DE69001386D1 - Hochempfindliches positionsmess-verfahren. - Google Patents

Hochempfindliches positionsmess-verfahren.

Info

Publication number
DE69001386D1
DE69001386D1 DE9090108417T DE69001386T DE69001386D1 DE 69001386 D1 DE69001386 D1 DE 69001386D1 DE 9090108417 T DE9090108417 T DE 9090108417T DE 69001386 T DE69001386 T DE 69001386T DE 69001386 D1 DE69001386 D1 DE 69001386D1
Authority
DE
Germany
Prior art keywords
measurement method
position measurement
highly sensitive
sensitive position
highly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE9090108417T
Other languages
English (en)
Other versions
DE69001386T2 (de
Inventor
Harry Jonathon Mamin
Daniel Rugar
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of DE69001386D1 publication Critical patent/DE69001386D1/de
Application granted granted Critical
Publication of DE69001386T2 publication Critical patent/DE69001386T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/02—Monitoring the movement or position of the probe by optical means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Radiology & Medical Imaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Light Guides In General And Applications Therefor (AREA)
DE90108417T 1989-05-16 1990-05-04 Hochempfindliches Positionsmess-Verfahren. Expired - Fee Related DE69001386T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/352,804 US5017010A (en) 1989-05-16 1989-05-16 High sensitivity position sensor and method

Publications (2)

Publication Number Publication Date
DE69001386D1 true DE69001386D1 (de) 1993-05-27
DE69001386T2 DE69001386T2 (de) 1993-10-28

Family

ID=23386561

Family Applications (1)

Application Number Title Priority Date Filing Date
DE90108417T Expired - Fee Related DE69001386T2 (de) 1989-05-16 1990-05-04 Hochempfindliches Positionsmess-Verfahren.

Country Status (4)

Country Link
US (1) US5017010A (de)
EP (1) EP0398085B1 (de)
JP (1) JPH0663727B2 (de)
DE (1) DE69001386T2 (de)

