DE68906382D1 - Kapazitives messverfahren fuer absolutwegmessung. - Google Patents

Kapazitives messverfahren fuer absolutwegmessung.

Info

Publication number
DE68906382D1
DE68906382D1 DE8989111779T DE68906382T DE68906382D1 DE 68906382 D1 DE68906382 D1 DE 68906382D1 DE 8989111779 T DE8989111779 T DE 8989111779T DE 68906382 T DE68906382 T DE 68906382T DE 68906382 D1 DE68906382 D1 DE 68906382D1
Authority
DE
Germany
Prior art keywords
measurement
absolute
trail
capacitive
measurement method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8989111779T
Other languages
English (en)
Other versions
DE68906382T2 (de
Inventor
Nils I Andermo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Publication of DE68906382D1 publication Critical patent/DE68906382D1/de
Application granted granted Critical
Publication of DE68906382T2 publication Critical patent/DE68906382T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/003—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2412—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap
    • G01D5/2415—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap adapted for encoders
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03M—CODING; DECODING; CODE CONVERSION IN GENERAL
    • H03M1/00—Analogue/digital conversion; Digital/analogue conversion
    • H03M1/12—Analogue/digital converters
    • H03M1/22—Analogue/digital converters pattern-reading type
    • H03M1/24—Analogue/digital converters pattern-reading type using relatively movable reader and disc or strip
    • H03M1/28—Analogue/digital converters pattern-reading type using relatively movable reader and disc or strip with non-weighted coding
    • H03M1/287—Analogue/digital converters pattern-reading type using relatively movable reader and disc or strip with non-weighted coding using gradually changing slit width or pitch within one track; using plural tracks having slightly different pitches, e.g. of the Vernier or nonius type

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Theoretical Computer Science (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
DE8989111779T 1989-06-28 1989-06-28 Kapazitives messverfahren fuer absolutwegmessung. Expired - Lifetime DE68906382T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP89111779A EP0404980B1 (de) 1989-06-28 1989-06-28 Kapazitives Messverfahren für Absolutwegmessung

Publications (2)

Publication Number Publication Date
DE68906382D1 true DE68906382D1 (de) 1993-06-09
DE68906382T2 DE68906382T2 (de) 1993-08-12

Family

ID=8201547

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8989111779T Expired - Lifetime DE68906382T2 (de) 1989-06-28 1989-06-28 Kapazitives messverfahren fuer absolutwegmessung.

Country Status (2)

Country Link
EP (1) EP0404980B1 (de)
DE (1) DE68906382T2 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4959615A (en) 1988-05-31 1990-09-25 Micro Encoder, Inc. Electrode structure for capacitance-type measurement transducers
EP0413922B1 (de) * 1989-06-29 1993-09-22 Mitutoyo Corporation Kapazitive Einrichtung zur absoluten Positionsmessung
US5428355A (en) * 1992-03-23 1995-06-27 Hewlett-Packard Corporation Position encoder system
US5416479A (en) * 1992-03-23 1995-05-16 Hewlett-Packard Corporation Handle for position encoder system
US5414420A (en) * 1992-03-23 1995-05-09 Hewlett-Packard Corporation Switch interconnect for position encoder system
US5440501A (en) * 1992-06-26 1995-08-08 Mitutoyo Corporation Energy saving capacitance type measuring device for absolute measurement of positions
JP2878913B2 (ja) * 1992-09-14 1999-04-05 株式会社ミツトヨ 変位測定装置
DE4313344A1 (de) * 1993-04-23 1994-11-03 Roch Pierre Ets Kapazitive Meßeinrichtung
EP0747673B1 (de) 1995-06-07 2003-03-26 Brown & Sharpe Tesa S.A. Kapazitive Messvorrichtung
US6747462B2 (en) * 2002-03-18 2004-06-08 Hewlett-Packard Development Company, L.P. Method and system for determining position of a body
US8614587B1 (en) 2013-03-12 2013-12-24 Cypress Semiconductor Corp. Capacitance sensing circuits and methods

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE411392B (sv) * 1977-12-09 1979-12-17 Inst Mikrovagsteknik Vid Tekni Metanordning for kapacitiv bestemning av det inbordes leget hos tva relativt varandra rorliga delar
US4429307A (en) * 1982-01-29 1984-01-31 Dataproducts Corporation Capacitive transducer with continuous sinusoidal output
JPS62235504A (ja) * 1986-04-04 1987-10-15 Mitsutoyo Corp 容量型位置測定トランスデユ−サ
EP0248165B1 (de) * 1986-04-04 1993-07-07 Mitutoyo Corporation Transduktor vom kapazitiven Typ für Lagemessungen

Also Published As

Publication number Publication date
EP0404980A1 (de) 1991-01-02
EP0404980B1 (de) 1993-05-05
DE68906382T2 (de) 1993-08-12

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition