FR2884101B1 - Condensateur de microphone au silicium avec effort minimal du diaphragme - Google Patents

Condensateur de microphone au silicium avec effort minimal du diaphragme

Info

Publication number
FR2884101B1
FR2884101B1 FR0550809A FR0550809A FR2884101B1 FR 2884101 B1 FR2884101 B1 FR 2884101B1 FR 0550809 A FR0550809 A FR 0550809A FR 0550809 A FR0550809 A FR 0550809A FR 2884101 B1 FR2884101 B1 FR 2884101B1
Authority
FR
France
Prior art keywords
silicon microphone
microphone capacitor
effort
minimal
minimal diaphragm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0550809A
Other languages
English (en)
Other versions
FR2884101A1 (fr
Inventor
Cyuan Sian Jeng
Shu Yuan Hsueh
Shih Chin Gong
Hong Ching Her
Wen Chieh Wei
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Merry Electronics Co Ltd
Original Assignee
Merry Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Merry Electronics Co Ltd filed Critical Merry Electronics Co Ltd
Priority to FR0550809A priority Critical patent/FR2884101B1/fr
Publication of FR2884101A1 publication Critical patent/FR2884101A1/fr
Application granted granted Critical
Publication of FR2884101B1 publication Critical patent/FR2884101B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0067—Mechanical properties
    • B81B3/0072—For controlling internal stress or strain in moving or flexible elements, e.g. stress compensating layers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0257—Microphones or microspeakers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0109—Bridges

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Mechanical Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Pressure Sensors (AREA)
FR0550809A 2005-03-30 2005-03-30 Condensateur de microphone au silicium avec effort minimal du diaphragme Expired - Fee Related FR2884101B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR0550809A FR2884101B1 (fr) 2005-03-30 2005-03-30 Condensateur de microphone au silicium avec effort minimal du diaphragme

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0550809A FR2884101B1 (fr) 2005-03-30 2005-03-30 Condensateur de microphone au silicium avec effort minimal du diaphragme

Publications (2)

Publication Number Publication Date
FR2884101A1 FR2884101A1 (fr) 2006-10-06
FR2884101B1 true FR2884101B1 (fr) 2007-06-29

Family

ID=35344646

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0550809A Expired - Fee Related FR2884101B1 (fr) 2005-03-30 2005-03-30 Condensateur de microphone au silicium avec effort minimal du diaphragme

Country Status (1)

Country Link
FR (1) FR2884101B1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1395550B1 (it) * 2008-12-23 2012-09-28 St Microelectronics Rousset Trasduttore acustico integrato in tecnologia mems e relativo processo di fabbricazione
US9380380B2 (en) 2011-01-07 2016-06-28 Stmicroelectronics S.R.L. Acoustic transducer and interface circuit
JP5872163B2 (ja) 2011-01-07 2016-03-01 オムロン株式会社 音響トランスデューサ、および該音響トランスデューサを利用したマイクロフォン
DE102012200957A1 (de) * 2011-07-21 2013-01-24 Robert Bosch Gmbh Bauelement mit einer mikromechanischen Mikrofonstruktur

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0726887B2 (ja) * 1986-05-31 1995-03-29 株式会社堀場製作所 コンデンサマイクロフオン型検出器用ダイアフラム
FR2695787B1 (fr) * 1992-09-11 1994-11-10 Suisse Electro Microtech Centr Transducteur capacitif intégré.
WO2002052893A1 (fr) * 2000-12-22 2002-07-04 Brüel & Kjær Sound & Vibration Measurement A/S Transducteur capacitif micro-usine tres stable

Also Published As

Publication number Publication date
FR2884101A1 (fr) 2006-10-06

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20141128