FR2859281B1 - Protection d'une membrane deformable contre de fortes deformations dans une structure micromecanique - Google Patents
Protection d'une membrane deformable contre de fortes deformations dans une structure micromecaniqueInfo
- Publication number
- FR2859281B1 FR2859281B1 FR0310397A FR0310397A FR2859281B1 FR 2859281 B1 FR2859281 B1 FR 2859281B1 FR 0310397 A FR0310397 A FR 0310397A FR 0310397 A FR0310397 A FR 0310397A FR 2859281 B1 FR2859281 B1 FR 2859281B1
- Authority
- FR
- France
- Prior art keywords
- protection
- deformable membrane
- against high
- micromechanical structure
- membrane against
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
- G01L19/0618—Overload protection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0310397A FR2859281B1 (fr) | 2003-09-02 | 2003-09-02 | Protection d'une membrane deformable contre de fortes deformations dans une structure micromecanique |
PCT/FR2004/002236 WO2005024370A1 (fr) | 2003-09-02 | 2004-09-02 | Protection d’une membrane deformable contre de fortes deformations dans une structure micromecanique |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0310397A FR2859281B1 (fr) | 2003-09-02 | 2003-09-02 | Protection d'une membrane deformable contre de fortes deformations dans une structure micromecanique |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2859281A1 FR2859281A1 (fr) | 2005-03-04 |
FR2859281B1 true FR2859281B1 (fr) | 2005-12-23 |
Family
ID=34130716
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR0310397A Expired - Lifetime FR2859281B1 (fr) | 2003-09-02 | 2003-09-02 | Protection d'une membrane deformable contre de fortes deformations dans une structure micromecanique |
Country Status (2)
Country | Link |
---|---|
FR (1) | FR2859281B1 (fr) |
WO (1) | WO2005024370A1 (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102020100244A1 (de) | 2020-01-08 | 2021-07-08 | X-FAB Global Services GmbH | Verfahren zur Herstellung eines Membran-Bauelements und ein Membran-Bauelement |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2982023B1 (fr) * | 2011-10-26 | 2015-03-06 | Auxitrol Sa | Structure micromecanique a membrane deformable et a protection contre de fortes deformations |
US9410861B2 (en) * | 2014-03-25 | 2016-08-09 | Honeywell International Inc. | Pressure sensor with overpressure protection |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4852408A (en) * | 1987-09-03 | 1989-08-01 | Scott Fetzer Company | Stop for integrated circuit diaphragm |
US4879627A (en) * | 1988-12-30 | 1989-11-07 | United Technologies Corporation | Differential capacitive pressure sensor with over-pressure protection |
DK0546003T3 (da) * | 1990-08-30 | 1995-05-29 | Platz Karl Otto | Trykomskifter |
FI93059C (fi) * | 1993-07-07 | 1995-02-10 | Vaisala Oy | Kapasitiivinen paineanturirakenne ja menetelmä sen valmistamiseksi |
JPH10148591A (ja) * | 1996-09-19 | 1998-06-02 | Fuji Koki Corp | 圧力検出装置 |
US6595066B1 (en) * | 2002-04-05 | 2003-07-22 | Kulite Semiconductor Products, Inc. | Stopped leadless differential sensor |
-
2003
- 2003-09-02 FR FR0310397A patent/FR2859281B1/fr not_active Expired - Lifetime
-
2004
- 2004-09-02 WO PCT/FR2004/002236 patent/WO2005024370A1/fr active Application Filing
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102020100244A1 (de) | 2020-01-08 | 2021-07-08 | X-FAB Global Services GmbH | Verfahren zur Herstellung eines Membran-Bauelements und ein Membran-Bauelement |
US11708265B2 (en) | 2020-01-08 | 2023-07-25 | X-FAB Global Services GmbH | Method for manufacturing a membrane component and a membrane component |
Also Published As
Publication number | Publication date |
---|---|
FR2859281A1 (fr) | 2005-03-04 |
WO2005024370A1 (fr) | 2005-03-17 |
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