EP0716290A3 (de) 1996-10-16
EP0716290B1 (de) 2002-03-13
EP0716290A2 (de) 1996-06-12
EP1070938A2 (de) 2001-01-24
DE69535508D1 (de) 2007-07-19
DE69525819T2 (de) 2002-09-19
DE69535508T2 (de) 2007-10-04
EP1070938B1 (de) 2007-06-06
EP1070938A3 (de) 2001-09-12
CN1141426A (zh) 1997-01-29
CN1051152C (zh) 2000-04-05
US5691646A (en) 1997-11-25

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee