DE69306019T2 - Drucksensor - Google Patents

Drucksensor

Info

Publication number
DE69306019T2
DE69306019T2 DE69306019T DE69306019T DE69306019T2 DE 69306019 T2 DE69306019 T2 DE 69306019T2 DE 69306019 T DE69306019 T DE 69306019T DE 69306019 T DE69306019 T DE 69306019T DE 69306019 T2 DE69306019 T2 DE 69306019T2
Authority
DE
Germany
Prior art keywords
pressure sensor
sensor
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69306019T
Other languages
English (en)
Other versions
DE69306019D1 (de
Inventor
Masaki Ikeda
Masahiro Hiraka
Akihiko Yoshida
Haruhiko Handa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Application granted granted Critical
Publication of DE69306019D1 publication Critical patent/DE69306019D1/de
Publication of DE69306019T2 publication Critical patent/DE69306019T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/062—Glass compositions containing silica with less than 40% silica by weight
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/062—Glass compositions containing silica with less than 40% silica by weight
    • C03C3/064—Glass compositions containing silica with less than 40% silica by weight containing boron
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/062—Glass compositions containing silica with less than 40% silica by weight
    • C03C3/064—Glass compositions containing silica with less than 40% silica by weight containing boron
    • C03C3/068—Glass compositions containing silica with less than 40% silica by weight containing boron containing rare earths
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C8/00—Enamels; Glazes; Fusion seal compositions being frit compositions having non-frit additions
    • C03C8/02—Frit compositions, i.e. in a powdered or comminuted form
    • C03C8/08—Frit compositions, i.e. in a powdered or comminuted form containing phosphorus
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
    • G01L23/08—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically
    • G01L23/18—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically by resistance strain gauges
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02B—INTERNAL-COMBUSTION PISTON ENGINES; COMBUSTION ENGINES IN GENERAL
    • F02B75/00—Other engines
    • F02B75/02—Engines characterised by their cycles, e.g. six-stroke
    • F02B2075/022—Engines characterised by their cycles, e.g. six-stroke having less than six strokes per cycle
    • F02B2075/027—Engines characterised by their cycles, e.g. six-stroke having less than six strokes per cycle four
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/13—Hollow or container type article [e.g., tube, vase, etc.]
    • Y10T428/131—Glass, ceramic, or sintered, fused, fired, or calcined metal oxide or metal carbide containing [e.g., porcelain, brick, cement, etc.]
    • Y10T428/1317—Multilayer [continuous layer]
DE69306019T 1992-03-18 1993-03-18 Drucksensor Expired - Fee Related DE69306019T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP6166292 1992-03-18
JP24369392 1992-09-11

Publications (2)

Publication Number Publication Date
DE69306019D1 DE69306019D1 (de) 1997-01-02
DE69306019T2 true DE69306019T2 (de) 1997-06-12

Family

ID=26402725

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69306019T Expired - Fee Related DE69306019T2 (de) 1992-03-18 1993-03-18 Drucksensor

Country Status (3)

Country Link
US (1) US5406852A (de)
EP (1) EP0561397B1 (de)
DE (1) DE69306019T2 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004013073A1 (de) * 2004-03-11 2005-09-29 Ab Elektronik Sachsen Gmbh Verfahren zur Herstellung von Druckmesselementen und Druckmesselemente
DE102006010804A1 (de) * 2006-03-07 2007-09-20 Eads Deutschland Gmbh Hochtemperatur-Drucksensorelement, insbesondere zur Messung von Drücken innerhalb von Triebwerken, Verfahren zu dessen Herstellung und Bauteil für Triebwerke

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6222525B1 (en) * 1992-03-05 2001-04-24 Brad A. Armstrong Image controllers with sheet connected sensors
EP0710827A3 (de) * 1994-11-07 1997-04-23 Matsushita Electric Ind Co Ltd Verbrennungsdrucksensor und Herstellungsverfahren
JP3079983B2 (ja) * 1995-12-26 2000-08-21 株式会社日立製作所 半導体型燃焼圧センサ
DE19747001C2 (de) * 1997-10-24 2000-02-24 Mannesmann Vdo Ag Dehnungsmeßstreifen sowie ein mit diesen Dehnungsmeßstreifen hergestellter mechanisch-elektrischer Wandler
DE19753800C2 (de) * 1997-12-04 1999-12-30 Mannesmann Vdo Ag Verfahren zur Herstellung eines elektrischen Widerstandes sowie eines mechanisch-elektrischen Wandlers
US6874377B2 (en) * 1999-11-10 2005-04-05 Honeywell International Inc. Sensor package for flush mounting of a sensor
US6842965B2 (en) * 2000-12-28 2005-01-18 Matsushita Electric Industrial Co., Ltd. Method for manufacturing a strain detector
DE60235346D1 (de) * 2001-10-02 2010-04-01 Panasonic Corp
JP3811042B2 (ja) * 2001-10-04 2006-08-16 アルプス電気株式会社 歪みセンサおよびその製造方法
US7164342B2 (en) * 2002-08-07 2007-01-16 Matsushita Electric Industrial Co., Ltd. Load sensor and method of manufacturing the load sensor, paste used for the method, and method of manufacturing the paste
US7127949B2 (en) 2003-07-08 2006-10-31 National University Of Singapore Contact pressure sensor and method for manufacturing the same
US7882747B2 (en) 2004-12-20 2011-02-08 Panasonic Corporation Strain sensor and method for manufacture thereof
DE102005004603B3 (de) 2005-02-01 2006-06-08 Siemens Ag Kraftsensor
JP2008101918A (ja) * 2006-10-17 2008-05-01 Alps Electric Co Ltd 圧力センサのパッケージ
US8308993B2 (en) * 2008-01-30 2012-11-13 Basf Se Conductive inks
JPWO2011161917A1 (ja) * 2010-06-25 2013-08-19 パナソニック株式会社 加速度センサ
US9945748B2 (en) * 2016-02-10 2018-04-17 Minebea Mitsumi Inc. Pressure sensor and apparatus
EP3438798B1 (de) * 2017-05-05 2020-08-19 Shenzhen Goodix Technology Co., Ltd. Fingerabdruckmodul und mobiles endgerät
WO2018214135A1 (zh) * 2017-05-26 2018-11-29 深圳纽迪瑞科技开发有限公司 单按键及按键阵列

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3729814A (en) * 1967-04-04 1973-05-01 Gen Electric Method for making a composite
DE2507917C2 (de) * 1975-02-24 1986-01-02 Robert Bosch Gmbh, 7000 Stuttgart Einrichtung zur Regelung des optimalen Betriebsverhaltens einer Brennkraftmaschine
DE7615320U1 (de) * 1976-05-14 1979-02-08 Pfaudler-Werke Ag, 6830 Schwetzingen Medizinisches befestigungselement
US4388825A (en) * 1977-05-17 1983-06-21 The Bendix Corporation Integral manifold absolute pressure and ambient absolute pressure sensor and associated electronics
DE2933676C2 (de) * 1979-08-20 1982-02-11 Hottinger Baldwin Messtechnik Gmbh, 6100 Darmstadt Verfahren zur Justierung von Meßwertumformern mit Dehnungsmeßstreifen und Dehnungsmeßstreifen zur Durchführung des Verfahrens.
DE3015356A1 (de) * 1980-04-22 1981-10-29 Robert Bosch Gmbh, 7000 Stuttgart Freitragende schichten sowie verfahren zur herstellung freitragender schichten, insbesondere fuer sensoren fuer brennkraftmaschinen
US4355692A (en) * 1980-11-24 1982-10-26 General Electric Company Thick film resistor force transducers and weighing scales
JPS59132327A (ja) * 1983-01-18 1984-07-30 Aisin Seiki Co Ltd 圧力センサ
NL8301631A (nl) * 1983-05-09 1984-12-03 Philips Nv Weerstandspasta voor een weerstandslichaam.
DE3319605A1 (de) * 1983-05-30 1984-12-06 Siemens AG, 1000 Berlin und 8000 München Sensor mit polykristallinen silicium-widerstaenden
JPH0530122Y2 (de) * 1987-08-28 1993-08-02
JPH01153324A (ja) * 1987-12-10 1989-06-15 Diesel Kiki Co Ltd 車両用空調制御装置
KR890010548A (ko) * 1987-12-16 1989-08-09 로버트 제이. 에드워즈 이중압력센서
US5001454A (en) * 1988-09-12 1991-03-19 Kabushiki Kaisha Toyota Chuo Kenkyusho Thin film resistor for strain gauge
DE3919059A1 (de) * 1989-06-10 1991-01-03 Bosch Gmbh Robert Drucksensor zum erfassen von druckschwankungen einer druckquelle
FR2650389B1 (fr) * 1989-07-27 1993-03-26 Sextant Avionique Dispositif de mesure de deformation d'une membrane
US5242722A (en) * 1990-10-29 1993-09-07 Matsushita Electric Industrial Co., Ltd. Strain sensor
JPH0593659A (ja) * 1990-10-29 1993-04-16 Matsushita Electric Ind Co Ltd ひずみセンサおよびその製造法
FR2670008B1 (fr) * 1990-11-30 1993-03-12 Philips Electronique Lab Circuit de resistances pour jauge de contrainte.

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004013073A1 (de) * 2004-03-11 2005-09-29 Ab Elektronik Sachsen Gmbh Verfahren zur Herstellung von Druckmesselementen und Druckmesselemente
DE102006010804A1 (de) * 2006-03-07 2007-09-20 Eads Deutschland Gmbh Hochtemperatur-Drucksensorelement, insbesondere zur Messung von Drücken innerhalb von Triebwerken, Verfahren zu dessen Herstellung und Bauteil für Triebwerke
US8001844B2 (en) 2006-03-07 2011-08-23 Astrium Gmbh High temperature pressure sensor element, particularly for measuring pressures inside jet engines, method for the production thereof and component for jet engines

Also Published As

Publication number Publication date
EP0561397A3 (en) 1993-11-03
EP0561397A2 (de) 1993-09-22
DE69306019D1 (de) 1997-01-02
US5406852A (en) 1995-04-18
EP0561397B1 (de) 1996-11-20

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee