DE69621334D1 - Kapazitive Dimensionsmesseinrichtung - Google Patents

Kapazitive Dimensionsmesseinrichtung

Info

Publication number
DE69621334D1
DE69621334D1 DE69621334T DE69621334T DE69621334D1 DE 69621334 D1 DE69621334 D1 DE 69621334D1 DE 69621334 T DE69621334 T DE 69621334T DE 69621334 T DE69621334 T DE 69621334T DE 69621334 D1 DE69621334 D1 DE 69621334D1
Authority
DE
Germany
Prior art keywords
capacitive
measuring device
dimension measuring
dimension
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69621334T
Other languages
English (en)
Other versions
DE69621334T2 (de
Inventor
Pascal Jordil
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tesa SARL
Original Assignee
Brown and Sharpe Tesa SA
Tesa Brown and Sharpe SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Brown and Sharpe Tesa SA, Tesa Brown and Sharpe SA filed Critical Brown and Sharpe Tesa SA
Application granted granted Critical
Publication of DE69621334D1 publication Critical patent/DE69621334D1/de
Publication of DE69621334T2 publication Critical patent/DE69621334T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2412—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap
    • G01D5/2415—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap adapted for encoders
DE69621334T 1996-10-11 1996-10-11 Kapazitive Dimensionsmesseinrichtung Expired - Lifetime DE69621334T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP96810686A EP0836076B1 (de) 1996-10-11 1996-10-11 Kapazitive Dimensionsmesseinrichtung

Publications (2)

Publication Number Publication Date
DE69621334D1 true DE69621334D1 (de) 2002-06-27
DE69621334T2 DE69621334T2 (de) 2003-01-09

Family

ID=8225723

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69621334T Expired - Lifetime DE69621334T2 (de) 1996-10-11 1996-10-11 Kapazitive Dimensionsmesseinrichtung

Country Status (4)

Country Link
US (1) US6072318A (de)
EP (1) EP0836076B1 (de)
JP (1) JP3180187B2 (de)
DE (1) DE69621334T2 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0973008B1 (de) 1998-07-17 2003-11-19 Tesa Sa Elektronisches Mikrometer
JP4233698B2 (ja) * 1999-08-12 2009-03-04 セイコーインスツル株式会社 指紋読み取り装置及び方法
US7142500B2 (en) 2002-01-11 2006-11-28 Hewlett-Packard Development Company, L.P. Sensor with varying capacitance based on relative position between objects
JP2005221472A (ja) * 2004-02-09 2005-08-18 Olympus Corp 静電型エンコーダ及び静電型変位測定方法
WO2009120193A1 (en) * 2008-03-26 2009-10-01 Hewlett-Packard Development Company, L.P. Capacitive sensor having cyclic and absolute electrode sets
JP5254088B2 (ja) * 2009-03-13 2013-08-07 株式会社東芝 センサ装置及び間欠処理方法
CN101949682B (zh) * 2010-08-14 2012-10-24 桂林广陆数字测控股份有限公司 绝对位置测量容栅位移测量方法、传感器及其运行方法
RU2483276C1 (ru) * 2011-12-28 2013-05-27 Общество С Ограниченной Ответственностью "Конструкторское Бюро "Дорс" (Ооо "Кб "Дорс") Способ обнаружения неоднородностей листа и устройство для его осуществления
DE102012012864A1 (de) * 2012-06-28 2014-01-02 Brose Fahrzeugteile Gmbh & Co. Kommanditgesellschaft, Hallstadt Kapazitiver Sensor für eine Kollisionsschutzvorrichtung
DE102013104782A1 (de) 2013-05-08 2014-11-13 Hamilton Bonaduz Ag Messsystem
US20140333329A1 (en) * 2013-05-09 2014-11-13 Avago Technologies General IP (Singapore) Pte. Ltd . Method and apparatus for measuring thickness of layer in printed circuit board
EP3141772B1 (de) 2015-09-09 2018-05-02 Ogura Clutch Co., Ltd. Elektromagnetische kupplung
JP6862668B2 (ja) * 2016-03-25 2021-04-21 ヤマハ株式会社 基板及び位置検出装置
CN110388870A (zh) * 2018-04-23 2019-10-29 桂林市晶瑞传感技术有限公司 用于传感器装置的位移测量系统和位移测量方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE411392B (sv) * 1977-12-09 1979-12-17 Inst Mikrovagsteknik Vid Tekni Metanordning for kapacitiv bestemning av det inbordes leget hos tva relativt varandra rorliga delar
DE3020411C2 (de) * 1980-05-27 1983-09-22 Hans Ulrich St.Sulpice Waadt Meyer Vorrichtung zum Messen der Verschiebung zweier Körper
CH651136A5 (de) * 1980-11-21 1985-08-30 Hans Ulrich Meyer Kapazitives laengen- und winkelmessverfahren.
CH648929A5 (fr) * 1982-07-07 1985-04-15 Tesa Sa Dispositif de mesure capacitif de deplacement.
JPS6093311A (ja) * 1983-10-27 1985-05-25 Mitsutoyo Mfg Co Ltd 容量式変位測定機
DE3340782C2 (de) * 1983-11-11 1985-12-05 Mauser-Werke Oberndorf Gmbh, 7238 Oberndorf Kapazitive Längen- und Winkelmeßeinrichtung
JPS62235504A (ja) * 1986-04-04 1987-10-15 Mitsutoyo Corp 容量型位置測定トランスデユ−サ
DE3740544C2 (de) * 1987-11-30 1999-08-12 Neutron Mikroelektronik Gmbh Einrichtung zur Wandlung einer Weg- oder Winkelgröße in eine elektrische inkrementale oder digitale Größe
DE3932800A1 (de) * 1989-09-30 1991-04-11 Hengstler Gmbh Signalumwandlung fuer inkrementalgeber
US5225830A (en) * 1991-02-26 1993-07-06 Mitutoyo Combination optical and capacitive absolute position apparatus and method
CH685214A5 (fr) * 1991-10-15 1995-04-28 Hans Ulrich Meyer Capteur capacitif de position.
JP3110530B2 (ja) * 1991-11-22 2000-11-20 株式会社エスジー 位置検出装置及び時間測定装置
DE4313344A1 (de) * 1993-04-23 1994-11-03 Roch Pierre Ets Kapazitive Meßeinrichtung

Also Published As

Publication number Publication date
EP0836076A1 (de) 1998-04-15
US6072318A (en) 2000-06-06
JPH10132602A (ja) 1998-05-22
EP0836076B1 (de) 2002-05-22
JP3180187B2 (ja) 2001-06-25
DE69621334T2 (de) 2003-01-09

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: TESA SA, RENENS, CH