DE69003493T2 - Kapazitive Einrichtung zur absoluten Positionsmessung. - Google Patents

Kapazitive Einrichtung zur absoluten Positionsmessung.

Info

Publication number
DE69003493T2
DE69003493T2 DE90111889T DE69003493T DE69003493T2 DE 69003493 T2 DE69003493 T2 DE 69003493T2 DE 90111889 T DE90111889 T DE 90111889T DE 69003493 T DE69003493 T DE 69003493T DE 69003493 T2 DE69003493 T2 DE 69003493T2
Authority
DE
Germany
Prior art keywords
absolute position
position measurement
capacitive device
capacitive
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE90111889T
Other languages
English (en)
Other versions
DE69003493D1 (de
Inventor
Andermo Nils
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US07/372,773 external-priority patent/US5023559A/en
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Publication of DE69003493D1 publication Critical patent/DE69003493D1/de
Application granted granted Critical
Publication of DE69003493T2 publication Critical patent/DE69003493T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2412—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap
    • G01D5/2415—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap adapted for encoders

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
DE90111889T 1989-06-29 1990-06-22 Kapazitive Einrichtung zur absoluten Positionsmessung. Expired - Lifetime DE69003493T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/372,773 US5023559A (en) 1986-04-04 1989-06-29 Capacitance-type measuring device for absolute measurement of positions

Publications (2)

Publication Number Publication Date
DE69003493D1 DE69003493D1 (de) 1993-10-28
DE69003493T2 true DE69003493T2 (de) 1994-01-20

Family

ID=23469585

Family Applications (1)

Application Number Title Priority Date Filing Date
DE90111889T Expired - Lifetime DE69003493T2 (de) 1989-06-29 1990-06-22 Kapazitive Einrichtung zur absoluten Positionsmessung.

Country Status (3)

Country Link
EP (1) EP0413922B1 (de)
JP (1) JPH0774740B2 (de)
DE (1) DE69003493T2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5440501A (en) * 1992-06-26 1995-08-08 Mitutoyo Corporation Energy saving capacitance type measuring device for absolute measurement of positions
EP0747673B1 (de) 1995-06-07 2003-03-26 Brown & Sharpe Tesa S.A. Kapazitive Messvorrichtung
KR101400298B1 (ko) * 2012-06-14 2014-06-27 삼성디스플레이 주식회사 표시 장치
CN106152932B (zh) * 2015-03-31 2019-04-05 西门子公司 一种旋转角度测量装置及测量方法
CN109893244B (zh) * 2017-12-08 2024-04-19 Igea有限公司 电穿孔过程使用的手持件的可扩展电极的操纵和控制系统
CN114087969B (zh) * 2021-11-18 2023-10-20 重庆理工大学 一种拼接式绝对直线位移传感器

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1111425B (it) * 1977-05-18 1986-01-13 Conte Alberto Trasduttore assoluto di precisione per misure di posizioni lineari od angolari
JPS6093312A (ja) * 1983-10-27 1985-05-25 Mitsutoyo Mfg Co Ltd 容量式変位測定機
DE3786424T2 (de) * 1986-04-04 1993-10-28 Mitutoyo Corp Transduktor vom kapazitiven Typ für Lagemessungen.
JPS62239019A (ja) * 1986-04-11 1987-10-19 Mitsutoyo Corp 容量型位置測定トランスデユ−サ
EP0404975A1 (de) * 1989-06-28 1991-01-02 Mitutoyo Corporation Kapazitives Messinstrument mit verbesserter Elektrodeneinrichtung
EP0404980B1 (de) * 1989-06-28 1993-05-05 Mitutoyo Corporation Kapazitives Messverfahren für Absolutwegmessung

Also Published As

Publication number Publication date
JPH0774740B2 (ja) 1995-08-09
DE69003493D1 (de) 1993-10-28
JPH0387613A (ja) 1991-04-12
EP0413922B1 (de) 1993-09-22
EP0413922A1 (de) 1991-02-27

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Legal Events

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8364 No opposition during term of opposition