DE69530784D1 - Elektrostatisch betriebener kapazitiver wandler - Google Patents

Elektrostatisch betriebener kapazitiver wandler

Info

Publication number
DE69530784D1
DE69530784D1 DE69530784T DE69530784T DE69530784D1 DE 69530784 D1 DE69530784 D1 DE 69530784D1 DE 69530784 T DE69530784 T DE 69530784T DE 69530784 T DE69530784 T DE 69530784T DE 69530784 D1 DE69530784 D1 DE 69530784D1
Authority
DE
Germany
Prior art keywords
electrostatic
capacitive converter
operated capacitive
operated
converter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69530784T
Other languages
English (en)
Other versions
DE69530784T2 (de
Inventor
A Bonin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bruker Nano Inc
Original Assignee
Hysitron Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hysitron Inc filed Critical Hysitron Inc
Application granted granted Critical
Publication of DE69530784D1 publication Critical patent/DE69530784D1/de
Publication of DE69530784T2 publication Critical patent/DE69530784T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
    • G01B7/22—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/34—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2417—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying separation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01G—WEIGHING
    • G01G7/00—Weighing apparatus wherein the balancing is effected by magnetic, electromagnetic, or electrostatic action, or by means not provided for in the preceding groups
    • G01G7/06—Weighing apparatus wherein the balancing is effected by magnetic, electromagnetic, or electrostatic action, or by means not provided for in the preceding groups by electrostatic action
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
    • G01L1/144—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors with associated circuitry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/40—Investigating hardness or rebound hardness
    • G01N3/42—Investigating hardness or rebound hardness by performing impressions under a steady load by indentors, e.g. sphere, pyramid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/36—DC mode
    • G01Q60/366—Nanoindenters, i.e. wherein the indenting force is measured
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/003—Generation of the force
    • G01N2203/005—Electromagnetic means
    • G01N2203/0051—Piezoelectric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/02—Details not specific for a particular testing method
    • G01N2203/026—Specifications of the specimen
    • G01N2203/0286—Miniature specimen; Testing on microregions of a specimen
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/02—Details not specific for a particular testing method
    • G01N2203/06—Indicating or recording means; Sensing means
    • G01N2203/0641—Indicating or recording means; Sensing means using optical, X-ray, ultraviolet, infrared or similar detectors
    • G01N2203/0647—Image analysis
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/872—Positioner

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Power Engineering (AREA)
  • General Health & Medical Sciences (AREA)
  • Nanotechnology (AREA)
  • Radiology & Medical Imaging (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Analytical Chemistry (AREA)
  • Electromagnetism (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
DE69530784T 1994-11-14 1995-11-02 Elektrostatisch betriebener kapazitiver wandler Expired - Lifetime DE69530784T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/337,741 US5576483A (en) 1993-10-01 1994-11-14 Capacitive transducer with electrostatic actuation
PCT/US1995/014325 WO1996015423A1 (en) 1994-11-14 1995-11-02 Capacitive transducer with electrostatic actuation

Publications (2)

Publication Number Publication Date
DE69530784D1 true DE69530784D1 (de) 2003-06-18
DE69530784T2 DE69530784T2 (de) 2004-01-29

Family

ID=23321793

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69530784T Expired - Lifetime DE69530784T2 (de) 1994-11-14 1995-11-02 Elektrostatisch betriebener kapazitiver wandler

Country Status (6)

Country Link
US (1) US5576483A (de)
EP (1) EP0792437B1 (de)
JP (1) JP4095669B2 (de)
AU (1) AU4102496A (de)
DE (1) DE69530784T2 (de)
WO (1) WO1996015423A1 (de)

