DE69414070D1 - Differential Druckwandler - Google Patents

Differential Druckwandler

Info

Publication number
DE69414070D1
DE69414070D1 DE69414070T DE69414070T DE69414070D1 DE 69414070 D1 DE69414070 D1 DE 69414070D1 DE 69414070 T DE69414070 T DE 69414070T DE 69414070 T DE69414070 T DE 69414070T DE 69414070 D1 DE69414070 D1 DE 69414070D1
Authority
DE
Germany
Prior art keywords
differential pressure
pressure converter
converter
differential
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69414070T
Other languages
English (en)
Other versions
DE69414070T2 (de
Inventor
Alan James Jacobs-Cook
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lumentum Technology UK Ltd
Original Assignee
Bookham Technology PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bookham Technology PLC filed Critical Bookham Technology PLC
Publication of DE69414070D1 publication Critical patent/DE69414070D1/de
Application granted granted Critical
Publication of DE69414070T2 publication Critical patent/DE69414070T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0019—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a semiconductive element
    • G01L9/002—Optical excitation or measuring

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Optical Couplings Of Light Guides (AREA)
DE69414070T 1993-10-16 1994-08-11 Differential Druckwandler Expired - Fee Related DE69414070T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB939321398A GB9321398D0 (en) 1993-10-16 1993-10-16 Differential pressure transducer

Publications (2)

Publication Number Publication Date
DE69414070D1 true DE69414070D1 (de) 1998-11-26
DE69414070T2 DE69414070T2 (de) 2000-11-23

Family

ID=10743682

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69414070T Expired - Fee Related DE69414070T2 (de) 1993-10-16 1994-08-11 Differential Druckwandler

Country Status (5)

Country Link
US (1) US5569856A (de)
EP (1) EP0649009B1 (de)
JP (1) JPH07190873A (de)
DE (1) DE69414070T2 (de)
GB (1) GB9321398D0 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19709846C1 (de) * 1997-02-28 1998-04-02 Siemens Ag Druckdifferenz-Meßumformer
US6182513B1 (en) 1998-12-23 2001-02-06 Radi Medical Systems Ab Resonant sensor and method of making a pressure sensor comprising a resonant beam structure
US7017420B2 (en) 2001-06-08 2006-03-28 Silex Microsystems Ab Miniaturized pressure sensor
US20040047536A1 (en) * 2002-09-05 2004-03-11 Pickrell Gary R. Creep and viscous flow resistant fiber optic sensor
US7047816B2 (en) * 2003-03-21 2006-05-23 Weatherford/Lamb, Inc. Optical differential pressure transducer utilizing a bellows and flexure system
JP2005037314A (ja) * 2003-07-18 2005-02-10 Myotoku Ltd 光干渉型圧力センサ
JP2006058078A (ja) * 2004-08-18 2006-03-02 Hitachi Ltd 熱式空気流量計
JP5403200B2 (ja) * 2006-06-09 2014-01-29 セイコーエプソン株式会社 圧力センサ
JP4332859B2 (ja) * 2007-04-27 2009-09-16 エプソントヨコム株式会社 圧力センサ
US7806001B1 (en) * 2007-06-05 2010-10-05 Orbital Research Inc. Multi-diaphragm pressure sensors
DE102007054505B4 (de) 2007-11-15 2016-12-22 Robert Bosch Gmbh Drehratensensor
DE102008041943A1 (de) * 2008-09-10 2010-03-11 Robert Bosch Gmbh Sensoranordnung und Verfahren zur Herstellung einer Sensoranordnung
GB2508908B (en) * 2012-12-14 2017-02-15 Gen Electric Resonator device
DE102014219262A1 (de) * 2014-09-24 2016-03-24 Conti Temic Microelectronic Gmbh Optische Druckmesseinrichtung
CN110550598B (zh) * 2019-09-04 2022-09-30 中国科学院电子学研究所 谐振式差压传感器及其制备方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR602691A (fr) * 1925-02-10 1926-03-24 Perfectionnements aux produits de lubrification notamment à ceux employés pour le graissage et le refroidissement des pièces travaillées dans les machines-outils
GB266974A (en) * 1926-07-01 1927-03-10 Woodis Pascal Rogers Improvements in or relating to bed-rests
GB279515A (en) * 1926-10-25 1928-09-27 Clay Reduction Company Improvements in or relating to the production of aluminium compounds from raw materials
GB8610253D0 (en) * 1986-04-26 1986-05-29 Stc Plc Resonator device
GB2197069B (en) * 1986-11-03 1990-10-24 Stc Plc Sensor device
GB8701556D0 (en) * 1987-01-24 1987-02-25 Schlumberger Electronics Uk Sensors
JPS63305700A (ja) * 1987-06-08 1988-12-13 Yoshihiko Ishizeki 減圧式密閉箱型スピ−カ−システム
US4790192A (en) * 1987-09-24 1988-12-13 Rosemount Inc. Silicon side by side coplanar pressure sensors
US5029479A (en) * 1988-08-15 1991-07-09 Imo Industries, Inc. Differential pressure transducers
US5022270A (en) * 1989-06-15 1991-06-11 Rosemount Inc. Extended measurement capability transmitter having shared overpressure protection means
US4949581A (en) * 1989-06-15 1990-08-21 Rosemount Inc. Extended measurement capability transmitter having shared overpressure protection means
US5195374A (en) * 1989-08-30 1993-03-23 Schlumberger Industries Limited Sensor systems
EP0419021A3 (en) * 1989-08-30 1991-10-09 Schlumberger Industries Limited Sensors with vibrating elements
GB8929328D0 (en) * 1989-12-29 1990-02-28 Schlumberger Ind Ltd Optical sensing systems

Also Published As

Publication number Publication date
EP0649009A2 (de) 1995-04-19
EP0649009B1 (de) 1998-10-21
EP0649009A3 (de) 1996-02-28
US5569856A (en) 1996-10-29
GB9321398D0 (en) 1993-12-08
JPH07190873A (ja) 1995-07-28
DE69414070T2 (de) 2000-11-23

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Legal Events

Date Code Title Description
8332 No legal effect for de
8328 Change in the person/name/address of the agent

Free format text: STROHSCHAENK UND KOLLEGEN, 81667 MUENCHEN

8370 Indication of lapse of patent is to be deleted
8339 Ceased/non-payment of the annual fee