DE69915212D1 - Kapazitive Wegmesseinrichtung - Google Patents
Kapazitive WegmesseinrichtungInfo
- Publication number
- DE69915212D1 DE69915212D1 DE69915212T DE69915212T DE69915212D1 DE 69915212 D1 DE69915212 D1 DE 69915212D1 DE 69915212 T DE69915212 T DE 69915212T DE 69915212 T DE69915212 T DE 69915212T DE 69915212 D1 DE69915212 D1 DE 69915212D1
- Authority
- DE
- Germany
- Prior art keywords
- measuring device
- displacement measuring
- capacitive displacement
- capacitive
- measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
- G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
- G01D5/2412—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap
- G01D5/2415—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap adapted for encoders
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/003—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP32424498A JP3246726B2 (ja) | 1998-11-13 | 1998-11-13 | 静電容量式変位検出器及び測定装置 |
JP32424498 | 1998-11-13 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69915212D1 true DE69915212D1 (de) | 2004-04-08 |
DE69915212T2 DE69915212T2 (de) | 2004-07-29 |
Family
ID=18163649
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69915212T Expired - Lifetime DE69915212T2 (de) | 1998-11-13 | 1999-11-05 | Kapazitive Wegmesseinrichtung |
Country Status (5)
Country | Link |
---|---|
US (1) | US6292001B1 (de) |
EP (1) | EP1001252B1 (de) |
JP (1) | JP3246726B2 (de) |
CN (1) | CN1157585C (de) |
DE (1) | DE69915212T2 (de) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001183163A (ja) * | 1999-12-28 | 2001-07-06 | Mitsutoyo Corp | 変位測定装置 |
JP2001201308A (ja) * | 2000-01-21 | 2001-07-27 | Mitsutoyo Corp | 静電容量式変位検出装置及びその製造方法 |
GB0114456D0 (en) * | 2001-06-14 | 2001-08-08 | Koninkl Philips Electronics Nv | Object sensing |
DE102005046099A1 (de) * | 2005-09-27 | 2007-03-29 | Valeo Schalter Und Sensoren Gmbh | Vorrichtung zur Erfassung von Schaltstellungen eines Schaltmittels |
CN101354231B (zh) * | 2007-07-28 | 2011-07-27 | 深圳市联思精密机器有限公司 | 一种栅状电极位移传感器 |
WO2010043935A1 (en) * | 2008-10-17 | 2010-04-22 | Faurecia Bloc Avant | Object detection device for an automotive vehicle |
US8638109B2 (en) * | 2009-12-31 | 2014-01-28 | Mapper Lithography Ip B.V. | Capacitive sensing system with differential pairs |
US8653834B2 (en) * | 2010-01-15 | 2014-02-18 | Synaptics Incorporated | Input device with floating electrodes having at least one aperture |
JP2011163865A (ja) * | 2010-02-08 | 2011-08-25 | Seidensha Co Ltd | 回転型静電エンコーダ |
CN102538650A (zh) * | 2010-12-29 | 2012-07-04 | 沈阳新松机器人自动化股份有限公司 | 一种纳米级微小位移测量装置 |
JP6327874B2 (ja) * | 2014-02-04 | 2018-05-23 | 株式会社ミツトヨ | 誘導型位置測定装置 |
CN104913712A (zh) * | 2014-03-13 | 2015-09-16 | 深圳市联思精密机器有限公司 | 一种容栅位移传感器 |
CN103822571B (zh) * | 2014-03-19 | 2016-11-02 | 重庆理工大学 | 基于单排多层结构的电场式时栅直线位移传感器 |
JP6475936B2 (ja) * | 2014-08-19 | 2019-02-27 | 株式会社ミツトヨ | エンコーダスケールおよびその製造方法 |
JP6611467B2 (ja) | 2015-05-19 | 2019-11-27 | キヤノン株式会社 | 変位検出装置、レンズ鏡筒、および、撮像装置 |
US9704012B2 (en) * | 2015-09-10 | 2017-07-11 | Cypress Semiconductor Corporation | Fingerprint sensor pattern |
GB2550967A (en) * | 2016-06-03 | 2017-12-06 | Brandenburg (Uk) Ltd | Sensing of objects |
JP6823483B2 (ja) * | 2017-02-02 | 2021-02-03 | 株式会社ミツトヨ | 変位検出器 |
CN111739268A (zh) * | 2020-07-01 | 2020-10-02 | 吴才远 | 一种智能门锁上锁提醒装置 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4959615A (en) | 1988-05-31 | 1990-09-25 | Micro Encoder, Inc. | Electrode structure for capacitance-type measurement transducers |
JPS62235504A (ja) | 1986-04-04 | 1987-10-15 | Mitsutoyo Corp | 容量型位置測定トランスデユ−サ |
US5691646A (en) | 1994-12-07 | 1997-11-25 | Mitutoya Corporation | Capacitance-type displacement measuring device with electrodes having spiral patterns |
JP3256443B2 (ja) | 1996-09-20 | 2002-02-12 | 株式会社ミツトヨ | 静電容量式変位測定装置 |
-
1998
- 1998-11-13 JP JP32424498A patent/JP3246726B2/ja not_active Expired - Fee Related
-
1999
- 1999-10-20 US US09/407,865 patent/US6292001B1/en not_active Expired - Lifetime
- 1999-10-29 CN CNB991232895A patent/CN1157585C/zh not_active Expired - Lifetime
- 1999-11-05 EP EP99122155A patent/EP1001252B1/de not_active Expired - Lifetime
- 1999-11-05 DE DE69915212T patent/DE69915212T2/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE69915212T2 (de) | 2004-07-29 |
EP1001252A1 (de) | 2000-05-17 |
US6292001B1 (en) | 2001-09-18 |
CN1157585C (zh) | 2004-07-14 |
JP3246726B2 (ja) | 2002-01-15 |
CN1254087A (zh) | 2000-05-24 |
JP2000146508A (ja) | 2000-05-26 |
EP1001252B1 (de) | 2004-03-03 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |