DE69209493T2 - Kapazitiver Druckwandler - Google Patents

Kapazitiver Druckwandler

Info

Publication number
DE69209493T2
DE69209493T2 DE69209493T DE69209493T DE69209493T2 DE 69209493 T2 DE69209493 T2 DE 69209493T2 DE 69209493 T DE69209493 T DE 69209493T DE 69209493 T DE69209493 T DE 69209493T DE 69209493 T2 DE69209493 T2 DE 69209493T2
Authority
DE
Germany
Prior art keywords
pressure converter
capacitive pressure
capacitive
converter
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69209493T
Other languages
English (en)
Other versions
DE69209493D1 (de
Inventor
Kikuo Tate
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikoki Corp
Original Assignee
Fujikoki Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP3365292U external-priority patent/JPH0592678U/ja
Priority claimed from JP3365192U external-priority patent/JPH0592677U/ja
Application filed by Fujikoki Corp filed Critical Fujikoki Corp
Publication of DE69209493D1 publication Critical patent/DE69209493D1/de
Application granted granted Critical
Publication of DE69209493T2 publication Critical patent/DE69209493T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
DE69209493T 1992-05-21 1992-11-13 Kapazitiver Druckwandler Expired - Fee Related DE69209493T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP3365292U JPH0592678U (ja) 1992-05-21 1992-05-21 圧力センサ
JP3365192U JPH0592677U (ja) 1992-05-21 1992-05-21 圧力センサ

Publications (2)

Publication Number Publication Date
DE69209493D1 DE69209493D1 (de) 1996-05-02
DE69209493T2 true DE69209493T2 (de) 1996-09-12

Family

ID=26372376

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69209493T Expired - Fee Related DE69209493T2 (de) 1992-05-21 1992-11-13 Kapazitiver Druckwandler

Country Status (3)

Country Link
US (1) US5343757A (de)
EP (1) EP0570624B1 (de)
DE (1) DE69209493T2 (de)

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5581226A (en) * 1994-11-02 1996-12-03 Motorola, Inc. High pressure sensor structure and method
CA2217754A1 (en) * 1995-04-28 1996-10-31 Rosemount Inc. Mounting assembly for a pressure transmitter
WO1996034264A1 (en) * 1995-04-28 1996-10-31 Rosemount Inc. Pressure transmitter with high pressure isolator mounting assembly
US5802912A (en) * 1996-01-25 1998-09-08 Delco Electronics Corporation Electrical terminal apparatus
KR19990008150A (ko) * 1996-03-07 1999-01-25 노무라마사나리 압력센서모듈
DE19637763A1 (de) 1996-09-16 1998-03-19 Trw Fahrzeugelektrik Drucksensoreinheit, insbesondere für die Kraftfahrzeugtechnik
US5880372A (en) * 1997-01-10 1999-03-09 Integrated Sensor Solutions Media compatible pressure sensor device utilizing self-aligned components which fit together without the need for adhesives
DE19723615A1 (de) * 1997-06-05 1998-12-10 Trw Automotive Electron & Comp Drucksensoreinheit, insbesondere für die Kraftfahrzeugtechnik
JPH1130559A (ja) * 1997-07-10 1999-02-02 Fuji Koki Corp 圧力センサ
US5939639A (en) * 1997-12-04 1999-08-17 Setra Systems, Inc. Pressure transducer housing with barometric pressure isolation
US6311561B1 (en) 1997-12-22 2001-11-06 Rosemount Aerospace Inc. Media compatible pressure sensor
US6076409A (en) * 1997-12-22 2000-06-20 Rosemount Aerospace, Inc. Media compatible packages for pressure sensing devices
US6055864A (en) * 1998-04-14 2000-05-02 Mannesmann Vdo Ag Pressure sensor and method for its production
JP3309808B2 (ja) * 1998-08-04 2002-07-29 株式会社デンソー 圧力検出装置
US6591684B2 (en) 1998-12-28 2003-07-15 Kelsey-Hayes Company Pressure sensor intergrated into an electro-hydraulic control unit
EP1016573B1 (de) * 1998-12-28 2006-11-02 Kelsey-Hayes Company Pressure sensor for a hydraulic control system and method for installing the sensor
US6506069B2 (en) 2001-01-25 2003-01-14 Kelsey-Hayes Company Floating electrical connector for a pressure sensor
DE19916087A1 (de) 1999-04-09 2000-10-26 Lucas Ind Plc Anordnung zur Messung eines Fluiddrucks
US6447342B1 (en) * 2001-05-10 2002-09-10 Delphi Technologies, Inc. Pressure sensor connector
DE10135568A1 (de) * 2001-07-20 2003-02-06 Endress & Hauser Gmbh & Co Kg Drucksensor
WO2004001362A1 (de) * 2002-06-22 2003-12-31 Robert Bosch Gmbh Einfaches hochdruck-sensor-gehaeuse durch verbindungsteil (auch emv)
US6837112B2 (en) * 2003-03-22 2005-01-04 Stec Inc. Capacitance manometer having a relatively thick flush diaphragm under tension to provide low hysteresis
CN100344883C (zh) * 2003-04-03 2007-10-24 帕克-汉尼芬有限公司 探测和输送来自填充有高压流体的压力室的测量数据的装置
JP2006300774A (ja) * 2005-04-21 2006-11-02 Denso Corp ダイヤフラム型圧力検出装置
JP4710419B2 (ja) * 2005-05-30 2011-06-29 株式会社明電舎 真空コンデンサ及び真空コンデンサの製造方法
JP2007017346A (ja) * 2005-07-08 2007-01-25 Denso Corp センサ装置
DE202006003446U1 (de) * 2006-03-02 2006-05-18 Eto Sensoric Kg Drucksensorvorrichtung
EP2018702A1 (de) * 2006-05-12 2009-01-28 Baumer Electric AG Näherungsschalter und verfahren zum kontaktieren eines sensorprints
DE102006038373A1 (de) * 2006-08-12 2008-02-14 Robert Bosch Gmbh Elektrische Vorrichtung
US7586749B2 (en) * 2007-12-14 2009-09-08 Finetek Co., Ltd. Protecting casing for transducer
DE102008062291B3 (de) * 2008-12-15 2010-07-22 Abb Technology Ag Messeinrichtung und Verfahren zur Diagnose von Geräuschen in fluidischen Systemen
WO2012007987A1 (ja) * 2010-07-13 2012-01-19 三菱電機株式会社 圧力センサユニットおよびブレーキ装置
US8776608B2 (en) * 2011-10-31 2014-07-15 Rosemount Inc. Coplanar process fluid pressure sensor module
JP2015184100A (ja) * 2014-03-24 2015-10-22 セイコーエプソン株式会社 物理量センサー、物理量センサーの製造方法、圧力センサー、高度計、電子機器および移動体
JP6809284B2 (ja) * 2017-02-23 2021-01-06 富士電機株式会社 物理量センサ装置の製造方法および物理量センサ装置
US20210184385A1 (en) * 2019-12-12 2021-06-17 Vitesco Technologies USA, LLC Compressible conductive elastomer for electrical connection of orthogonal substrates

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4414851A (en) * 1981-08-28 1983-11-15 Motorola, Inc. Gauge pressure sensor
US4718278A (en) * 1986-04-30 1988-01-12 Hi-Stat Manufacturing Co., Inc. Pressure transducer with improved calibration
US5051937A (en) * 1986-05-05 1991-09-24 Texas Instruments Incorporated Low cost high precision sensor
US4716492A (en) * 1986-05-05 1987-12-29 Texas Instruments Incorporated Pressure sensor with improved capacitive pressure transducer
US4823603A (en) * 1988-05-03 1989-04-25 Vacuum General, Inc. Capacitance manometer having stress relief for fixed electrode
US4875135A (en) * 1988-12-02 1989-10-17 Texas Instruments Incorporated Pressure sensor
US4888662A (en) * 1988-12-08 1989-12-19 Texas Instruments Incorporated High pressure package for pressure transducers

Also Published As

Publication number Publication date
EP0570624A3 (de) 1994-02-16
DE69209493D1 (de) 1996-05-02
EP0570624B1 (de) 1996-03-27
EP0570624A2 (de) 1993-11-24
US5343757A (en) 1994-09-06

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee