DE68906382T2 - Kapazitives messverfahren fuer absolutwegmessung. - Google Patents
Kapazitives messverfahren fuer absolutwegmessung.Info
- Publication number
- DE68906382T2 DE68906382T2 DE8989111779T DE68906382T DE68906382T2 DE 68906382 T2 DE68906382 T2 DE 68906382T2 DE 8989111779 T DE8989111779 T DE 8989111779T DE 68906382 T DE68906382 T DE 68906382T DE 68906382 T2 DE68906382 T2 DE 68906382T2
- Authority
- DE
- Germany
- Prior art keywords
- measurement
- absolute
- trail
- capacitive
- measurement method
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/003—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
- G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
- G01D5/2412—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap
- G01D5/2415—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap adapted for encoders
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03M—CODING; DECODING; CODE CONVERSION IN GENERAL
- H03M1/00—Analogue/digital conversion; Digital/analogue conversion
- H03M1/12—Analogue/digital converters
- H03M1/22—Analogue/digital converters pattern-reading type
- H03M1/24—Analogue/digital converters pattern-reading type using relatively movable reader and disc or strip
- H03M1/28—Analogue/digital converters pattern-reading type using relatively movable reader and disc or strip with non-weighted coding
- H03M1/287—Analogue/digital converters pattern-reading type using relatively movable reader and disc or strip with non-weighted coding using gradually changing slit width or pitch within one track; using plural tracks having slightly different pitches, e.g. of the Vernier or nonius type
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Theoretical Computer Science (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP89111779A EP0404980B1 (de) | 1989-06-28 | 1989-06-28 | Kapazitives Messverfahren für Absolutwegmessung |
Publications (2)
Publication Number | Publication Date |
---|---|
DE68906382D1 DE68906382D1 (de) | 1993-06-09 |
DE68906382T2 true DE68906382T2 (de) | 1993-08-12 |
Family
ID=8201547
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8989111779T Expired - Lifetime DE68906382T2 (de) | 1989-06-28 | 1989-06-28 | Kapazitives messverfahren fuer absolutwegmessung. |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP0404980B1 (de) |
DE (1) | DE68906382T2 (de) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4959615A (en) | 1988-05-31 | 1990-09-25 | Micro Encoder, Inc. | Electrode structure for capacitance-type measurement transducers |
DE69003493T2 (de) * | 1989-06-29 | 1994-01-20 | Mitutoyo Corp | Kapazitive Einrichtung zur absoluten Positionsmessung. |
US5416479A (en) * | 1992-03-23 | 1995-05-16 | Hewlett-Packard Corporation | Handle for position encoder system |
US5414420A (en) * | 1992-03-23 | 1995-05-09 | Hewlett-Packard Corporation | Switch interconnect for position encoder system |
US5428355A (en) * | 1992-03-23 | 1995-06-27 | Hewlett-Packard Corporation | Position encoder system |
US5440501A (en) * | 1992-06-26 | 1995-08-08 | Mitutoyo Corporation | Energy saving capacitance type measuring device for absolute measurement of positions |
JP2878913B2 (ja) * | 1992-09-14 | 1999-04-05 | 株式会社ミツトヨ | 変位測定装置 |
DE4313344A1 (de) * | 1993-04-23 | 1994-11-03 | Roch Pierre Ets | Kapazitive Meßeinrichtung |
DE69530074T2 (de) | 1995-06-07 | 2004-03-04 | Brown & Sharpe Tesa S.A. | Kapazitive Messvorrichtung |
US6747462B2 (en) * | 2002-03-18 | 2004-06-08 | Hewlett-Packard Development Company, L.P. | Method and system for determining position of a body |
US8614587B1 (en) | 2013-03-12 | 2013-12-24 | Cypress Semiconductor Corp. | Capacitance sensing circuits and methods |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SE411392B (sv) * | 1977-12-09 | 1979-12-17 | Inst Mikrovagsteknik Vid Tekni | Metanordning for kapacitiv bestemning av det inbordes leget hos tva relativt varandra rorliga delar |
US4429307A (en) * | 1982-01-29 | 1984-01-31 | Dataproducts Corporation | Capacitive transducer with continuous sinusoidal output |
JPS62235504A (ja) * | 1986-04-04 | 1987-10-15 | Mitsutoyo Corp | 容量型位置測定トランスデユ−サ |
DE3786424T2 (de) * | 1986-04-04 | 1993-10-28 | Mitutoyo Corp | Transduktor vom kapazitiven Typ für Lagemessungen. |
-
1989
- 1989-06-28 DE DE8989111779T patent/DE68906382T2/de not_active Expired - Lifetime
- 1989-06-28 EP EP89111779A patent/EP0404980B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0404980B1 (de) | 1993-05-05 |
EP0404980A1 (de) | 1991-01-02 |
DE68906382D1 (de) | 1993-06-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |