DK0587032T3 - Integreret kapacitiv transducer - Google Patents

Integreret kapacitiv transducer

Info

Publication number
DK0587032T3
DK0587032T3 DK93113955T DK93113955T DK0587032T3 DK 0587032 T3 DK0587032 T3 DK 0587032T3 DK 93113955 T DK93113955 T DK 93113955T DK 93113955 T DK93113955 T DK 93113955T DK 0587032 T3 DK0587032 T3 DK 0587032T3
Authority
DK
Denmark
Prior art keywords
capacitive transducer
integrated capacitive
integrated
transducer
capacitive
Prior art date
Application number
DK93113955T
Other languages
English (en)
Inventor
Jean-Marc Moret
Johan Wilhelm Bergqvist
Original Assignee
Suisse Electronique Microtech
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Suisse Electronique Microtech filed Critical Suisse Electronique Microtech
Application granted granted Critical
Publication of DK0587032T3 publication Critical patent/DK0587032T3/da

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/01—Electrostatic transducers characterised by the use of electrets
    • H04R19/016—Electrostatic transducers characterised by the use of electrets for microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R25/00—Deaf-aid sets, i.e. electro-acoustic or electro-mechanical hearing aids; Electric tinnitus maskers providing an auditory perception
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R25/00—Deaf-aid sets, i.e. electro-acoustic or electro-mechanical hearing aids; Electric tinnitus maskers providing an auditory perception
    • H04R25/60—Mounting or interconnection of hearing aid parts, e.g. inside tips, housings or to ossicles
    • H04R25/604—Mounting or interconnection of hearing aid parts, e.g. inside tips, housings or to ossicles of acoustic or vibrational transducers

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
DK93113955T 1992-09-11 1993-09-01 Integreret kapacitiv transducer DK0587032T3 (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9210947A FR2695787B1 (fr) 1992-09-11 1992-09-11 Transducteur capacitif intégré.

Publications (1)

Publication Number Publication Date
DK0587032T3 true DK0587032T3 (da) 1999-02-08

Family

ID=9433486

Family Applications (1)

Application Number Title Priority Date Filing Date
DK93113955T DK0587032T3 (da) 1992-09-11 1993-09-01 Integreret kapacitiv transducer

Country Status (6)

Country Link
US (1) US5677965A (da)
EP (1) EP0587032B1 (da)
JP (1) JPH06217397A (da)
DE (1) DE69317833T2 (da)
DK (1) DK0587032T3 (da)
FR (1) FR2695787B1 (da)

Families Citing this family (62)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6243474B1 (en) 1996-04-18 2001-06-05 California Institute Of Technology Thin film electret microphone
DE19638159C2 (de) * 1996-09-18 2000-09-07 Implex Hear Tech Ag Vollständig implantierbare Hörhilfe zur elektrischen Anregung des Gehörs
JP3604243B2 (ja) * 1996-11-27 2004-12-22 長野計器株式会社 静電容量型トランスデューサ
FI105880B (fi) 1998-06-18 2000-10-13 Nokia Mobile Phones Ltd Mikromekaanisen mikrofonin kiinnitys
US6088463A (en) 1998-10-30 2000-07-11 Microtronic A/S Solid state silicon-based condenser microphone
WO2000070630A2 (en) * 1999-05-19 2000-11-23 California Institute Of Technology High performance mems thin-film teflon® electret microphone
US6522762B1 (en) * 1999-09-07 2003-02-18 Microtronic A/S Silicon-based sensor system
US6661897B2 (en) * 1999-10-28 2003-12-09 Clive Smith Transducer for sensing body sounds
US6499348B1 (en) * 1999-12-03 2002-12-31 Scimed Life Systems, Inc. Dynamically configurable ultrasound transducer with integral bias regulation and command and control circuitry
JP3611779B2 (ja) * 1999-12-09 2005-01-19 シャープ株式会社 電気信号−音響信号変換器及びその製造方法並びに電気信号−音響変換装置
FI115500B (fi) 2000-03-21 2005-05-13 Nokia Oyj Menetelmä kalvoanturin valmistamiseksi
US6842964B1 (en) 2000-09-29 2005-01-18 Tucker Davis Technologies, Inc. Process of manufacturing of electrostatic speakers
WO2002052893A1 (en) 2000-12-22 2002-07-04 Brüel & Kjær Sound & Vibration Measurement A/S A highly stable micromachined capacitive transducer
US6847090B2 (en) * 2001-01-24 2005-01-25 Knowles Electronics, Llc Silicon capacitive microphone
JP2002345088A (ja) * 2001-05-18 2002-11-29 Mitsubishi Electric Corp 圧力感応装置及びこれに用いられる半導体基板の製造方法
KR100409272B1 (ko) * 2001-07-07 2003-12-11 주식회사 비에스이 칩 마이크로폰
KR100409273B1 (ko) * 2001-07-07 2003-12-11 주식회사 비에스이 칩 마이크로폰
US7298856B2 (en) * 2001-09-05 2007-11-20 Nippon Hoso Kyokai Chip microphone and method of making same
AU2002342150A1 (en) 2001-10-30 2003-05-12 George S. Lesinski Implantation method for a hearing aid microactuator implanted into the cochlea
WO2003047307A2 (en) * 2001-11-27 2003-06-05 Corporation For National Research Initiatives A miniature condenser microphone and fabrication method therefor
AU2003238880A1 (en) * 2002-06-07 2003-12-22 California Institute Of Technology Electret generator apparatus and method
US20040016120A1 (en) * 2002-06-07 2004-01-29 California Institute Of Technology Method and resulting device for fabricating electret materials on bulk substrates
JP3492673B1 (ja) * 2002-06-21 2004-02-03 沖電気工業株式会社 静電容量型加速度センサの製造方法
US6667189B1 (en) * 2002-09-13 2003-12-23 Institute Of Microelectronics High performance silicon condenser microphone with perforated single crystal silicon backplate
US7142682B2 (en) * 2002-12-20 2006-11-28 Sonion Mems A/S Silicon-based transducer for use in hearing instruments and listening devices
DE10300063A1 (de) * 2003-01-03 2004-07-22 W.L. Gore & Associates Gmbh Membran für akustische Wandler
WO2005050680A1 (ja) 2003-11-20 2005-06-02 Matsushita Electric Industrial Co., Ltd. エレクトレット及びエレクトレットコンデンサー
JP4264103B2 (ja) * 2004-03-03 2009-05-13 パナソニック株式会社 エレクトレットコンデンサーマイクロホン
JP4137158B2 (ja) * 2004-03-05 2008-08-20 松下電器産業株式会社 エレクトレットコンデンサーマイクロフォン
DE102004011149B3 (de) * 2004-03-08 2005-11-10 Infineon Technologies Ag Mikrophon und Verfahren zur Herstellung eines Mikrophons
US7415121B2 (en) 2004-10-29 2008-08-19 Sonion Nederland B.V. Microphone with internal damping
FR2884101B1 (fr) * 2005-03-30 2007-06-29 Merry Electronics Co Ltd Condensateur de microphone au silicium avec effort minimal du diaphragme
JP4605470B2 (ja) * 2006-03-31 2011-01-05 ヤマハ株式会社 コンデンサマイクロホン
JP4737721B2 (ja) * 2006-03-10 2011-08-03 ヤマハ株式会社 コンデンサマイクロホン
JP4737719B2 (ja) * 2006-02-24 2011-08-03 ヤマハ株式会社 コンデンサマイクロホン
TW200738028A (en) * 2006-02-24 2007-10-01 Yamaha Corp Condenser microphone
JP2007267049A (ja) * 2006-03-29 2007-10-11 Yamaha Corp コンデンサマイクロホン
JP2007228345A (ja) * 2006-02-24 2007-09-06 Yamaha Corp コンデンサマイクロホン
TW200746868A (en) * 2006-02-24 2007-12-16 Yamaha Corp Condenser microphone
JP4770687B2 (ja) * 2006-03-29 2011-09-14 ヤマハ株式会社 コンデンサマイクロホン
US8126167B2 (en) * 2006-03-29 2012-02-28 Yamaha Corporation Condenser microphone
JP4609363B2 (ja) * 2006-03-29 2011-01-12 ヤマハ株式会社 コンデンサ型マイクロホン及びその製造方法
JP4770692B2 (ja) * 2006-03-29 2011-09-14 ヤマハ株式会社 コンデンサマイクロホン
ATE471635T1 (de) * 2006-03-30 2010-07-15 Sonion Mems As Akustischer einchip-mems-wandler und herstellungsverfahren
CN101141832B (zh) * 2006-09-06 2011-04-20 歌尔声学股份有限公司 单膜电容式传声器芯片
KR20090033091A (ko) * 2007-09-28 2009-04-01 야마하 가부시키가이샤 진동 트랜스듀서 및 그 제조 방법
WO2010002887A2 (en) * 2008-06-30 2010-01-07 The Regents Of The University Of Michigan Piezoelectric memes microphone
FR2936351B1 (fr) * 2008-09-25 2010-10-15 Commissariat Energie Atomique Systeme a capacite variable a dielectrique souple.
US8134215B2 (en) 2008-10-09 2012-03-13 United Microelectronics Corp. MEMS diaphragm
TWI484834B (zh) * 2008-10-15 2015-05-11 Htc Corp 驅動一電容式電聲轉換器之方法及電子裝置
DE102009028177A1 (de) * 2009-07-31 2011-02-10 Robert Bosch Gmbh Bauelement mit einer mikromechanischen Mikrofonstruktur und Verfahren zur Herstellung eines solchen Bauelements
TWI444052B (zh) * 2009-12-17 2014-07-01 Ind Tech Res Inst 電容式傳感器及其製造方法
US8304846B2 (en) 2009-12-31 2012-11-06 Texas Instruments Incorporated Silicon microphone with integrated back side cavity
US8617960B2 (en) * 2009-12-31 2013-12-31 Texas Instruments Incorporated Silicon microphone transducer
EP2523896B1 (de) * 2010-01-11 2014-06-11 ELMOS Semiconductor AG Mikroelektromechanisches halbleiterbauelement und verfahren zu seiner herstellung
US9409763B2 (en) * 2012-04-04 2016-08-09 Infineon Technologies Ag MEMS device and method of making a MEMS device
FR3009907B1 (fr) * 2013-08-20 2015-09-18 Commissariat Energie Atomique Dispositif de conversion d'energie thermique en energie electrique
DE102013224718A1 (de) * 2013-12-03 2015-06-03 Robert Bosch Gmbh MEMS-Mikrofonbauelement und Vorrichtung mit einem solchen MEMS-Mikrofonbauelement
CN204046818U (zh) 2014-07-28 2014-12-24 瑞声声学科技(深圳)有限公司 电容mems麦克风
US10277988B2 (en) * 2016-03-09 2019-04-30 Robert Bosch Gmbh Controlling mechanical properties of a MEMS microphone with capacitive and piezoelectric electrodes
CN207911008U (zh) * 2018-02-06 2018-09-25 瑞声声学科技(深圳)有限公司 Mems麦克风
JP7240289B2 (ja) * 2019-08-13 2023-03-15 株式会社東芝 Ｍｅｍｓ素子