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US6026677A (en) * 1993-10-01 2000-02-22 Hysitron, Incorporated Apparatus for microindentation hardness testing and surface imaging incorporating a multi-plate capacitor system
US5661235A (en) * 1993-10-01 1997-08-26 Hysitron Incorporated Multi-dimensional capacitive transducer
US5777226A (en) * 1994-03-28 1998-07-07 I/O Sensors, Inc. Sensor structure with L-shaped spring legs
US5801472A (en) * 1995-08-18 1998-09-01 Hitchi, Ltd. Micro-fabricated device with integrated electrostatic actuator
CA2207354C (en) * 1996-10-07 2004-09-28 Board Of Control Of Michigan Technological University Apparatus and method for determining the dynamic indentation hardness of materials
US5907102A (en) * 1997-04-15 1999-05-25 Florida State University System and method for performing tensile stress-strain and fatigue tests
US6445294B1 (en) * 1999-07-15 2002-09-03 Automotive Systems Laboratory, Inc. Proximity sensor
WO2001018857A1 (en) * 1999-09-03 2001-03-15 University Of Maryland, College Park Process for fabrication of 3-dimensional micromechanisms
US6820493B1 (en) * 1999-10-06 2004-11-23 Wayne Bonin Precision multi-dimensional capacitive transducer
EP1122761B1 (de) * 2000-02-01 2004-05-26 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Optische Säule für Teilchenstrahlvorrichtung
EP1290364B2 (de) 2000-06-15 2013-02-27 REINZ-Dichtungs-GmbH Flachdichtung
US6516672B2 (en) 2001-05-21 2003-02-11 Rosemount Inc. Sigma-delta analog to digital converter for capacitive pressure sensor and process transmitter
KR100746768B1 (ko) * 2002-03-19 2007-08-06 주식회사 엘지이아이 캔틸레버를 이용한 정보 기록 및 판독 장치
US7277267B1 (en) 2004-05-17 2007-10-02 Wayne Allen Bonin Multi-layer capacitive transducer
US8189300B1 (en) * 2003-05-15 2012-05-29 Wayne Allen Bonin Multi-layer capacitive transducer with mult-dimension operation
US7046497B1 (en) 2003-05-15 2006-05-16 Wayne Bonin Multi-layer capacitive transducer
EP1756835B1 (de) 2004-04-14 2012-08-29 Veeco Instruments Inc. Verfahren und vorrichtung zum erhalten von quantitativen messungen unter verwendung eines instruments auf sondenbasis
US7107694B2 (en) * 2004-06-29 2006-09-19 Hysitron, Incorporated Method for observation of microstructural surface features in heterogeneous materials
DE102005003830B4 (de) 2005-01-25 2013-02-14 Asmec Advanced Surface Mechanics Gmbh Vorrichtung zur hochgenauen Erzeugung und Messung von Kräften und Verschiebungen
US8220318B2 (en) * 2005-06-17 2012-07-17 Georgia Tech Research Corporation Fast microscale actuators for probe microscopy
US7798011B2 (en) * 2006-02-08 2010-09-21 Hysitron, Inc. Actuatable capacitive transducer for quantitative nanoindentation combined with transmission electron microscopy
WO2008042009A1 (en) 2006-03-13 2008-04-10 Asylum Research Corporation Nanoindenter
US7607342B2 (en) * 2006-04-26 2009-10-27 Vecco Instruments, Inc. Method and apparatus for reducing lateral interactive forces during operation of a probe-based instrument
US8266969B2 (en) * 2006-06-07 2012-09-18 Case Western Reserve University Method and system for measuring properties of microstructures and nanostructures
US7898266B2 (en) * 2008-06-04 2011-03-01 Seagate Technology Llc Probe with electrostatic actuation and capacitive sensor
WO2010003149A1 (en) 2008-07-03 2010-01-07 Hysitron Incorporated Micromachined comb drive for quantitative nanoindentation
US9335240B2 (en) 2008-07-03 2016-05-10 Hysitron Incorporated Method of measuring an interaction force
CN102149521A (zh) 2008-07-14 2011-08-10 艾利丹尼森公司 切割涂胶标签的装置和方法
US8798956B2 (en) * 2008-09-30 2014-08-05 Apple Inc. Method and apparatus for surface sensing input device
US8186221B2 (en) * 2009-03-24 2012-05-29 Freescale Semiconductor, Inc. Vertically integrated MEMS acceleration transducer
EP2643658A4 (de) * 2010-11-24 2014-05-21 Hysitron Inc Mechanische prüfinstrumente mit borddaten
US8800371B2 (en) 2012-03-08 2014-08-12 Industrial Technology Research Institute Electrostatic force generator and force measurement system and accelerometer having the same
EP2831600B1 (de) * 2012-03-27 2017-07-19 Hysitron, Inc. Mechanisches testinstrument für ein mikroskopobjektiv
US8984950B2 (en) * 2012-04-20 2015-03-24 Rosemount Aerospace Inc. Separation mode capacitors for sensors
EP2926111B1 (de) * 2012-11-28 2022-07-27 Bruker Nano, Inc. Mikrogefertigter kammantrieb zur quantitativen nanoverzahnung
CN104020040A (zh) * 2014-06-23 2014-09-03 成都东华卓越科技有限公司 加压板
US9752900B2 (en) 2015-07-10 2017-09-05 Wyrobek International, Inc. Multi-plate capacitive transducer
DE102016111909B4 (de) * 2016-06-29 2020-08-13 Infineon Technologies Ag Mikromechanische Struktur und Verfahren zu ihrer Herstellung
RU2723971C1 (ru) * 2020-01-28 2020-06-18 Общество С Ограниченной Ответственностью "Конструкторское Бюро "Дорс" (Ооо "Кб "Дорс") Электростатический датчик для контроля перемещаемого тонкого объекта
US20240264198A1 (en) 2021-07-13 2024-08-08 Ceske Vysoke Uceni Technicke V Praze A method of examining a sample in a scanning tunneling microscope using tip-to-tip sample distance variations
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Also Published As

Publication number Publication date
EP0792437B1 (de) 2003-05-14
WO1996015423A1 (en) 1996-05-23
JPH10508944A (ja) 1998-09-02
DE69530784T2 (de) 2004-01-29
EP0792437A4 (de) 1998-11-18
EP0792437A1 (de) 1997-09-03
US5576483A (en) 1996-11-19
AU4102496A (en) 1996-06-06
JP4095669B2 (ja) 2008-06-04

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: 2K PATENTANWAELTE BLASBERG KEWITZ & REICHEL, PARTN