PL361525A1 - System designed to detect stress in micromechanical silicon structures - Google Patents

System designed to detect stress in micromechanical silicon structures

Info

Publication number
PL361525A1
PL361525A1 PL03361525A PL36152503A PL361525A1 PL 361525 A1 PL361525 A1 PL 361525A1 PL 03361525 A PL03361525 A PL 03361525A PL 36152503 A PL36152503 A PL 36152503A PL 361525 A1 PL361525 A1 PL 361525A1
Authority
PL
Poland
Prior art keywords
system designed
silicon structures
detect stress
micromechanical silicon
micromechanical
Prior art date
Application number
PL03361525A
Other languages
Polish (pl)
Other versions
PL205076B1 (en
Inventor
Piotr Dumania
Original Assignee
Instytut Technologii Elektronowej
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Instytut Technologii Elektronowej filed Critical Instytut Technologii Elektronowej
Priority to PL361525A priority Critical patent/PL205076B1/en
Publication of PL361525A1 publication Critical patent/PL361525A1/en
Publication of PL205076B1 publication Critical patent/PL205076B1/en

Links

PL361525A 2003-07-31 2003-07-31 System designed to detect stress in micromechanical silicon structures PL205076B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PL361525A PL205076B1 (en) 2003-07-31 2003-07-31 System designed to detect stress in micromechanical silicon structures

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PL361525A PL205076B1 (en) 2003-07-31 2003-07-31 System designed to detect stress in micromechanical silicon structures

Publications (2)

Publication Number Publication Date
PL361525A1 true PL361525A1 (en) 2005-02-07
PL205076B1 PL205076B1 (en) 2010-03-31

Family

ID=34617678

Family Applications (1)

Application Number Title Priority Date Filing Date
PL361525A PL205076B1 (en) 2003-07-31 2003-07-31 System designed to detect stress in micromechanical silicon structures

Country Status (1)

Country Link
PL (1) PL205076B1 (en)

Also Published As

Publication number Publication date
PL205076B1 (en) 2010-03-31

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Legal Events

Date Code Title Description
LAPS Decisions on the lapse of the protection rights

Effective date: 20060731