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE428081B (sv) * 1981-10-07 1983-05-30 Ericsson Telefon Ab L M Tilledningsram for en elektretmikrofon
US4533795A (en) * 1983-07-07 1985-08-06 American Telephone And Telegraph Integrated electroacoustic transducer
US4524247A (en) * 1983-07-07 1985-06-18 At&T Bell Laboratories Integrated electroacoustic transducer with built-in bias
NL8702589A (nl) * 1987-10-30 1989-05-16 Microtel Bv Elektro-akoestische transducent van de als elektreet aangeduide soort, en een werkwijze voor het vervaardigen van een dergelijke transducent.
US4906840A (en) * 1988-01-27 1990-03-06 The Board Of Trustees Of Leland Stanford Jr., University Integrated scanning tunneling microscope
US4993072A (en) * 1989-02-24 1991-02-12 Lectret S.A. Shielded electret transducer and method of making the same
US5208789A (en) * 1992-04-13 1993-05-04 Lectret S. A. Condenser microphones based on silicon with humidity resistant surface treatment

Also Published As

Publication number Publication date
FR2695787B1 (fr) 1994-11-10
FR2695787A1 (fr) 1994-03-18
DE69317833D1 (de) 1998-05-14
JPH06217397A (ja) 1994-08-05
EP0587032B1 (fr) 1998-04-08
US5677965A (en) 1997-10-14
DE69317833T2 (de) 1998-11-12
EP0587032A1 (fr) 1994-03-16

Similar Documents

Publication Publication Date Title
DK0587032T3 (da) Integreret kapacitiv transducer
DK0687400T3 (da) Transducer
DE69314228T2 (de) Ultraschallwandleranordnung
NO178386C (no) Transduser-anordning
DE69509992T2 (de) Kapazitiver Beschleunigungsmesser
IS4399A (is) Tafefni gegn interlevkín-1ß umbreytiensími
DE69310474T2 (de) Piezoelektrischer Sensor
DE69209493T2 (de) Kapazitiver Druckwandler
DE69231456T2 (de) Ultraschallwandleranordnung
DE59308645D1 (de) Ultraschallwandler
DE69213904T2 (de) Kapazitiver Druckwandler
ATA55388A (de) Kapazitiver naeherungsgeber
DK76293D0 (da) Forskydningstransducer
DE69327367T2 (de) Magnetoresistiver Wandler
DE9214948U1 (de) Ultraschallwandler-Anordnung
DE69323602D1 (de) Piezoelektrische Messfühler
DE69307980D1 (de) Ultraschallwandler
DE59303034D1 (de) Ultraschallwandler
BR9406795A (pt) Transdutor
IT1223933B (it) Trasduttore di accelerazione ad effetto capacitivo
DE59303655D1 (de) Messwandler
FI922575A (fi) Akustiska vibrationer tillaempande behandlingsapparat foer andningsvaegar
ITMI930146A0 (it) Trasduttore di valori di misura
ITMI930149A0 (it) Trasduttore di valori di misura
FI910870A (fi) Kapacitiv accelerationsmaetare