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02187944A (ja) * 1989-01-13 1990-07-24 Sharp Corp 再生装置
US5206702A (en) * 1989-10-09 1993-04-27 Olympus Optical Co., Ltd. Technique for canceling the effect of external vibration on an atomic force microscope
JP2679339B2 (ja) * 1990-03-07 1997-11-19 松下電器産業株式会社 微小変位検出装置
JP2661314B2 (ja) * 1990-03-07 1997-10-08 松下電器産業株式会社 形状測定装置及び形状測定方法
JP3000491B2 (ja) * 1991-04-10 2000-01-17 キヤノン株式会社 カンチレバーユニット及びこれを用いた情報処理装置、原子間力顕微鏡、磁力顕微鏡
US5155361A (en) * 1991-07-26 1992-10-13 The Arizona Board Of Regents, A Body Corporate Acting For And On Behalf Of Arizona State University Potentiostatic preparation of molecular adsorbates for scanning probe microscopy
DE69309318T2 (de) * 1992-01-10 1997-10-30 Hitachi Ltd Verfahren und Vorrichtung zum Beobachten einer Fläche
US5280341A (en) * 1992-02-27 1994-01-18 International Business Machines Corporation Feedback controlled differential fiber interferometer
WO1993018525A1 (en) * 1992-03-13 1993-09-16 Park Scientific Instruments Corp. Scanning probe microscope
US5448399A (en) * 1992-03-13 1995-09-05 Park Scientific Instruments Optical system for scanning microscope
US5376790A (en) * 1992-03-13 1994-12-27 Park Scientific Instruments Scanning probe microscope
US5347854A (en) * 1992-09-22 1994-09-20 International Business Machines Corporation Two dimensional profiling with a contact force atomic force microscope
DE4310349C2 (de) * 1993-03-30 2000-11-16 Inst Mikrotechnik Mainz Gmbh Sensorkopf und Verfahren zu seiner Herstellung
US5440920A (en) * 1994-02-03 1995-08-15 Molecular Imaging Systems Scanning force microscope with beam tracking lens
US5866805A (en) * 1994-05-19 1999-02-02 Molecular Imaging Corporation Arizona Board Of Regents Cantilevers for a magnetically driven atomic force microscope
US5753814A (en) * 1994-05-19 1998-05-19 Molecular Imaging Corporation Magnetically-oscillated probe microscope for operation in liquids
US5515719A (en) * 1994-05-19 1996-05-14 Molecular Imaging Corporation Controlled force microscope for operation in liquids
US5513518A (en) * 1994-05-19 1996-05-07 Molecular Imaging Corporation Magnetic modulation of force sensor for AC detection in an atomic force microscope
WO1996028837A1 (en) * 1995-03-10 1996-09-19 Molecular Imaging Corporation Hybrid control system for scanning probe microscopes
US5825020A (en) * 1996-09-06 1998-10-20 The Regents Of The University Of California Atomic force microscope for generating a small incident beam spot
US5997735A (en) * 1997-07-17 1999-12-07 Gorton; Stuart Albert Septic tank with downstream trickling filter
US7551288B1 (en) * 1997-10-28 2009-06-23 Rockwell Automation Technologies, Inc. System for monitoring bearing wear
DE19825210C2 (de) * 1998-04-23 2003-09-25 Gsg Elektronik Gmbh Schaltungsanordnung zur dynamischen Ansteuerung von keramischen Festkörperaktoren
US6312166B1 (en) 1998-11-25 2001-11-06 Nuvonyx, Inc. Laser diode arrays and systems including structures for permitting optical power measurement therefrom
US6882429B1 (en) 1999-07-20 2005-04-19 California Institute Of Technology Transverse optical fiber devices for optical sensing
US6496265B1 (en) * 2000-02-16 2002-12-17 Airak, Inc. Fiber optic sensors and methods therefor
WO2001067122A2 (en) 2000-03-09 2001-09-13 The Johns Hopkins University Force detected magnetic field gradiometer
JP3874358B2 (ja) 2002-08-14 2007-01-31 スイスプローブ アーゲー 片持ち梁および光共振器を備えたセンサ
US20050018199A1 (en) * 2003-07-24 2005-01-27 Leblanc Philip R. Fiber array interferometer for inspecting glass sheets
DE10342331A1 (de) * 2003-09-11 2005-05-04 Surface Imaging Systems S I S Verfahren sowie Messvorrichtung zum Messen der Positionsänderung eines beweglichen Messcantilevers
EP1963816B1 (de) * 2005-11-28 2017-05-17 Vereniging voor Christelijk Hoger Onderwijs, Wetenschappelijk Onderzoek en Patiëntenzorg Optische vorrichtung, einen biegebalken enthaltend, und deren herstellungsverfahren und anwendung
JP2009216638A (ja) * 2008-03-12 2009-09-24 Nec Corp 微小変位測定装置とその測定方法
GB2464151B (en) * 2008-10-07 2012-09-26 Gravitec Instr Ltd Gradiometer for measuring gravitational and magnetic field gradients with improved sensor
WO2010086798A1 (en) * 2009-01-27 2010-08-05 Insiava (Pty) Limited Microchip-based moems and waveguide device
WO2011038423A2 (en) * 2009-06-15 2011-03-31 Tshwane University Of Technology Cmos moems sensor device
US20160097183A1 (en) * 2014-10-06 2016-04-07 Caterpillar Inc. System and method for monitoring position of machine implement

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4652744A (en) * 1982-04-14 1987-03-24 The Board Of Trustees Of The Leland Stanford Junior University Fiber optic sensor for detecting very small displacements of a surface
US4572670A (en) * 1982-10-25 1986-02-25 Rockwell International Corporation Interferometric piezoelectric change of state monitor
DE3311809A1 (de) * 1983-03-31 1984-10-11 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 8000 München Interferometrisches, eichbares fabry-perot-sensorsystem mit doppelbrechendem monomode-lichtwellenleiter
JPS61219803A (ja) * 1985-03-27 1986-09-30 Nippon Kogaku Kk <Nikon> 物理量測定装置
US4724318A (en) * 1985-11-26 1988-02-09 International Business Machines Corporation Atomic force microscope and method for imaging surfaces with atomic resolution
FR2613065B1 (fr) * 1987-03-24 1991-07-26 Electricite De France Interferometre de michelson a fibres optiques et son application notamment a la mesure des temperatures

Also Published As

Publication number Publication date
DE69001386T2 (de) 1993-10-28
JPH03191805A (ja) 1991-08-21
EP0398085A1 (de) 1990-11-22
US5017010A (en) 1991-05-21
JPH0663727B2 (ja) 1994-08-22
EP0398085B1 (de) 1993-04-21

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee